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Thermo-chiller/High-performance Type HRZ

Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: DeviceNet Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance/Type & Inverter Type
Equipment for the Semiconductor Industries (Temperature Adjustment Line) » Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance/Type & Inverter Type
Temperature Adjustment Line » Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance/Type & Inverter Type
This product can only be shipped to China, Taiwan, Korea, Singapore,Malaysia, and Japan. For use in regions other than the aforementioned, order the HRZ-F.

    ・Suitable for semiconductor processing equipment with a wide variety of
    　features, such as high-temperature stability, a wide temperature range,
    　failure diagnosis, external communication, etc.
    ・Compliant with various safety standards
    ・Compliant with UL Standards, SEMI Standards, CE-marking

  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Thermo-chiller/High-performance Type HRZ
    Manual
    Series Cooling capacity View search result
    HRZ1 kW, 2 kW,
    4 kW, 8 kW    		View search result
  • Thermo-chiller/High-performance Type HRZ
    DoC/IM
    Series Cooling capacity View search result
    HRZ1 kW, 2 kW,
    4 kW, 8 kW    		View search result
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature rangeCooling capacityTemperature stabilityCooling methodCirculating fluid
HRZ-20 to 40℃
20 to 90℃
-20 to 90℃		1 kW, 2 kW,
4 kW, 8 kW		±0.1℃Water-cooled refrigerationFluorinated fluids/Ethylene glycol aqueous solution (60%)/Tap water, Deionized water

Thermo-chiller/Environmentally Resistant Type HRS-R

Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
Temperature Adjustment Line » Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
Equipment for the Semiconductor Industries (Temperature Adjustment Line) » Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
Features
    ・Resistant to dust and water splashing
    ・Protection of the electrical unit: IP54
    ・Metal panel
    　The entire exterior surface is metal.
    　A stainless steel panel can be selected. (Option)
    ・A large capacity tank (12 L) is available. (Option)
    ・Ambient temperature: 5 to 45°C
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Thermo-chiller/Environmentally Resistant Type HRS-R
    Manual
    Series View search result
    HRS-RView search result
  • Thermo-chiller/Environmentally Resistant Type HRS-R
    DoC/IM
    Series View search result
    HRS-RView search result
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling methodCirculating fluid
HRS-R5 to 40℃1.9 kW
2.9 kW
5 kW
(60 Hz)		±0.1℃Air-cooled refrigerationTap water
Ethylene glycol aqueous solution (15%)

2-Layer Soft Fluoropolymer Tubing TQ

Process Valves » Valves for Water and Chemical Base Fluids
Features
    ・Carries fluid such as solvent with a soft and abrasion resistant tube.
    ・2-layer structure
    　Outer layer: Special nylon resin
    　Inner layer: Special fluoropolymer
    ・Internal smoothness: Equivalent to Ra 0.02 μm
Safety Instructions　Fittings and Tubing/Precautions　Green Procurement (RoHS)
SeriesTubing O.D.
Metric size		ColorFluid
TQφ4, φ6, φ8, φ10, φ12Translucent (Material color)Air, Water, Inert gas, Solvent

Coolant Valve (2 Way Valve) VNC

Process Valves » Coolant Valves
    ・For controlling coolants (Cutting fluid) used in machine tools
    ・Maximum operating pressure: 0.5 MPa, 1 MPa
    ・Air operated, external pilot solenoid
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Coolant Valve (2 Way Valve) VNC
    Manual
    Series View search result
    VNCView search result
  • Coolant Valve (2 Way Valve) VNC
    DoC/IM
    Series View search result
    VNCView search result
Safety Instructions　2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics　Series Variations/Process, Coolant Valves List
Green Procurement (RoHS)
SeriesValve typePort sizeOrifice diameter (mmø)
VNCN.C./N.O.1/8 to 2
1 1/4B to 3B		7 to 80

Compact/Lightweight 2 Port Solenoid Valve (2 Way Valve) for Water and Air VDW-XF

Process Valves » Compact 2/3 Port Solenoid Valves
    ・Compact, lightweight resin body (PPS)
    ・IP65
    ・Power consumption: 3 W (Standard), 0.5 W (With power-saving circuit)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Compact/Lightweight 2 Port Solenoid Valve (2 Way Valve) for Water and Air VDW-XF
    DoC/IM
    Series View search result
    VDW30/40-XFView search result
Safety Instructions　2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics　Series Variations/Solenoid Valves List
Green Procurement (RoHS)
SeriesValve typePort sizeOrifice diameter (mmø)
VDW30/40-XFN.C.P7, P8 (Quick fastener)
ø4, ø6, ø8, ø10		1 to 6

Steam Valve/2 Port Valve (2 Way Valve) for Steam VND

Process Valves » 2/3 Port Valves for General Purpose Fluid Control
Process Valves » 2/3 Port Solenoid Valves/Air Operated Valves
    ・For steam control
    ・Adopts PTFE seals
    ・With indicator light (Option)
    ・Air operated type
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics　Series Variations/Process, Coolant Valves List
Green Procurement (RoHS)
SeriesValve typePort sizeOrifice diameter (mmø)
VNDN.C./N.O.1/8 to 2
1 1/4B to 2B		7 to 50

2 Port Solenoid Valve (2 Way Valve) with Built-in Y-strainer VXK

Process Valves » 2/3 Port Solenoid Valves/Air Operated Valves
    ・For air, water, oil, steam
    ・Space saving with reduced piping labor
    ・Built-in strainer
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • 2 Port Solenoid Valve (2 Way Valve) with Built-in Y-strainer VXK
    DoC/IM
    Series View search result
    VXK21/22/23View search result
Safety Instructions　2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics
Series Variations/Selection Procedure/Solenoid Valves List/Air Operated Valves List
Green Procurement (RoHS)
SeriesValve typePort sizeOrifice diameter (mmø)
VXK21/22/23N.C./N.O.1/8 to 3/82 to 8

Ionizer IZS31

Static Neutralization Equipment » Static Neutralization Equipment Ionizer Bar Type
    ・Static neutralization time: 0.3 sec
    ・Select from 3 types of sensors.
    ・Rapid neutralization of static electricity by a feedback sensor
    ・Offset voltage control by an auto balance sensor
    ・High precision type: Accurately controls the offset voltage of the work position
    ・Body attachment type: Can be used while attached to the ionizer body by
    　detecting the earth return current
    ・The cartridge can be selected according to the application.
    ・The high-speed static neutralization type focuses on the speed of static neutralization.
    ・The low maintenance type improves the maintenance cycle.
Safety Instructions　Green Procurement (RoHS)
SeriesIon generation methodIon balance
IZS31Corona discharge type±30 V
(Stainless steel electrode needle : ±100 V)

3-Color Display Digital Flow Switch for Large Flow PF3A□H（-L）

Switches/Sensors/Controller » Electronic Flow Switches/Sensors
Clean Series/Low-Particle Generation » Flow Switch
IO-Link Devices » Digital Flow Switch
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: IO-Link Compatible Products
Features
    ・Applicable fluid: Air, N2, Ar, CO2 [New]
    ・500 L/4000 L/8000 L types have been added to the modular type. [New]
    ・The display range has been expanded. (1.5 times the rated flow range)
    　[New]
    ・Accumulated pulse conversion value: Select from 4 types based on
    　the flow range [New]
    ・Accumulated pulse width: Select a setting between 50 to 100 ms [New]
    ・A wide range of flow measurement is possible with 1 product.
    ・Supports the IO-Link communication protocol

    　▶IO-Link Master
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • 3-Color Display Digital Flow Switch for Large Flow PF3A□H（-L）
    Manual
    Series Type View search result
    PF3A7□HBody PortedView search result
    PF3A7□HModularView search result
  • 3-Color Display Digital Flow Switch for Large Flow PF3A□H（-L）
    DoC/IM
    Series Type View search result
    PF3A7□HBody PortedView search result
    PF3A7□HModularView search result
Safety Instructions　Pressure Switches/Flow Switches/Precautions
Green Procurement (RoHS)　IO-Link Master
SeriesTypeRated flow range [L/min]
PF3A7□HBody Ported30 to 3000，60 to 6000，120 to 12000
PF3A7□HModular5 to 500，10 to 1000，20 to 2000，40 to 4000，80 to 8000

2-Color Display Digital Flow Switch PFMB

Switches/Sensors/Controller » Electronic Flow Switches/Sensors
Features
    ・Dry air, N2
    ・Grease-free
    ・Compact, Space saving

    ∗ The PFMB7201 series was discontinued in September 2021.
    　Please select the PF2M721 series.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • 2-Color Display Digital Flow Switch PFMB
    Manual
    Series View search result
    PFMBView search result
  • 2-Color Display Digital Flow Switch PFMB
    DoC/IM
    Series View search result
    PFMBView search result
Safety Instructions　Pressure Switches/Flow Switches/Precautions　Flow Switch Series Variations
Green Procurement (RoHS)
SeriesRated flow range (L/min)
PFMB5 to 500
10 to 1000
20 to 2000

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