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For 300 mm Wafer: Parallel Seal Type Slit Valve XGTP
High Vacuum Equipment » Slit Valves
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・Long service life: 3 million cycles (within standard temperature range)
・Low particle generation: Reduced by 1/5 or more
(compared with the existing product)
・Easier maintenance
Easy replacement of bellows
Gate can be replaced from above. (Made to order)
・Safety measures
A mechanical end lock mechanism has been adopted.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Green Procurement (RoHS)
| Series | Operating environmental pressure (Pa)(abs) | Fluid | Opening window size (Height x Width) (mm) | Operating pressure (MPa)(G) |
|---|---|---|---|---|
| XGTP | Atmospheric pressure to 10-6 | Inert gas | 50 x 336 | 0.45 to 0.6 |
Vacuum Angle Valve with Release Valve XLJ
High Vacuum Equipment » Other
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・Prevents the reverse flow of oil through the roughing pump (rotary pump) into the chamber
・Reduced piping labor due to the built-in release valve structure
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Green Procurement (RoHS)
| Series | Actuation | Valve type | Shaft seal type | Flange size |
|---|---|---|---|---|
| XLJ | Electromagnetic | Normally closed/Vacuum pilot | O-ring seal | 25, 40 |
Aluminum High Vacuum Angle Valve XLA/C/F/G
High Vacuum Equipment » High Vacuum Valves
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・Aluminum bodied
Uniform baking temperature
Lightweight, Compact
Minimal outgassing
Minimal contamination from heavy metals
・Bellows are replaceable.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Auto Switches Common Specifications Green Procurement (RoHS)
| Series | Actuation | Valve type | Shaft seal type | Application | Flange size |
|---|---|---|---|---|---|
| XLA-2 | Air operated | Single acting (N.C.) | Bellows seal | Dust free, Cleaned | 16 to 80 |
| XLAV-2 (With solenoid valve) | Air operated | Single acting (N.C.) | Bellows seal | Dust free, Cleaned | 16 to 80 |
| XLC-2 | Air operated | Double acting | Bellows seal | Dust free, Cleaned | 16 to 80 |
| XLF-2 | Air operated | Single acting (N.C.) | O-ring seal | High-speed operation, High operating cycles | 16 to 80 |
| XLFV-2 (With solenoid valve) | Air operated | Single acting (N.C.) | O-ring seal | High-speed operation, High operating cycles | 16 to 80 |
| XLG -2 | Air operated | Double acting | O-ring seal | High-speed operation, High operating cycles | 16 to 80 |
Thermo-chiller/Dual Channel Thermo-chiller for Lasers HRL
Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible ProductsIndustrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Dual Channel Thermo chiller for Lasers
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・Temperatures for 2 fluid channel systems can be controlled individually
by one chiller.
・Space saving, Reduced wiring
Footprint: 22% reduction
One power supply system for 2 channels
・Energy saving
Power consumption reduced by 30%
・Touch panel
・Power supply:
3-phase 200 VAC (50 Hz)
3-phase 200 to 230 VAC (60 Hz)
3-phase 380 to 415 VAC (50/60 Hz)
3-phase 460 to 480 VAC (60 Hz)
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Can be used in a wide range of applications!
Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Can be used in a wide range of applications!
Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRL100 | CH1: 15 to 35℃ CH2: 10 to 40℃ | CH1:9 kw, CH2: 1.0 kW (Max. 5.0 kW) | CH1:±0.1, CH2:±0.5 | Air-cooled refrigeration, Water-cooled refrigeration | Tap water, Deionized water |
| HRL200 | CH1: 15 to 35℃ CH2: 10 to 40℃ | CH1:9 kw, CH2: 1.0 kW (Max. 5.0 kW) | CH1:±0.1, CH2:±0.5 | Air-cooled refrigeration, Water-cooled refrigeration | Tap water, Deionized water |
| HRL300 | CH1: 15 to 35℃ CH2: 10 to 40℃ | CH1:26 kw, CH2: 1.0 kW (Max. 5.0 kW) | CH1:±0.1, CH2:±0.5 | Air-cooled refrigeration | Tap water, Deionized water |
| HRL400 | CH1: 15 to 35℃ CH2: 10 to 40℃ | CH1:26 kw, CH2: 1.0 kW (Max. 5.0 kW) | CH1:±0.1, CH2:±0.5 | Air-cooled refrigeration | Tap water, Deionized water |
Thermo-chiller/Standard Type HRS
Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible ProductsIndustrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
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・With this chiller, cooling water can be obtained anywhere it is necessary because of easy installation and easy operation.
・For a wide range of applications, such as laser machine tools, analytical equipment,
LCD manufacturing equipment, mold temperature control, etc.
・Compact: W 377 x H 615 x D 500 mm, 40 kg (HRS012/018/024)
・Timer function, Low liquid level protection, Power failure auto-restart,
Anti-freezing function, etc.
・Self diagnosis function
・Ideal for overseas models (Single-phase 200 to 230 VAC, Single-phase 100, 115 VAC)
・Compliant with UL Standards, CE-marking
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Can be used in a wide range of applications!
Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Can be used in a wide range of applications!
Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRS012 to 060 | 5 to 40℃ | 1.3 kW 1.9 kW 2.4 kW 3.2 kW 4.2 kW 5.1 kW 5.9 kW （60 Hz） | ±0.1℃ | Air-cooled refrigeration Water-cooled refrigeration | Tap water Deionized water Ethylene glycol aqueous solution （15％） |
Process Valve/2 Port Valve (2 Way Valve) for Compressed Air and Air-hydro Circuit Control VNA
Process Valves » 2/3 Port Valves for General Purpose Fluid Control
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・Exclusively for pneumatic systems and air-hydro circuit controls
・The balance poppet permits normal and reverse flow.
・Air operated, external pilot solenoid
Safety Instructions 2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics Series Variations/Process, Coolant Valves List
Green Procurement (RoHS)
Model Selection/Flow Rate Characteristics Series Variations/Process, Coolant Valves List
Green Procurement (RoHS)
| Series | Valve type | Port size | Orifice diameter (mmø) |
|---|---|---|---|
| VNA | N.C./N.O./C.O. | 1/8 to 2 | 10 to 50 |
Flow Switch/Diaphragm Type IFW5
Switches/Sensors/Controller » Mechanical Flow Switches
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・Used as a general relaying device when water stoppage or water volume reduction occurs during the use of a cooling water system, etc.
・With neon light
Safety Instructions Pressure Switches/Flow Switches/Precautions Flow Switch Series Variations
Green Procurement (RoHS)
Green Procurement (RoHS)
| Series | Rated flow range (L/min) |
|---|---|
| IFW5 | 1 to 10 10 to 20 20 to 50 |
Stainless Steel: Elbow Type/Universal Type/Push-lock Type AS-FG
Flow Control Equipment » Speed Controllers Special Environments
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・Stainless steel type
・Easy to lock push-lock type
・Larger knob
・Improved tube insertion/removal
Insertion force: Max. 30% (8 N) reduction
Removal force: Max. 20% (5 N) reduction*
* Tube removal strength is ensured to be equivalent to the previous model.
・360° swivel piping is possible. (Universal type)
・Available with a restrictor (Made to order: -X214, -X21)
| Type | Series | Port size on the cylinder side | Applicable tubing O.D. Metric size | Applicable tubing O.D. Inch size |
|---|---|---|---|---|
| Elbow type Stainless steel type | AS12□1FG to 42□1FG | M5 x 0.8 10-32UNF R, NPT, G 1/8 to 1/2 | φ2 to φ16 | φ1/8'' to φ1/2'' |
| Universal type Stainless steel type | AS13□1FG to 43□1FG | M5 x 0.8 10-32UNF R, NPT, G 1/8 to 1/2 | φ3.2 to φ12 | φ1/8'' to φ1/2'' |
Elbow Type/Universal Type/Push-lock Type AS
Flow Control Equipment » Speed Controllers for General Purposes
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・Easy to lock push-lock type
・Larger knob
・Improved tube insertion/removal
Insertion force: Max. 30% (8 N) reduction
Removal force: Max. 20% (5 N) reduction*
* Tube removal strength is ensured to be equivalent to the previous model.
・Electroless nickel plated type is standard.
・360° swivel piping is possible. (Universal type)
・Available with a restrictor (Made to order: -X214, -X21)
・Large flow type (-X778)
Safety Instructions Flow Control Equipment/Precautions Series Variation Quick Selection Table Green Procurement (RoHS)
| Type | Series | Port size on the cylinder side | Applicable tubing O.D. Metric size | Applicable tubing O.D. Inch size |
|---|---|---|---|---|
| Elbow type | AS12□1F to 42□1F | M5 x 0.8 10-32UNF R, NPT, G 1/8 to 1/2 | φ2 to φ16 | φ1/8'' to φ1/2'' |
| Universal type | AS13□1F to 43□1F | M5 x 0.8 10-32UNF R, NPT, G 1/8 to 1/2 | φ3.2 to φ12 | φ1/8'' to φ1/2'' |
Line Filter AFF
Mist Separator AM
Micro Mist Separator AMD
Activated Carbon Filter AMK
Air Preparation Equipment » Air Preparation Filters
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・Modular connection type
・Compressed air purity class: ISO 8573
・Face-to-face and depth dimensions reduced by 30%
・Weight reduced by 50%
AFF/AM□20: 0.19 kg (Existing model: 0.38 kg)
・Flow capacity increased by 50%
・No tools are required.
Easy replacement of the element
・Transparent bowl guard (2-layer construction)
・Color-identifiable elements
・With element service indicator
・With clogging switch/With element service indicator
Safety Instructions Air Preparation Equipment/Precautions Selection/Technical Data Green Procurement (RoHS) Element Part No.
| Type | Series | Filtration （μm） | Oil mist concentration on the outlet side | Air flow （L/min［ANR］） | Port size |
|---|---|---|---|---|---|
| Line filter | AFF | 1.0 (Filtration efficiency: 99%) | - | 300 to 3700 | 1/8, 1/4, 3/8, 1/2, 3/4, 1 |
| Mist separator | AM | 0.1 (Filtration efficiency: 99%) | 1 (≈ 0.8 ppm) or less | 300 to 3700 | 1/8, 1/4, 3/8, 1/2, 3/4, 1 |
| Micro mist separator | AMD | 0.01 (Filtration efficiency: 99.9%) | 0.1 (≈ 0.08 ppm) or less | 300 to 3700 | 1/8, 1/4, 3/8, 1/2, 3/4, 1 |
| Activated carbon filter | AMK | - | 0.003 (≈ 0.0025 ppm) or less | 300 to 3700 | 1/8, 1/4, 3/8, 1/2, 3/4, 1 |
