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Aluminum High Vacuum Angle Valve XLA/C-100/160(-1)-X152
High Vacuum Equipment » High Vacuum ValvesEquipment for the Semiconductor Industries » Exhaust Line
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・Improved durability of bellows (Flange sizes 100 and 160)
・Service life of two million cycles
・Space required for equipment can be reduced
Without restriction on exhaust direction (two ways: from valve element side to bellows side and vice versa)
Increased flexibility of mounting orientation
・Lightweight, Compact
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Auto Switches Common Specifications Green Procurement (RoHS)
| Series | Actuation | Valve type | Shaft seal type | Application | Flange size |
|---|---|---|---|---|---|
| XLA-100/160-X152 | Air operated | Single acting (N.C.) | Bellows seal | Dust free, Cleaned | 100，160 |
| XLC-100/160-1-X152 | Air operated | Double acting | Bellows seal | Dust free, Cleaned | 100，160 |
Thermo-chiller Compact Dual/Basic Type for Lasers HRLE
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Dual Channel Thermo chiller for Lasers
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・The temperatures of 2 fluid channel systems can be controlled individually by 1 chiller.
・Space saving, Reduced wiring
Footprint reduced by 21%
One power supply system for 2 channels
・Energy saving
Power consumption reduced by 17%
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity (CH1, 2 total) | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRLE050-A | CH1:15 to 25℃ CH2:CH1 temperature ＋ 0 to 15℃ | 4.8kW/5.8k (50Hz/60Hz) | CH1:±0.1 CH2:±0.5 | Air-cooled refrigeration | Tap water, Deionized (pure) water |
| HRLE050-W | CH1:15 to 25℃ CH2:CH1 temperature ＋ 0 to 15℃ | 4.8kW/5.8k (50Hz/60Hz) | CH1:±0.1 CH2:±0.5 | Water-cooled refrigeration | Tap water, Deionized (pure) water |
| HRLE090-A | CH1:15 to 25℃ CH2:CH1 temperature ＋ 0 to 15℃ | 8.0 kW/9.5 kW (50 Hz/60 Hz) | CH1: ±0.1 CH2: ±0.5 | Air-cooled refrigeration | Tap water, Deionized (pure) water |
| HRLE090-W | CH1: 9 kw,19 kW, 26 kW CH2: 1.0 kW (Max. 1.5 kW) | 9.5 kW/11.0 kW (50 Hz/60 Hz) | CH1: ±0.1 CH2: ±0.5 | Water-cooled refrigeration | Tap water, Deionized (pure) water |
PVC Quick Drain Valve LVW
Chemical Liquid Valves/Fittings & Needle Valves/Tubing » Chemical Liquid ValvesFluoropolymer Equipment/PVC Equipment » PVC Valves
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・Compliant with JIS Standards for polyvinyl chloride piping (JIS K 6742)
・Applicable fluids: Deionized water, Chemical liquids
・Materials of wetted parts: PVC (Body)
PTFE (Poppet)
FKM (O-ring: Standard)
EPDM (O-ring: Option)
・Flow rate characteristics: Cv factor 10 to 198
・Easy piping with union connection
| Series | Applicable tubing O.D. | Orifice diameter | Valve type |
|---|---|---|---|
| LVW60 | φ32 (Nominal dia. 25A) | φ25 | Double acting |
| LVW80 | φ38 (Nominal dia. 32A) | φ40 | Double acting |
| LVW80 | φ48 (Nominal dia. 40A) | φ40 | Double acting |
| LVW90 | φ60 (Nominal dia. 50A) | φ65 | Double acting |
| LVW90 | φ75 (Nominal dia. 65A) | φ65 | Double acting |
| LVW90 | φ89 (Nominal dia. 80A) | φ80 | Double acting |
SUS316L Stainless Steel Fitting VCK
Process Valves » Valves for Water and Chemical Base Fluids
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・Since sealing tape is not required, there is no need to worry about insulation.
(Applicable for painting with high voltage)
・Easy insertion/removal of piping in narrow spaces
| Series | Material/Description | Port size |
|---|---|---|
| VCK | Stainless steel fitting (316L SS) | G1/4 |
Flow Switch/Paddle Type IF3
Switches/Sensors/Controller » Mechanical Flow Switches
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・Used as a general relaying device when water stoppage or water volume reduction occurs during the use of a cooling water system, etc.
・Piping sizes ranges from 3/4 B to 6 B.
・Equivalent to IP42 and IP44
Safety Instructions Pressure Switches/Flow Switches/Precautions Flow Switch Series Variations
Green Procurement (RoHS)
Green Procurement (RoHS)
| Series | Rated flow range (L/min) |
|---|---|
| IF3 | 14 to 60 20 to 1500 36 to 2600 |
3-Screen Display High-Precision Digital Pressure Switch
ZSE20□(F)/ISE20□
Switches/Sensors/Controller » Electronic Pressure Switches/Sensors (Self-contained Type)IO-Link Compatible Products » Pressure Switches
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: IO-Link Compatible Products
Equipment for the Semiconductor Industries » Cooling Water Line
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・A low differential pressure range type has been added to the 20A
series. [New]
・Integrated R1/8 fitting with bottom wiring entry
・An M12 connector type has been added.
・A low pressure range type has been added.
・Visualization of settings
・Simple 3-step setting
・Easy screen switching
It is possible to change the settings while checking the measured value.
・Delay time:1.5 ms or less
・Current consumption: 25 mA or less
・IO-Link compatible
Safety Instructions Pressure Switches/Flow Switches/Precautions
Pressure Switch Series Variations/Application Example Glossary of Terms/Technical Information
Green Procurement (RoHS)
Pressure Switch Series Variations/Application Example Glossary of Terms/Technical Information
Green Procurement (RoHS)
| Series | Output type | Type | Rated pressure range | Enclosure | Applicable fluid |
|---|---|---|---|---|---|
| ZSE20 (F) ISE20 | 1 output | Compound pressure, Vacuum pressure, Positive pressure | −100.0 to 100.0 kPa, 0.0 to −101.0 kPa, −0.100 to 1.000 MPa | IP40 | Air |
| ZSE20A (F) ISE20A | 2 outputs, Analog output (Voltage/Current) | Compound pressure, Vacuum pressure, Positive pressure | −100.0 to 100.0 kPa, 0.0 to −101.0 kPa, −0.100 to 1.000 MPa | IP40 | Air |
| ZSE20AF-X576 to 580 (Made to Order) | 2 outputs, Analog output (Voltage/Current) | Compound pressure | −50.0 to 50.0Pa, −100.0 to 100.0Pa, −200 to 200.0Pa | IP40 | Air |
| ZSE20AF-X576 to 580 (Made to Order) | 2 outputs, Analog output (Voltage/Current) | Compound pressure | −500 to 500Pa, −1.000 to 1.000kPa, −2.00 to 2.00kPa, −5.00 to 5.00kPa, −10.00 to 10.00kPa | IP40 | Air |
| ZSE20B (F)-(L) ISE20B-(L) | 2 outputs, Analog output (Voltage/Current), IO-Link/Switch: 1 output | Compound pressure, Vacuum pressure, Positive pressure | −100.0 to 100.0 kPa, 0.0 to −101.0 kPa, −0.100 to 1.000 MPa | IP65 | Air |
| ZSE20C (F)-(L) ISE20C (H)-(L) | 2 outputs, Analog output (Voltage/Current), IO-Link/Switch: 1 output | Compound pressure, Vacuum pressure, Positive pressure | −100.0 to 100.0 kPa, 0.0 to −101.0 kPa, −0.100 to 1.000 MPa, −0.100 to 2.000 MPa | IP65 | General fluids |
Exhaust Cleaner for Vacuum Pump AMV
Silencers/Exhaust Cleaners/Blow Guns/Pressure Gauges » Exhaust Cleaners
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・Captures 99.5% of greasy fumes exhausted from the vacuum pump
・Realizes a comfortable working environment without greasy fumes
・Captures and cuts off 99.5% of even low-flow and highly concentrated greasy fumes
・Exhaust ducts from the vacuum pump are not necessary.
Safety Instructions Vacuum Equipment/Precautions Series Variations/Model Selection
Green Procurement (RoHS)
Green Procurement (RoHS)
Speed Controller with One-touch Fitting Compact Type JAS
Flow Control Equipment » Speed Controllers for General Purposes
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・Height 12.7 mm, Height: 9.7 mm shorter (43.3% reduction)
Possible to adjust flow rate even in a narrow space
Easily mounted using a hexagon wrench
・Minimum operating pressure: 0.05 MPa
・Easy to use push-lock type
・Easier and consistent flow setting
Safety Instructions Flow Control Equipment/Precautions
Series Variation Quick Selection Table Green Procurement (RoHS)
Series Variation Quick Selection Table Green Procurement (RoHS)
| Type | Series | Port size on the cylinder side | Applicable tubing O.D. Metric size | Applicable tubing O.D. Inch size |
|---|---|---|---|---|
| Elbow type | JAS | M3 x 0.5 M5 x 0.8 10-32UNF | φ3.2 to φ4 to φ6 | φ1/8'' to φ5/32'' to φ1/4'' |
Booster Regulator VBA10A/11A
Modular F.R.L./Pressure Control Equipment » Booster RegulatorsBooster Regulators » Booster Regulators
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・Increase factory air pressure by 4 times!
・Air-only operation requires no power supply, and allows easy installation.
・Air consumption: Max. 25% reduction (Pressure increase ratio: Twice),
Max. 30% reduction (Pressure increase ratio: 4 times)
・Max. flow rate: 10% increase (Pressure increase ratio: Twice),
30% increase (Pressure increase ratio: 4 times)
・Charging time: Max. 30% shorter (Pressure increase ratio: Twice),
Max. 60% shorter (Pressure increase ratio: 4 times)
・Improved service life: 50 million cycles or more
(Pressure increase ratio: Twice, 4 times)
Maintenance frequency is reduced due to improved life.
| Series | Port size | Set pressure (MPa) |
|---|---|---|
| VBA-X3239 | 1/4 | VBA10A： 0.4 to 1.4 VBA11A： 0.8 to 2.0 |
Compact Vacuum Pad (Vacuum Suction Cup) ZP3
Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Vacuum Pads (Vacuum Suction Cups)
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・Overall length shortened
・Pad form: Flat type, Flat type with groove, Bellows type, Bellows type with ribs
・Mounting: Male thread, Female thread
・Vacuum inlet direction: Vertical, Lateral
・Vacuum inlet: Male thread, Female thread, One-touch fitting, Barb fitting
・Buffer: Without, With
[Buffer stroke [mm]: 3, 6, 10, 15, 20]
Safety Instructions Vacuum Equipment/Precautions Vacuum Pads/Precautions Series Variations Model Selection Mounting Bracket Assembly (p.162-164) Green Procurement (RoHS)
| Series | Pad form | Pad diameter(mm) |
|---|---|---|
| ZP3 | Flat type | φ1.5,φ2,φ3.5 |
| ZP3 | Flat type with groove | φ4,φ6,φ8,φ10,φ13,φ16 |
| ZP3 | Bellows type | φ4,φ6,φ8 |
| ZP3 | Bellows type with ribs | φ10,φ13,φ16 |
