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Micro Mist Separator 10-AMD

Clean Series/Low-Particle Generation » Compressed Air Cleaning Filter Series

    Clean Series

Safety Instructions　Features/Basic Specifications/Clean Series Precautions
Air Preparation Equipment/Precautions　Green Procurement (RoHS)
SeriesFiltration (μm)Rated flow L/min (ANR)Port size
10-AMD0.01 (Filtration efficiency 99.9%)200 to 120001/8 to 2

Rotary Actuated Air Gripper 2-Finger Type 11-/22-MHR2/MDHR2

Clean Series/Low-Particle Generation » Air Grippers

    Clean Series


    ・A vertically compact configuration has been achieved through the use of a rotary actuator as the drive force source.
    ・Supports class 10 clean room.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Air Grippers Applicable Auto Switch List
Features/Basic Specifications/Clean Series Precautions
Air Grippers/Precautions　Auto Switches/Precautions　Green Procurement (RoHS)
SeriaesCylinder bore size (mm)
11-/22-MHR2Nominal size 10, 15, 20, 30

Rotary table 11-/22-MSQ

Clean Series/Low-Particle Generation » Rotary Actuators
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Rotary Actuator Applicable Auto Switch List
Features/Basic Specifications/Clean Series Precautions
Rotary actuators precautions　Auto Switches/Precautions　Green Procurement (RoHS)
SeriesRack typeSize
Basic type MSQB 		Size
High precision type MSQA		Rotating angle
11-/22-MSQDouble1, 2, 3, 7, 10, 20, 30, 501, 2, 3, 7, 10, 20, 30, 500 to 190°

Air Cylinder 10-/11-/21-/22-CG1-Z

Clean Series/Low-Particle Generation » Air Cylinders

    Clean Series

  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
Safety Instructions　Applicable Auto Switch List
Features/Basic Specifications/Clean Series Precautions
Actuators/Precautions　Auto Switches/Precautions　Green Procurement (RoHS)
TypeSeriesActionBore size (mm)
Standard10-/11-/21-/22-CG1-ZDouble acting, Single rod20，25，32，40，50，63，80，100
Standard10-/11-CG1W-Z　21-/22-CG1WDouble acting, Double rod20，25，32，40，50，63，80，100
Direct mount10-/11-CG1R-Z　21-/22-CG1RDouble acting, Single rod20，25，32，40，50，63

4/5 Port Solenoid Valve 10-SYJ

Clean Series/Low-Particle Generation » Directional Control Valves

    Clean Series



    ＊The EX510 series is to be discontinued. When designing new equipment
    　and facilities, consider using another series (EX260/EX600) instead.
Safety Instructions　Features/Basic Specifications/Clean Series Precautions
3/4/5 Port Solenoid Valves/Precautions　Green Procurement (RoHS)
SeriesSonic conductance: CCylinder sizePower consumption (W)
10-SYJ30000.46dm3(s・bar)φ250.35
10-SYJ50000.83dm3(s・bar)φ400.35
10-SYJ70002.9dm3(s・bar)φ500.35

Suction Guard FHG

Hydraulic Equipment » Hydraulic Equipment
    ・Prevents collected dust from falling into the tank
    ・The replacement of flushing oil is not required.
    ・Easy maintenance and no air mixing
    ・Integrated lubrication port strainer, suction filter, and air breather
    ・It is possible to detect clogging with the differential pressure indicator
    　and differential pressure indication switch (CB-□□H).
Safety Instructions　Hydraulic Filters/Precautions　Guide/INDEX　Differential Pressure Indication Switch　Green Procurement (RoHS)
SeriesPort sizeRated flow L/minOperating
pressure		Element μm
(Nominal filtration)
FHG1/2B to 3B18 to 450Negative pressureMicromesh :
74, 105, 149

Small Bore Hydraulic Cylinder CHN

Hydraulic Equipment » Hydraulic Cylinders
    ・Lightweight with a stainless steel tube and aluminum cover
    ・Uses a cushion seal type mechanism, Reduces impact at the stroke end, Improves durability
    ・Smaller cover section compared to tie-rod cylinders
Safety Instructions　Hydraulic Cylinders/Precautions　Auto Switches/Precautions
Series Variations　Technical Data　Green Procurement (RoHS)
SeriesNominal pressure (MPa)Tube materialActionBore Size (mm)
CHN7Stainless steelDouble acting, Single rod20, 25, 32, 40

NAMUR Interface 3/5-Port Solenoid Valve IP67 Compliant, Hygienic Design Type VFN2120N-X23/-X36

Pneumatic Instrumentation Equipment » Solenoid Valves
    ・A hygienic design has been adopted.
    　Resin body with less concaves
    　Direct cleaning of the valve is possible. (IP67)
    ・3-port/5-port valves are available.
    　Due to the function plate, 3/5-port valves are selectable.
    ・Low power consumption
    　Power consumption: 0.5 W
    ・Port threads: NPT1/4, G1/4
Safety Instructions　Automation Example　Specific Product Precautions　Green Procurement (RoHS)
SeriesFlow rate characteristics
(Cv/Effective area)		Manual overrideType of coil insulationPower consumption (W)
VFN2120N-X23/-X360.8/11mm2Push type
Locking type (Tool required)
Locking type (Manual type)		Class B0.5

Industrial Filter/Vessel Series FGG

Industrial Filters/Sintered Metal Elements » Industrial Filters
    ・Ideal for high-flow filtration (Max. 350 L/min)
    ・Easy element replacement for the V-band type
    　(With cover anti-scattering mechanism)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Industrial Filter/Vessel Series FGG
    Manual
    Series View search result
    FGGView search result
Safety Instructions　Industrial Filters/Precautions　Selection　Green Procurement (RoHS)
SeriesPort sizeMax. operating pressureOperating temperature (℃)
FGGRc20.7 MPaMAX. 80

Diaphragm Valve for Ultra High Purity AP

Process Gas Equipment　AP Tech » Process Gas Equipment
Equipment for the Semiconductor Industries » N2 Gas/Air Supply Line
    ・For UHP gas delivery in semiconductor and other clean industries
    ・Used as a gas shutoff valve
    ・No spring is used for the wetted parts and the drive part is also separated from the diaphragm. Dead space in the flow path is small in order to suppress particle generation.
Safety Instructions　Process Gas Equipment/Common Precautions　Series Variations　Valve and Regulator Recommendations　Technical Data/Glossary of Terms　Green Procurement (RoHS)
SeriesDescriptionTypeBody material
APFor Ultra High PurityAir Operated Type Diaphragm Valve316L SS secondary remelt
APFor Ultra High PurityManually Operated Type Diaphragm Valve316L SS secondary remelt
APFor Ultra High PurityMetering Valve316L SS secondary remelt
AZFor Ultra High PurityAir Operated Type Diaphragm ValveSUS316L
AZFor Ultra High PurityManually Operated Type Diaphragm ValveSUS316L
AZFor Ultra High PurityMetering ValveSUS316L
AKFor General ApplicationsAir Operated Type Diaphragm ValveSUS316
AKFor General ApplicationsManually Operated Type Diaphragm ValveSUS316
AKFor General ApplicationsMetering ValveSUS316

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