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In-line Air Filter (Bidirectional Acquisition Type) ZFD
Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Air Suction Filters-
・Operating pressure range: −100 kPa to 0.5 MPa
・Able to capture foreign matter in both vacuum adsorption and vacuum
release directions, Prevents foreign matter from scattering again
・Space saving
Installation area: 41% reduction
・Check valve enclosure
Flow order: Filter➡Check valve
Prevents foreign matter from getting caught in the check valve
・Applicable tubing O.D.: ø4, ø6, ø8
Series | Applicable tubing O.D. Metric | Operating pressure range [kPa] | Vacuum release pressure [MPa] | Weight [g] |
---|---|---|---|---|
ZFD53 | ø4 | −100 to 0 | 0.5 or less | 34 |
ZFD54 | ø6 | −100 to 0 | 0.5 or less | 33 |
ZFD55 | ø8 | −100 to 0 | 0.5 or less | 35 |
4-Position Dual 3-Port Valve: Body Ported/Base Mounted SY5000/7000-X701
Directional Control Valves » Pilot Operated 4/5 Port Solenoid Valves-
Features two 3-port valves built into one body
•The dimensions are the same as those of the double solenoid.
•The 3-port valves on the A and B sides can be operated independently.
•When used as a 3-port valve, only half the number of stations are
required.
• Mixed mounting on the standard SY5000/7000 series 5-port solenoid
valve manifold base is possible.
Safety Instructions 3/4/5 Port Solenoid Valves/Precautions Selection/Technical Data
Green Procurement (RoHS)
Green Procurement (RoHS)
Piping type | Series | 4-position dual 3-port Type of actuation |
---|---|---|
Body ported Base mounted | SY5000 SY7000 | N.C./N.C. N.O./N.O. N.C./N.O. |
Speed Controller with Compact Indicator AS-FSA
Flow Control Equipment » Speed Controllers for General Purposes-
・Height: Max. 5.5 mm shorter
・Flow rate can be controlled numerically with the indicator window.
Due to the vernier indication, it is possible to configure fine settings in 1/4
increments.
Reduces work-hours and setting mistakes
・Better visibility
Check from 360° directions is possible.
Inspection and maintenance works are facilitated.
Type | Series | Port size on the cylinder side | Applicable tubing O.D. Metric size | Applicable tubing O.D. Inch siz |
---|---|---|---|---|
Elbow type | AS12□1FSA to 42□1FSA | M5×0.8 10-32UNF R, NPT, G 1/8 to 1/2 | φ2 to φ16 | φ1/8'' to φ1/2'' |
Universal type | AS13□1FSA to 43□1FSA | M5×0.8 10-32UNF R, NPT, G 1/8 to 1/2 | φ2 to φ16 | φ1/8'' to φ1/2'' |
In-line Type 10-AS-FG
Clean Series/Low-Particle Generation » Flow Control Equipment
Safety Instructions Feature/Basic Specifications/Precautions
Flow Control Equipment/Precautions Green Procurement (RoHS)
Flow Control Equipment/Precautions Green Procurement (RoHS)
Type | Series | Port size in the cylinder side | Applicable tubing O.D. Metric size | Applicable tubing O.D. Inch size |
---|---|---|---|---|
In-line type Stainless steel type | 10-AS2002FG to AS4002FG | - | φ3.2 to φ12 | φ1/8'' to φ1/2'' |
Mist Separator 10-/21-AFM
Clean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment
Safety Instructions Features/Basic Specifications/Clean Series Precautions
F.R.L. Units/Precautions Green Procurement (RoHS)
F.R.L. Units/Precautions Green Procurement (RoHS)
Series | Port size | Filtration (μm) |
---|---|---|
10-AFM20 to 40 | 1/8, 1/4, 3/8, 1/2, 3/4 | 0.3 |
21-AFM20 to 40 | 1/8, 1/4, 3/8, 1/2, 3/4 | 0.3 |
Air Slide Table 13-/22-MXS
Clean Series/Low-Particle Generation » Air Cylinders
Clean Series
・Integrated with a worktable in a compact manner.
・A smooth movement without looseness has been achieved through the adoption of a cross roller guide
Safety Instructions Applicable Auto Switch List
Features/Basic Specifications/Clean Series Precautions
Actuators/Precautions Auto Switches/Precautions Green Procurement (RoHS)
Features/Basic Specifications/Clean Series Precautions
Actuators/Precautions Auto Switches/Precautions Green Procurement (RoHS)
Type | Series | Action | Bore size (mm) |
---|---|---|---|
Standard | 13-/22-MXS | Double acting | 6, 8, 12, 16, 20, 25 |
Symmetric | 13-/22-MXS□L | Double acting | 6, 8, 12, 16, 20, 25 |
3 Port Solenoid Valve 10-SY
Clean Series/Low-Particle Generation » Directional Control Valves
Clean Series
★The value indicates the effective area (S).
Safety Instructions Features/Basic Specifications/Clean Series Precautions
3/4/5 Port Solenoid Valves/Precautions Green Procurement (RoHS)
3/4/5 Port Solenoid Valves/Precautions Green Procurement (RoHS)
Series | Type | Sonic conductance: C | Power consumption (W) |
---|---|---|---|
10-SY100 | Standard type | *0.14mm2 | 0.5 |
10-SY100 | Large flow type | *0.22mm2 | 0.5 |
Pinch Valve LPV
Process Valves » Compact 2/3 Port Solenoid Valves-
・A 3-port type has been added. [New]
Valve type
N.C. on one side (Normally in clamping position)
N.O. on one side (Normally in unclamping position)
・Highly resistant to contamination and reduces valve failures
・Applicable tubing:
Silicone, PharMed®BPT, Tygon®
・Power consumption: 2.0 W
・Compact: Valve width 20 mm
・Easy tubing replacement
Safety Instructions 2 Port Solenoid Valves for Fluid Control Precautions Series Variations Green Procurement (RoHS)
Series | Type of actuation | Valve type | Applicable tubing |
---|---|---|---|
LPV | Direct operated solenoid | N.C. N.O. | Silicone, PharMed®BPT“Hardness of 64 (shore A) or lower (reference)” |