WEB Catalog

Product Information »  WEB Catalog  » Equipment for the Semiconductor Industries  » Slit Valve/Transfer

Slit Valve/Transfer


A B C D E F G H I J K L M N O P Q R S T U V W X Y Z

For 300 mm Wafer: Parallel Seal Type Slit Valve XGTP

Features
    ・Long service life: 3 million cycles (within standard temperature range)
    ・Low particle generation: Reduced by 1/5 or more
    　(compared with the existing product)
    ・Easier maintenance
    　Easy replacement of bellows
    　Gate can be replaced from above. (Made to order)
    ・Safety measures
    　A mechanical end lock mechanism has been adopted.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • For 300 mm Wafer: Parallel Seal Type Slit Valve XGTP
    Manual
    Series View search result
    XGTPView search result
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Green Procurement (RoHS)
SeriesOperating environmental
pressure (Pa)(abs)		FluidOpening window size
(Height x Width)
(mm)		Operating
pressure
(MPa)(G)
XGTPAtmospheric pressure
to 10-6		Inert gas50 x 3360.45 to 0.6

Slit Valve XGT

    ・This product is suitable to act as the partition valve between the load lock chamber and the transfer chamber or between the transfer chamber and the process chamber in semiconductor equipment or other equipment.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Slit Valve XGT
    Manual
    Series View search result
    XGTView search result
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Green Procurement (RoHS)
SeriesOperating environmental
pressure (Pa)(abs)		FluidOpening window size
(Height x Width)
(mm)		Operating
pressure
(MPa)(G)
XGTAtmospheric pressure
to 10-6		Inert gas type vacuum32 x 222
46 x 236
50 x 336		0.45 to 0.6

Rodless Cylinder for Vacuum CYV

    ・Air cylinder for transfer in vacuum environments (1.3 x 10-4 Pa)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Rodless Cylinder for Vacuum CYV
    Manual
    Series Bore size (mm) View search result
    CYV15, 32View search result
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Green Procurement (RoHS)
SeriesOperating environment pressure
[Pa (ABS)]		Bore size (mm)
CYVAtmosphere to 1.3 x 10-415, 32

Non-contact Gripper XT661

Features
    ・Assists in non-contact workpiece transfer
    ・Max. workpiece suction distance: 10 mm
    ・2 types are available:
    　Cyclone type: High lift: Max. 44 N
    　Bernoulli type: Amplitude of the workpiece during gripping: ±0.01 mm or less
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Vacuum Equipment/Precautions　Series Variations/Model Selection
Green Procurement (RoHS)

Go Top