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|Temperature Control Equipment
You can use tap water that satisfies the water quality standard. Also, in the cases where deionized water is to be used as the circulating fluid, select the option -M (Applicable to deionized water piping). The resulting specifications do not use copper-based material as the material of the parts that are in contact with fluid in the circulating fluid circuit.
[Note 1: Regarding the water quality standard, please refer to the Specific Product Precautions of the HRS.]
[Note 2: Upper limit of the applicable resistivity HRS□-M: Up to 4.5 MΩ・cm, HRS/HRSH (standard): Up to 1 MΩ・cm]
[Note 3: The DI filter which keeps the electrical resistance is separately available.]