There were 368 hits in the keyword search.
Discontinued products is also a hit. Click here for details.
Slit Valve XGT
High Vacuum Equipment » Slit Valves
-
・This product is suitable to act as the partition valve between the load lock chamber and the transfer chamber or between the transfer chamber and the process chamber in semiconductor equipment or other equipment.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Green Procurement (RoHS)
| Series | Operating environmental pressure (Pa)(abs) | Fluid | Opening window size (Height x Width) (mm) | Operating pressure (MPa)(G) |
|---|---|---|---|---|
| XGT | Atmospheric pressure to 10-6 | Inert gas type vacuum | 32 x 222 46 x 236 50 x 336 | 0.45 to 0.6 |
Thermo-chiller/Inverter Type HRSH
Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible ProductsIndustrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Inverter Type
-
・Complete with energy-saving triple inverter!
・Outdoor installation, Splashproof type (IPX4)
・Max. ambient temperature: 45℃
・Min. ambient temperature: –20℃ (For the air-cooled type)
・Temperature stability: ±0.1℃ (When a load is stable)
・Space saving and lightweight: 280 kg (25 kW type)
・Compliant with UL Standards, CE-marking
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Can be used in a wide range of applications!
Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Can be used in a wide range of applications!
Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRSH | 5 to 35℃ | 10 kW 15 kW 20 kW 25 kW 28 kW | ±0.1℃ | Air-cooled refrigeration Water-cooled refrigeration | Tap water Deionized water Ethylene glycol aqueous solution (15%) |
PVC Quick Drain Valve LVW
Chemical Liquid Valves/Fittings & Needle Valves/Tubing » Chemical Liquid ValvesFluoropolymer Equipment/PVC Equipment » PVC Valves
-
・Compliant with JIS Standards for polyvinyl chloride piping (JIS K 6742)
・Applicable fluids: Deionized water, Chemical liquids
・Materials of wetted parts: PVC (Body)
PTFE (Poppet)
FKM (O-ring: Standard)
EPDM (O-ring: Option)
・Flow rate characteristics: Cv factor 10 to 198
・Easy piping with union connection
| Series | Applicable tubing O.D. | Orifice diameter | Valve type |
|---|---|---|---|
| LVW60 | φ32 (Nominal dia. 25A) | φ25 | Double acting |
| LVW80 | φ38 (Nominal dia. 32A) | φ40 | Double acting |
| LVW80 | φ48 (Nominal dia. 40A) | φ40 | Double acting |
| LVW90 | φ60 (Nominal dia. 50A) | φ65 | Double acting |
| LVW90 | φ75 (Nominal dia. 65A) | φ65 | Double acting |
| LVW90 | φ89 (Nominal dia. 80A) | φ80 | Double acting |
High Purity Chemical Liquid Valve/Air Operated, Threaded Type LVA
Chemical Liquid Valves/Fittings & Needle Valves/Tubing » Chemical Liquid ValvesFluoropolymer Equipment/PVC Equipment » High Purity Chemical Liquid Valves
-
・Body materials: New PFA/Stainless steel/PPS
・Diaphragm materials: PTFE, EPR, or NBR can be selected.
・Organic solvents compatible
Body: Stainless steel, Actuator section: ADC, Buffer: Choose from FKM/EPDM
・Manifold type no.: LLA2，LLA3，LLA4，LLA5
| Series | Type | Valve type | Port size Applicable tubing O.D. | Orifice diameter (mmø) |
|---|---|---|---|---|
| LVA | Air operated Threaded type | N.C./N.O./ Double acting | 1/8 to 1 | 2 to 22 |
| LVA | Air operated Organic solvents compatible | N.C./N.O./ Double acting | Metric: 6 to 19 Inch: 1/4 to 1 | 4 to 22 |
High Pressure Coolant Valve SGH
Process Valves » Coolant Valves
-
・Max. operating pressure: 3 MPa, 7 MPa, 10 MPa [New], 14 MPa [New]
・Applicable to high-speed grinding and long drilling processes
・Coolant valve for high-pressure coolant liquid that is ideal for lubrication, dust blowing, and cooling
・Service life: 3 million cycles (Based on SMC's test conditions)
・Water hammer: Reduced by 20% (Compared to existing model, VNH series)
・Power consumption: 0.35 W (24 VDC, V116)
・The 3-port dual pressure type has been standardized.
Safety Instructions 2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics Series Variations/Process, Coolant Valves List
Green Procurement (RoHS)
Model Selection/Flow Rate Characteristics Series Variations/Process, Coolant Valves List
Green Procurement (RoHS)
| Series | Valve type | Port size | Orifice diameter (mmø) |
|---|---|---|---|
| SGH | N.C./N.O. | 3/8 to 1 | 7.5 to 15.9 |
Process Valve/2 Port Valve (2 Way Valve) for Fluid Control VNB
Process Valves » 2/3 Port Valves for General Purpose Fluid Control
-
・For controlling various fluids
・Can operate with a wide range of fluids, such as air, water, oil, gas, vacuum, etc., depending on the selected body and seal materials
・Air operated, external pilot solenoid
Safety Instructions 2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics Series Variations/Process, Coolant Valves List
Green Procurement (RoHS)
Model Selection/Flow Rate Characteristics Series Variations/Process, Coolant Valves List
Green Procurement (RoHS)
| Series | Valve type | Port size | Orifice diameter (mmø) |
|---|---|---|---|
| VNB | N.C./N.O./C.O. | 1/8 to 2 1 1/4B to 2B | 7 to 50 |
Compact Direct Operated 3 Port Solenoid Valve (3 Way Valve) for Water and Air VDW
Process Valves » Compact 2/3 Port Solenoid Valves
-
∗ The production of the VDW10/20 series was discontinued
in December 2012. Please select the new VDW10/20 series.
∗ Excludes the VDW10/20 series manifold
∗ The production of the VDW30 series was discontinued
in July 2015. Please select the VX21 series.
∗ The production of the 3-port solenoid valve VDW200/300 series
is continued.
Safety Instructions 2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Technical Data Series Variations/Solenoid Valves List
Green Procurement (RoHS)
Model Selection/Technical Data Series Variations/Solenoid Valves List
Green Procurement (RoHS)
| Series | Valve type | Port size | Orifice diameter (mmø) |
|---|---|---|---|
| VDW200/300 | C.O. | M5 to 1/4 (8A) | 1 to 4 |
Direct Operated 2 Port Solenoid Valve (2 Way Valve) VX2
Process Valves » 2/3 Port Solenoid Valves/Air Operated Valves
-
・For air, medium vacuum, water, oil, steam (Can be used with heated water)
・Flow rate: 20% more flow＊
・Height: 10% smaller＊
・Weight: 30% lighter＊
・Body materials: Aluminum, Resin, C37, Stainless steel
・Available with One-touch fittings (Resin body)
＊Comparison made with SMC’s existing model
・Manifold type no.: VVX21, VVX22, VVX23
Safety Instructions 2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics
Series Variations/Selection Procedure/Solenoid Valves List/Air Operated Valves List
Green Procurement (RoHS)
Model Selection/Flow Rate Characteristics
Series Variations/Selection Procedure/Solenoid Valves List/Air Operated Valves List
Green Procurement (RoHS)
| Series | Valve type | Port size | Orifice diameter (mmø) |
|---|---|---|---|
| VX21/22/23 | N.C./N.O. | 1/8 to 1/2 ø6 to ø12 | 2 to 10 |
Pressure Switch/Micro Switch Type IS3000
Switches/Sensors/Controller » Mechanical Pressure Switches
-
・Can be used for micro load, around 10 mA e.g.
・With neon light.
Safety Instructions Pressure Switches/Flow Switches/Precautions
Pressure Switch Series Variations/Application Example Glossary of Terms/Technical Information
Green Procurement (RoHS)
Pressure Switch Series Variations/Application Example Glossary of Terms/Technical Information
Green Procurement (RoHS)
| Series | Type | Set pressure range |
|---|---|---|
| IS3000 | Positive pressure | 0.1 to 0.7 MPa |
Compact Pneumatic Pressure Sensor/Switch PSE54□
Switches/Sensors/Controller » Electronic Pressure Switches/Sensors (Remote Type)
-
・PSE Sensor Set Up Tool PSE-ST has been added. [New]
・Switch output specification
・IO-Link compatible
・Analog output (Voltage)
Safety Instructions Pressure Switches/Flow Switches/Precautions
Pressure Switch Series Variations/Application Example Glossary of Terms/Technical Information
Green Procurement (RoHS)
Pressure Switch Series Variations/Application Example Glossary of Terms/Technical Information
Green Procurement (RoHS)
| Series | Type | Rated pressure range |
|---|---|---|
| PSE541 | Vacuum pressure | 0 to －101 kPa |
| PSE543 | Compound pressure | －100 to 100 kPa |
| PSE540 | Positive pressure | 0 to 1 MPa |
