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Peltier-Type Thermo-con/Compact Type HEF

Temperature Control Equipment » Thermo-cons/Thermoelectric Baths (Peltier-Type Temperature Control Equipment)
    ・Compact: 130 mm (Width) x 210 mm (Height) x 150 mm (Depth)
    ・Low-noise design (at low load): 37 dB
    ・Cooling capacity: 220 W
    ・Temperature stability: ±0.1°C
    ・Set temperature range: 10°C to 60°C
    ・Superior temperature control
     Now only takes about 41 seconds to lower the temperature by 10°C
     86% reduction (41 s ← 294 s) ∗ Compared with the existing product
     HECR002
     ∗ Time to change the circulating fluid temperature from 30°C to 20°C
     (when the circulating fluid IN and OUT are directly connected)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Peltier-Type Thermo-con/Compact Type HEF
    Manual
    Series Cooling capacity View search result
    HEF220 WView search result
  • Peltier-Type Thermo-con/Compact Type HEF
    DoC/IM
    Series Cooling capacity View search result
    HEF220 WView search result
SeriesSet temperature
range
Cooling capacityTemperature
stability
Cooling method
HEF10 to 60℃220 W±0.1℃Thermoelectric device
(Thermo-module)

Aluminum High Vacuum Angle Valve XL□

High Vacuum Equipment » High Vacuum Valves
    ・High fluorine resistance
    ・Minimal outgassing
    ・Minimal contamination from heavy metals

    ∗ The XLA(V)/C/F(V)/G with flange sizes of 16 to 80 has been
     discontinued in September 2017.
     Please select the XLA(V)-2/XLC-2/XLF(V)-2/XLG-2 series.
SeriesActuationValve
type
Shaft seal
type
ApplicationFlange
size
XLAAir
operated
Single
acting
(N.C.)
Bellows sealDust-free
Cleaned
100・160
XLAV
(With solenoid valve)
Air
operated
Single
acting
(N.C.)
Bellows sealDust-free
Cleaned
100・160
XLCAir
operated
Double
acting
Bellows sealDust-free
Cleaned
100・160
XLCV
(With solenoid valve)
Air
operated
Double
acting
Bellows sealDust-free
Cleaned
100・160
XLFAir
operated
Single
acting
(N.C.)
O-ring sealHigh-speed operation
High operating cycles
(80)・100・160
XLFV
(With solenoid valve)
Air
operated
Single
acting
(N.C.)
O-ring sealHigh-speed operation
High operating cycles
(80)・100・160
XLGAir
operated
Double
acting
O-ring sealHigh-speed operation
High operating cycles
100・160
XLGV
(With solenoid valve)
Air
operated
Double
acting
O-ring sealHigh-speed operation
High operating cycles
100・160
XLDAir
operated
Single
acting
(N.C.)
Bellows/O-ring
seal
For preventing dust turbulence
For preventing a pump from
running overloaded
25 to 160
XLDV
(With solenoid valve)
Air
operated
Single
acting
(N.C.)
Bellows/O-ring
seal
For preventing dust turbulence
For preventing a pump from
running overloaded
25 to 160
XLHManualManualBellows sealDust-free
Cleaned
16 to 50
XLSElectromagneticSingle
acting
(N.C.)
(Bellows balance)For portable equipment not
requiring air
16, 25

Thermo-chiller/High-performance Type HRZ

Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: DeviceNet Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance Type & Inverter Type
This product can only be shipped to China, Taiwan, Korea, Singapore,Malaysia, and Japan. For use in regions other than the aforementioned, order the HRZ-F.

    ・Suitable for semiconductor processing equipment with a wide variety of
     features, such as high-temperature stability, a wide temperature range,
     failure diagnosis, external communication, etc.
    ・Compliant with various safety standards
    ・Compliant with UL Standards, SEMI Standards, CE-marking

  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Thermo-chiller/High-performance Type HRZ
    Manual
    Series Cooling capacity View search result
    HRZ1 kW, 2 kW,
    4 kW, 8 kW
    View search result
  • Thermo-chiller/High-performance Type HRZ
    DoC/IM
    Series Cooling capacity View search result
    HRZ1 kW, 2 kW,
    4 kW, 8 kW
    View search result
SeriesSet temperature rangeCooling capacityTemperature stabilityCooling methodCirculating fluid
HRZ-20 to 40℃
20 to 90℃
-20 to 90℃
1 kW, 2 kW,
4 kW, 8 kW
±0.1℃Water-cooled refrigerationFluorinated fluids/Ethylene glycol aqueous solution (60%)/Tap water, Deionized water

Thermo-chiller/Environmentally Resistant Type HRS-R

Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
    ・Resistant to dust and water splashing
    ・Protection of the electrical unit: IP54
    ・Metal panel
     The entire exterior surface is metal.
     A stainless steel panel can be selected. (Option)
    ・A large capacity tank (12 L) is available. (Option)
    ・Ambient temperature: 5 to 45°C
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Thermo-chiller/Environmentally Resistant Type HRS-R
    Manual
    Series View search result
    HRS-RView search result
  • Thermo-chiller/Environmentally Resistant Type HRS-R
    DoC/IM
    Series View search result
    HRS-RView search result
SeriesSet temperature
range
Cooling
capacity
Temperature
stability
Cooling methodCirculating fluid
HRS-R5 to 40℃1.9 kW
2.9 kW
5 kW
(60 Hz)
±0.1℃Air-cooled refrigerationTap water
Ethylene glycol aqueous solution (15%)

Coolant Valve (2 Way Valve) VNC

Process Valves » Coolant Valves
    ・For controlling coolants (Cutting fluid) used in machine tools
    ・Maximum operating pressure: 0.5 MPa, 1 MPa
    ・Air operated, external pilot solenoid
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Coolant Valve (2 Way Valve) VNC
    Manual
    Series View search result
    VNCView search result
  • Coolant Valve (2 Way Valve) VNC
    DoC/IM
    Series View search result
    VNCView search result
SeriesValve typePort sizeOrifice diameter (mmø)
VNCN.C./N.O.1/8 to 2
1 1/4B to 3B
7 to 80

Compact/Lightweight 2 Port Solenoid Valve (2 Way Valve) for Water and Air VDW-XF

Process Valves » Compact 2/3 Port Solenoid Valves
    ・Compact, lightweight resin body (PPS)
    ・IP65
    ・Power consumption: 3 W (Standard), 0.5 W (With power-saving circuit)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Compact/Lightweight 2 Port Solenoid Valve (2 Way Valve) for Water and Air VDW-XF
    DoC/IM
    Series View search result
    VDW30/40-XFView search result
SeriesValve typePort sizeOrifice diameter (mmø)
VDW30/40-XFN.C.P7, P8 (Quick fastener)
ø4, ø6, ø8, ø10
1 to 6

2 Port Solenoid Valve (2 Way Valve) with Built-in Y-strainer VXK

Process Valves » 2/3 Port Solenoid Valves/Air Operated Valves
    ・For air, water, oil, steam
    ・Space saving with reduced piping labor
    ・Built-in strainer
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • 2 Port Solenoid Valve (2 Way Valve) with Built-in Y-strainer VXK
    DoC/IM
    Series View search result
    VXK21/22/23View search result
SeriesValve typePort sizeOrifice diameter (mmø)
VXK21/22/23N.C./N.O.1/8 to 3/82 to 8

Ionizer IZS31

Static Neutralization Equipment » Static Neutralization Equipment Ionizer Bar Type
    ・Static neutralization time: 0.3 sec
    ・Select from 3 types of sensors.
    ・Rapid neutralization of static electricity by a feedback sensor
    ・Offset voltage control by an auto balance sensor
    ・High precision type: Accurately controls the offset voltage of the work position
    ・Body attachment type: Can be used while attached to the ionizer body by
     detecting the earth return current
    ・The cartridge can be selected according to the application.
    ・The high-speed static neutralization type focuses on the speed of static neutralization.
    ・The low maintenance type improves the maintenance cycle.
SeriesIon generation methodIon balance
IZS31Corona discharge type±30 V
(Stainless steel electrode needle : ±100 V)

3-Color Display Digital Flow Switch for Large Flow PF3A□H(-L)

Switches/Sensors/Controller » Electronic Flow Switches/Sensors
Clean Series/Low-Particle Generation » Flow Switch
IO-Link Devices » Digital Flow Switch
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: IO-Link Compatible Products
    ・Applicable fluid: Air, N2, Ar, CO2 [New]
    ・500 L/4000 L/8000 L types have been added to the modular type. [New]
    ・The display range has been expanded. (1.5 times the rated flow range)
     [New]
    ・Accumulated pulse conversion value: Select from 4 types based on
     the flow range [New]
    ・Accumulated pulse width: Select a setting between 50 to 100 ms [New]
    ・A wide range of flow measurement is possible with 1 product.
    ・Supports the IO-Link communication protocol

     ▶IO-Link Master
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • 3-Color Display Digital Flow Switch for Large Flow PF3A□H(-L)
    Manual
    Series Type View search result
    PF3A7□HBody PortedView search result
    PF3A7□HModularView search result
  • 3-Color Display Digital Flow Switch for Large Flow PF3A□H(-L)
    DoC/IM
    Series Type View search result
    PF3A7□HBody PortedView search result
    PF3A7□HModularView search result
SeriesTypeRated flow range [L/min]
PF3A7□HBody Ported30 to 3000,60 to 6000,120 to 12000
PF3A7□HModular5 to 500,10 to 1000,20 to 2000,40 to 4000,80 to 8000

2-Color Display Digital Flow Switch PFMB

Switches/Sensors/Controller » Electronic Flow Switches/Sensors
    ・Dry air, N2
    ・Grease-free
    ・Integrated flow adjustment valve
    ・Compact, Space saving

    ∗ The PFMB7201 series was discontinued in September 2021.
     Please select the PF2M721 series.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • 2-Color Display Digital Flow Switch PFMB
    Manual
    Series View search result
    PFMBView search result
  • 2-Color Display Digital Flow Switch PFMB
    DoC/IM
    Series View search result
    PFMBView search result
SeriesRated flow range (L/min)
PFMB5 to 500
10 to 1000
20 to 2000

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