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Filter Regulator with Backflow Function 10-/21-AW□K-D

Clean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment
SeriesPort sizeSet pressure (MPa)Filtration (μm)
10-AW20K to 40K-D1/8, 1/4, 3/8, 1/2, 3/40.05 to 0.855
21-AW20K to 40K-D1/8, 1/4, 3/8, 1/2, 3/40.05 to 0.855

Pressure Sensor Controller 10-PSE300

Clean Series/Low-Particle Generation » Switches/Sensors

    Clean Series


    ・Response time: 1ms
    ・Set pressure resolution: 1/1000
    ・Capable of vertical and horizontal contact mounting
SeriesSet (differential) pressure range
10-PSE300-101 to 101kPa
10 to -101kPa
-10 to 100kPa
-0.1 to 1MPa
-50 to 500kPa
-0.2 to 2kPa

Compact Cylinder 10-/11-/21-/22-CQS

Clean Series/Low-Particle Generation » Air Cylinders
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
TypeSeriesActionBore size (mm)
Standard10-/11-/21-/22-CQSDouble acting, Single rod12, 16, 20, 25

Oil Filter FH150

Hydraulic Equipment » Hydraulic Equipment
    ・Compact, Lightweight
     Cover material: Aluminum die-casted
    ・Easy maintenance
    ・It is possible to detect clogging with the differential pressure indicator and
     differential pressure indication switch (CB-□□H).
SeriesPort size (Rc)Rated flow range L/minElement μm
(Nominal filtration)
FH1501/4 to 1/25 to 20Paper : 5, 10, 20

High Precision Filter for Liquids FGH

Industrial Filters/Sintered Metal Elements » Industrial Filters
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
SeriesPort sizeMax. operating pressureOperating temperature (℃)
FGHRc3/8 to 11 MPaMAX. 80

Smooth Vent Valve XVD

High Vacuum Equipment » High Vacuum Valves
    ・The valve/needle valve-integrated construction requires only 1/4 the piping space of previous models.
    ・Particle numbers have been significantly reduced through the use of a metal diaphragm in the sheet portion.
    ・Flow of both the initial air supply and the main air supply can be adjusted.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
SeriesValve typeFluidPipingPort size
XVDNormally closed
(Pressurize to open, Spring seal)
Nitrogen, Air,
Inert gas, etc.
VCR®
Swagelok®
1/4B

Peltier-Type Chemical Thermo-con HED

Temperature Control Equipment » Thermo-cons/Thermoelectric Baths (Peltier-Type Temperature Control Equipment)
    ・Heat exchanger for direct temperature control that uses a Peltier device
    ・Compatible with a wide range of chemical liquids through the use of a fluororesin
     heat exchanger
    ・Compliant with CE-marking
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
SeriesSet temperature rangeCooling capacityTemperature stabilityCooling methodCirculating fluid
HED10 to 60℃300 W, 500 W, 700 W, 900 W±0.1℃Peltier-type water-cooledDeionized water, Fluorinated fluidAmmonia hydrogen peroxide solution, etc.

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