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In-line Air Filter ZFC

Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Air Suction Filters
Air Preparation Equipment » Air Preparation Filters
Features
    ・Operating pressure range: −100 kPa to 1.0 MPa
    　Both positive pressure and vacuum pressure can be used with one unit.
    ・With lock mechanism
    　During positive pressure, it prevents components from being scattered when they are loosened.
    ・2 types of transparent case materials are available:
    　Polycarbonate (Standard), Nylon (Made to order)

    Note 1) Supply pressure: 0.7 MPa, Differential pressure: 30 kPa
    Note 2) Made to order
Safety Instructions　Vacuum Equipment/Precautions　Series Variations/Model Selection　Green Procurement (RoHS)
SeriesApplicable tubing O.D.
Metric		Applicable tubing O.D.
Inch		Flow rate
L/min (ANR)Note 1)
Positive pressure		Flow rate
L/min (ANR)
Vacuum pressure		Filtration (μm)
ZFC1□φ2, φ3.2φ1/8''15 / 452 / 55，10Note 2）
ZFC3□φ3.2, φ4φ1/8'', φ5/32''50 / 807 / 105，10Note 2）
ZFC5□φ4, φ6φ5/32'', φ1/4''100 / 20010 / 205，10Note 2）
ZFC7□φ6, φ8 , φ10, φ12φ1/4'', φ5/16'', φ3/8''250 / 450 / 550 / 65030 / 70 /80 / 1005，10Note 2）

Pin Clamp Cylinder C（L）KQG32/C（L）KU32

Air Cylinders » Clamp Cylinders
    ・2 types of clamping heights can be selected: 30 mm, 100 mm
    ・Plate cylinder type: Width 29 mm
    ・All types come equipped with a lock.
    ・Plate cylinder type with small auto switch
    ・Newly added guide pins and a diamond shape option (Available for ø10 or more) for workpieces with ø9, ø11, and ø13 hole diameters

    ∗ The C(L)KU32-X2091/X2092 series has been discontinued in June 2017.
    　Please select the C(L)KU32-X2321/X2322 series.


  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Actuators/Precautions
Auto Switches/Precautions　Model Selection/Technical Data
Green Procurement (RoHS)
TypeSeriesGuide pin shapeBore size (mm)
Compact cylinder
Magnetic field resistant
auto switch mounting type		CKQG32-X2081/X2082Round
Diamond		32
Compact cylinder with lock
Magnetic field resistant
auto switch mounting type		CLKQG32-X2081/X2082Round
Diamond		32
Plate cylinder
Magnetic field resistant
auto switch mounting type		CKU32-X2091/X2092Round
Diamond		32
Plate cylinder with lock
Magnetic field resistant
auto switch mounting type		CLKU32-X2091/X2092Round
Diamond		32

Guide Cylinder/Compact Type MGC

Air Cylinders » Guide Cylinders
    ・Linear transfer unit with compact guide body and front plate
    ・Compact, lightweight, and space saving
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Guide Cylinder/Compact Type MGC
    Manual
    Type Series Action Bore size (mm) View search result
    StandardMGCDouble acting20，25，32，40，50View search result
  • Guide Cylinder/Compact Type MGC
    Symbol Specifications Download
    -XC79 Simple Specials Tapped hole drilled hole pinned hole machined additionally PDF
  • Guide Cylinder/Compact Type MGC
    Symbol Specifications Download
    -XB6 Made to Order Common Specifications Heat resistant cylinder (－10 to 150℃) PDF
    -XB13 Made to Order Common Specifications Low speed cylinder (5 to 50 mm/s) PDF
    -XC4 Made to Order Common Specifications With heavy duty scraper PDF
    -XC6 Made to Order Common Specifications Made of stainless steel PDF
    -XC8 Made to Order Common Specifications Adjustable stroke cylinder/Adjustable extension type PDF
    -XC9 Made to Order Common Specifications Adjustable stroke cylinder/Adjustable retraction type PDF
    -XC11 Made to Order Common Specifications Dual stroke cylinder/Single rod type PDF
    -XC13 Made to Order Common Specifications Auto switch rail mounting type PDF
    -XC22 Made to Order Common Specifications Fluororubber seals PDF
    -XC35 Made to Order Common Specifications With coil scraper PDF
    -XC37 Made to Order Common Specifications Larger throttle diameter of connection port PDF
    -XC56 Made to Order Common Specifications With knock pin holes PDF
    -XC74 Made to Order Common Specifications With front plate for MGG cylinder PDF
    -XC78 Made to Order Common Specifications Auto switch mounting special dimensions at stroke end PDF
Safety Instructions　Actuators/Precautions　Auto Switches/Precautions
Model Selection/Technical Data　Simple Specials
Made to Order Common Specifications　Series Variation　Green Procurement (RoHS)
TypeSeriesActionBore size (mm)
StandardMGCDouble acting20，25，32，40，50

Air Slide Table MXJ

Air Cylinders » Table Cylinders
Features
    ・The integrated front mounting part and table results in a highly accurate and rigid top and front mounting surface.
    ・Traveling parallelism: 0.005 mm
    ・Height: 10 mm/Width: 20 mm/Length: 43 mm (MXJ4)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Actuators/Precautions　Auto Switches/Precautions
Model Selection/Technical Data　Quick Selection Table　Made to Order Common Specifications
Green Procurement (RoHS)
TypeSeriesActionBore size (mm)
StandardMXJDouble acting4，6，8

Compact Cylinder CQ2/CDQ2

Air Cylinders » Compact Air Cylinders
Features
    ・Sizes ø4, ø6, and ø10 have been added. [New]
    ・ø4 to ø200 lineup
    ・Space-saving cylinder designed with a compact body
    ・Small auto switches can be mounted on 4 surfaces.
    　(1 surface for ø6 and ø10, 2 surfaces for ø12 to ø25)
    ・No projection of the auto switch
    ・Weight: Reduced by 5 to 13% (Compared with the existing CQ2 series)
    ・Newly added compact type foot brackets and double clevis pivot bracket
    ・Part numbers with a rod end bracket and/or mounting bolt are available.
    　(It is not necessary to order a bracket for the applicable cylinder
    　separately.)
    ・With auto switch (CDQ2 series: CDQ2, CDQ2W, CDQ2K, CDQ2KW, CDQP2,
    　CDQ2□S, CDBQ2)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Compact Cylinder CQ2/CDQ2
    Symbol Specifications Download
    -XA1・2・6・7・11・17・18 Simple Specials CQS/CQS-XB24/CQ2/CQ2-XB24/RQ/CLQ(φ12 to φ25):Change of rod end shape PDF
    -XA1 to XA23/-XA26 to XA30 Simple Specials CQ2/CQ2-XB24/RQ/CLQ(φ32 to φ100)/CQ2 Large bore size(φ125 to φ200):Change of rod end shape PDF
  • Compact Cylinder CQ2/CDQ2
    Symbol Specifications Download
    -XB6 Made to Order Common Specifications Heat resistant cylinder (－10 to 150℃) PDF
    -XB7 Made to Order Common Specifications Cold resistant cylinder (－40 to 70℃) PDF
    -XB9 Made to Order Common Specifications Low speed cylinder (10 to 50 mm/s) PDF
    -XB10 Made to Order Common Specifications Intermediate stroke (Using exclusive body) PDF
    -XB10A Made to Order Common Specifications Intermediate stroke (Spacer-installed type) PDF
    -XB11 Made to Order Common Specifications Long stroke type PDF
    -XB13 Made to Order Common Specifications Low speed cylinder (5 to 50 mm/s) PDF
    -XB14 Made to Order Common Specifications Cylinder with heat resistant auto switch PDF
    -XC2（A） Made to Order Common Specifications Rod end length extended 10 mm PDF
    -XC4 Made to Order Common Specifications With heavy duty scraper PDF
    -XC6 Made to Order Common Specifications Made of stainless steel PDF
    -XC8 Made to Order Common Specifications Adjustable stroke cylinder/Adjustable extension type PDF
    -XC9 Made to Order Common Specifications Adjustable stroke cylinder/Adjustable retraction type PDF
    -XC10 Made to Order Common Specifications Dual stroke cylinder/Double rod type PDF
    -XC11 Made to Order Common Specifications Dual stroke cylinder/Single rod type PDF
    -XC26 Made to Order Common Specifications With split pins for double clevis pin/double knuckle joint pin and flat washers PDF
    -XC26□ Made to Order Common Specifications Double clevis width/Double knuckle width 12.5 mm 16.5 mm 19.5 mm: With double clevis double knuckle joint PDF
    -XC27 Made to Order Common Specifications Double clevis and double knuckle joint pins made of stainless steel PDF
    -XC35 Made to Order Common Specifications With coil scraper PDF
    -XC36 Made to Order Common Specifications With boss in rod side PDF
    -XC85 Made to Order Common Specifications Grease for food processing equipment PDF
    -XC88 Made to Order Common Specifications Spatter resistant coil scraper Lube-retainer Grease for welding (Piston rod: Stainless steel 304) PDF
    -XC89 Made to Order Common Specifications Spatter resistant coil scraper Lube-retainer Grease for welding (Piston rod: S45C) PDF
    -XC91 Made to Order Common Specifications Spatter resistant coil scraper Grease for welding (Piston rod: S45C) PDF
    -XC92 Made to Order Common Specifications Dust resistant actuator PDF
Safety Instructions　Actuators/Precautions　Auto Switches/Precautions
Model Selection/Technical Data　Quick Selection Table
Simple Specials　Made to Order Common Specifications　Green Procurement (RoHS)
TypeSeriesActionBore size (mm)
StandardCQ2-ZDouble acting, Single rod4，6，10，12，16，20，25，32，40，50，63，80，100
StandardCQ2W-ZDouble acting, Double rod12，16，20，25，32，40，50，63，80，100
StandardCQ2-ZSingle acting (Spring return/extend)12，16，20，25，32，40，50
Large bore sizeCQ2-ZDouble acting, Single rod125，140，160，180，200
Large bore sizeCQ2W-ZDouble acting, Double rod125，140，160，180，200
Long strokeCQ2-ZDouble acting, Single rod32，40，50，63，80，100
Non-rotating rodCQ2K-ZDouble acting, Single rod12，16，20，25，32，40，50，63
Non-rotating rodCQ2KW-ZDouble acting, Double rod12，16，20，25，32，40，50，63
Water resistantCQ2-R/VDouble acting, Single rod20，25，32，40，50，63，80，100
Water resistantCQ2W-R/VDouble acting, Double rod40，50，63，80，100
Axial piping
（Common piping）		CQP2Double acting, Single rod12，16，20，25，32，40，50，63，80，100
Axial piping
（Common piping）		CQP2Single acting (Spring return/extend)12，16，20，25，32，40，50
Anti-lateral loadCQ2□S-ZDouble acting, Single rod32，40，50，63，80，100
With end lockCBQ2Double acting, Single rod20，25，32，40，50，63，80，100

Air Cylinder CM2/CDM2

Air Cylinders » Standard Air Cylinders (Round Type）
Features
    ・Female rod end is available as standard.
    ・Easy fine adjustment of auto switch position
    ・Single clevis and trunnion pivot brackets are available.
    ・Part numbers with a rod end bracket and/or pivot bracket are available.
    　(It is not necessary to order a bracket for the applicable cylinder separately.)
    ・With auto switch (CDM2-Z series: CDM2, CDM2W, CDM2K, CDM2KW,
    　CDM2R, CDM2RK, CDM2□P, CDBM2)

    ∗ CM2-Z series (standard type double acting, single rod) will be
    　discontinued in End of November 2025.
    　Please select CM2-Z1 Series. ▶Click here for details.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Air Cylinder CM2/CDM2
    Manual
    Type Series Action Bore size (mm) View search result
    StandardCM2-ZDouble acting, Single rod20，25，32，40View search result
    StandardCM2-ZSingle acting (Spring return/extend)20，25，32，40View search result
    StandardCM2W-ZDouble acting, Double rod20，25，32，40View search result
    Non-rotating rodCM2K-ZDouble acting, Single rod20，25，32，40View search result
    Non-rotating rodCM2K-ZSingle acting (Spring return/extend)20，25，32，40View search result
    Non-rotating rodCM2KW-ZDouble acting, Double rod20，25，32，40View search result
    Direct mountCM2R-ZDouble acting, Single rod20，25，32，40View search result
    Non-rotating rod/
    Direct mount    		CM2RK-ZDouble acting, Single rod20，25，32，40View search result
    Centralized pipingCM2□PDouble acting, Single rod20，25，32，40View search result
    With end lockCBM2Double acting, Single rod20，25，32，40View search result
  • Air Cylinder CM2/CDM2
    Symbol Specifications Download
    -XB6 Made to Order Common Specifications Heat resistant cylinder (－10 to 150℃) PDF
    -XB7 Made to Order Common Specifications Cold resistant cylinder (－40 to 70℃) PDF
    -XB9 Made to Order Common Specifications Low speed cylinder (10 to 50 mm/s) PDF
    -XB12 Made to Order Common Specifications External stainless steel cylinder PDF
    -XB13 Made to Order Common Specifications Low speed cylinder (5 to 50 mm/s) PDF
    -XC3 Made to Order Common Specifications Special port location PDF
    -XC4 Made to Order Common Specifications With heavy duty scraper PDF
    -XC5 Made to Order Common Specifications Heat resistant cylinder (－10 to 110℃) PDF
    -XC6 Made to Order Common Specifications Made of stainless steel PDF
    -XC8 Made to Order Common Specifications Adjustable stroke cylinder/Adjustable extension type PDF
    -XC9 Made to Order Common Specifications Adjustable stroke cylinder/Adjustable retraction type PDF
    -XC10 Made to Order Common Specifications Dual stroke cylinder/Double rod type PDF
    -XC11 Made to Order Common Specifications Dual stroke cylinder/Single rod type PDF
    -XC12 Made to Order Common Specifications Tandem cylinder PDF
    -XC13 Made to Order Common Specifications Auto switch rail mounting type PDF
    -XC20 Made to Order Common Specifications Head cover axial port PDF
    -XC22 Made to Order Common Specifications Fluororubber seals PDF
    -XC25 Made to Order Common Specifications No fixed throttle of connection port PDF
    -XC27 Made to Order Common Specifications Double clevis and double knuckle joint pins made of stainless steel PDF
    -XC29 Made to Order Common Specifications Double knuckle joint with spring pin PDF
    -XC35 Made to Order Common Specifications With coil scraper PDF
    -XC38 Made to Order Common Specifications Vacuum (Rod through-hole) PDF
    -XC52 Made to Order Common Specifications Mounting nut with set screw PDF
    -XC85 Made to Order Common Specifications Grease for food processing equipment PDF
    -XC92 Made to Order Common Specifications Dust resistant actuator PDF
Safety Instructions　Actuators/Precautions　Auto Switches/Precautions
Model Selection/Technical Data　Quick Selection Table
Simple Specials　Made to Order Common Specifications　Green Procurement (RoHS)
TypeSeriesActionBore size (mm)
StandardCM2-ZDouble acting, Single rod20，25，32，40
StandardCM2-ZSingle acting (Spring return/extend)20，25，32，40
StandardCM2W-ZDouble acting, Double rod20，25，32，40
Non-rotating rodCM2K-ZDouble acting, Single rod20，25，32，40
Non-rotating rodCM2K-ZSingle acting (Spring return/extend)20，25，32，40
Non-rotating rodCM2KW-ZDouble acting, Double rod20，25，32，40
Direct mountCM2R-ZDouble acting, Single rod20，25，32，40
Non-rotating rod/
Direct mount		CM2RK-ZDouble acting, Single rod20，25，32，40
Centralized pipingCM2□PDouble acting, Single rod20，25，32，40
With end lockCBM2Double acting, Single rod20，25，32，40

3-Port Solenoid Valve/Direct Operated Poppet Type VT307

Directional Control Valves » Direct Operated 3/4/5 Port Solenoid Valves
Features
    ・Energy-saving type: 1.8 W
    ・A single valve with various valve functions (Universal porting type)
    ・Low concentration ozone resistant
    　Rubber seal material: HNBR for main valve
    ・Mounting dimensions are interchangeable with the existing product.
    ・Manifold type no.: VV307
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • 3-Port Solenoid Valve/Direct Operated Poppet Type VT307
    Manual
    Series View search result
    VT307View search result
  • 3-Port Solenoid Valve/Direct Operated Poppet Type VT307
    DoC/IM
    Series View search result
    VT307View search result
Safety Instructions　3/4/5 Port Solenoid Valves/Precautions　Selection/Technical Data
Green Procurement (RoHS)
SeriesFlow rate characteristics
2→3 (A→R)
C［dm3/（s・bar）］		Flow rate characteristics
2→3 (A→R)
b		Flow rate characteristics
2→3 (A→R)
Cv		Power
consumption
(W)		For use
in vacuum
applications
VT3070.710.250.174 (Standard)
1.8 (Energy-saving type)		-101.2 kPa

5-Port Solenoid Valve SY3000/5000/7000/9000

Directional Control Valves » Pilot Operated 4/5 Port Solenoid Valves
Equipment for the Semiconductor Industries » Exhaust Line
    ・The combined mounting of a 3-port valve and a 5-port valve is possible.
    ・Power consumption: 0.1 W (With power saving circuit)
    ・A wide variety of manifold options are available, such as the aluminum
    　body manifold, DIN rail, and stacking type manifold.
    ・Manifold type no.: SS5Y3, SS5Y5, SS5Y7, SS5Y9
    ・Supports Interface regulators

    ＊The EX510 series is to be discontinued. When designing new equipment
    　and facilities, consider using another series (EX260/EX600) instead.

Safety Instructions　3/4/5 Port Solenoid Valves/Precautions　Selection/Technical Data
Green Procurement (RoHS)
SeriesFlow rate characteristics
4/2→5/3（A/B→EA/EB）
C［dm3/（s・bar）］		Flow rate characteristics
4/2→5/3（A/B→EA/EB）
b		Flow rate characteristics
4/2→5/3（A/B→EA/EB）
Cv		Applicable
cylinder size		Power
consumption
(W)
SY30001.10.300.26φ400.35(Standard)
0.1(With power saving circuit)
SY50002.80.290.66φ630.35(Standard)
0.1(With power saving circuit)
SY70004.50.271.1φ800.35(Standard)
0.1(With power saving circuit)
SY9000100.292.5φ1000.35(Standard)
0.1(With power saving circuit)
SY3001.10.300.26φ400.35(Standard)
0.1(With power saving circuit)
SY5002.80.290.66φ630.35(Standard)
0.1(With power saving circuit)

In-line Air Filter (Bidirectional Acquisition Type) ZFD

Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Air Suction Filters
Features
    ・Operating pressure range: −100 kPa to 0.5 MPa
    ・Able to capture foreign matter in both vacuum adsorption and vacuum
    　release directions, Prevents foreign matter from scattering again
    ・Space saving
    　Installation area: 41% reduction
    ・Check valve enclosure
    　Flow order: Filter➡Check valve
    　Prevents foreign matter from getting caught in the check valve
    ・Applicable tubing O.D.: ø4, ø6, ø8

    Related product: Vacuum Unit ZK2 Series
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • In-line Air Filter (Bidirectional Acquisition Type) ZFD
    Manual
    Series View search result
    ZFD53View search result
    ZFD54View search result
    ZFD55View search result
Safety Instructions　Vacuum Equipment/Precautions　Series Variations　Green Procurement (RoHS)
SeriesApplicable tubing O.D. MetricOperating pressure range [kPa]Vacuum release pressure [MPa]Weight [g]
ZFD53ø4−100 to 00.5 or less34
ZFD54ø6−100 to 00.5 or less33
ZFD55ø8−100 to 00.5 or less35

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