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产品目录
» 工艺气体元件（特气阀）
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工艺气体用元件
膜片阀 高纯度工艺气体用 AP
| 系列 | 形式 | 主体材质 | 配管连接 | 配管尺寸 |
|---|---|---|---|---|
| AP | 气控型 | SUS316L 二次熔炼 | 面密封接头 管焊接 | 1/4''，3/8'' 1/2''，3/4'' |
| AP | 小型 | SUS316L 二次熔炼 | 面密封接头 管焊接 | 1/4''，3/8'' 1/2''，3/4'' |
产品特点
■Regulators for Ultra High Purity (UHP) Series AP/SL/AZ
- For UHP gas delivery in semiconductor and other clean industries.
- Body material: 316L SS secondary remelt or 316L SS
- Electropolished wetted parts
- Metal seal to atmosphere
■Regulator/Back Pressure Regulator for General Applications Series AK/BP
- For wide variety of applications from semiconductor to general.
- Body material 316 SS or brass available depending on gas.
■Diaphragm Valve for Ultra High Purity Series AP
- For UHP gas delivery in semiconductor and other clean industries.
- Used as gas shutoff valve.
- No spring is used for the wetted parts and drive part is also separated
from the diaphragm. Dead space in the flow path is small to suppress
the particle generation.
■Check Valve/Vacuum Generator/Flow Switch Series AP
[Check valve]
- Fluid back-flow is prevented by back pressure.
- Unique design with only one moving part in the gas stream, an O-ring.
- Springless structure suppresses particle generation by vibration or
chattering or pressure fluctuation on downstream side.
[Vacuum generator]
- Vacuum generation equipment.
- Applicable to emission of unnecessary gas remaining inside the
piping during gas cylinder replacement.
[Flow switch]
- Detects excess flow above a given flow rate, caused by pipe breakage, etc.
