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In-line Air Filter (Bidirectional Acquisition Type) ZFD

Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Air Suction Filters
    ・Operating pressure range: −100 kPa to 0.5 MPa
    ・Able to capture foreign matter in both vacuum adsorption and vacuum
     release directions, Prevents foreign matter from scattering again
    ・Space saving
     Installation area: 41% reduction
    ・Check valve enclosure
     Flow order: Filter➡Check valve
     Prevents foreign matter from getting caught in the check valve
    ・Applicable tubing O.D.: ø4, ø6, ø8
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
SeriesApplicable tubing O.D. MetricOperating pressure range [kPa]Vacuum release pressure [MPa]Weight [g]
ZFD53ø4−100 to 00.5 or less34
ZFD54ø6−100 to 00.5 or less33
ZFD55ø8−100 to 00.5 or less35

4-Position Dual 3-Port Valve: Body Ported/Base Mounted SY5000/7000-X701

Directional Control Valves » Pilot Operated 4/5 Port Solenoid Valves
    Features two 3-port valves built into one body
    •The dimensions are the same as those of the double solenoid.
    •The 3-port valves on the A and B sides can be operated independently.
    •When used as a 3-port valve, only half the number of stations are
     required.
    • Mixed mounting on the standard SY5000/7000 series 5-port solenoid
     valve manifold base is possible.
Piping typeSeries4-position dual 3-port
Type of actuation
Body ported
Base mounted
SY5000
SY7000
N.C./N.C.
N.O./N.O.
N.C./N.O.

Speed Controller with Compact Indicator AS-FSA

Flow Control Equipment » Speed Controllers for General Purposes
    ・Height: Max. 5.5 mm shorter
    ・Flow rate can be controlled numerically with the indicator window.
     Due to the vernier indication, it is possible to configure fine settings in 1/4
     increments.
     Reduces work-hours and setting mistakes
    ・Better visibility
     Check from 360° directions is possible.
     Inspection and maintenance works are facilitated.
TypeSeriesPort size on the
cylinder side
Applicable tubing O.D.
Metric size
Applicable tubing O.D.
Inch siz
Elbow typeAS12□1FSA to 42□1FSAM5×0.8
10-32UNF
R, NPT, G
1/8 to 1/2
φ2 to φ16φ1/8'' to φ1/2''
Universal typeAS13□1FSA to 43□1FSAM5×0.8
10-32UNF
R, NPT, G
1/8 to 1/2
φ2 to φ16φ1/8'' to φ1/2''

In-line Type 10-AS-FG

Clean Series/Low-Particle Generation » Flow Control Equipment
TypeSeriesPort size
in the
cylinder side
Applicable tubing O.D.
Metric size
Applicable tubing O.D.
Inch size
In-line type
Stainless steel type
10-AS2002FG to AS4002FG-φ3.2 to φ12φ1/8'' to φ1/2''

Mist Separator 10-/21-AFM

Clean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
SeriesPort sizeFiltration (μm)
10-AFM20 to 401/8, 1/4, 3/8, 1/2, 3/40.3
21-AFM20 to 401/8, 1/4, 3/8, 1/2, 3/40.3

Air Slide Table 13-/22-MXS

Clean Series/Low-Particle Generation » Air Cylinders

    Clean Series


    ・Integrated with a worktable in a compact manner.
    ・A smooth movement without looseness has been achieved through the adoption of a cross roller guide
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
TypeSeriesActionBore size (mm)
Standard13-/22-MXSDouble acting6, 8, 12, 16, 20, 25
Symmetric13-/22-MXS□LDouble acting6, 8, 12, 16, 20, 25

3 Port Solenoid Valve 10-SY

Clean Series/Low-Particle Generation » Directional Control Valves
SeriesTypeSonic conductance: CPower consumption (W)
10-SY100Standard type*0.14mm20.5
10-SY100Large flow type*0.22mm20.5

Pinch Valve LPV

Process Valves » Compact 2/3 Port Solenoid Valves
    ・A 3-port type has been added. [New]
     Valve type
     N.C. on one side (Normally in clamping position)
     N.O. on one side (Normally in unclamping position)
    ・Highly resistant to contamination and reduces valve failures
    ・Applicable tubing:
     Silicone, PharMed®BPT, Tygon®
    ・Power consumption: 2.0 W
    ・Compact: Valve width 20 mm
    ・Easy tubing replacement
SeriesType of actuationValve typeApplicable tubing
LPVDirect operated solenoidN.C.
N.O.
Silicone, PharMed®BPT
“Hardness of 64 (shore A) or lower (reference)”

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