There were 383 hits in the keyword search.
Process Valves/Process Pumps/ATEX Directive/Steam Valve 56-VND
List of ATEX Compliant Products » Process Valves/Process PumpsPressure Switch/ATEX Directive/Pressure Switch / Reed Switch Type 56-IS10
List of ATEX Compliant Products » Pressure SwitchRotary Actuators/ATEX Directive/Rotary Actuators 56-CRB1
List of ATEX Compliant Products » Rotary ActuatorsAuto Switch/ATEX Directive/Solid State Auto Switch D-M9□□□-588
List of ATEX Compliant Products » Auto SwitchAir Cylinder/ATEX Directive/ISO Standard Air Cylinder 55-C85
List of ATEX Compliant Products » Air CylinderDirectional Control Valves/ATEX Directive/5 Port Solenoid Valve 56-VQC1000/2000/4000
List of ATEX Compliant Products » Directional Control Valves/Serial Transmission Systeme-Actuator Easy to Operate Integrated Controller/Rod Type EQY□H
Electric Actuators/Cylinders » e-Actuator
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・Easy to set up, just like air equipment!
Two position stop with no programming required
Three position stop with no programming required
Cycle time can be set in all control modes.
・Downsized with Integrated Controller, Wiring saving,
Labor saving · Programless · Reduced adjustment time
・Annual CO2 emissions: Max. 59% reduction (SMC comparison)[5.8 kg-
CO2e/year (14.1)]
∗ The numerical values vary depending on the operating conditions.
Safety Instructions Electric Actuators/Precautions Auto Switches/Precautions Green Procurement (RoHS)
| Specification | Model | Stroke （mm） | Max. pushing force （N） | Speed （mm/s） | Screw lead （mm） |
|---|---|---|---|---|---|
| Battery-less absolute (Step motor 24 VDC) | EQY16□H | 30 to 300 | MAX.141 | MAX.700 | 2.5, 5, 10 |
| Battery-less absolute (Step motor 24 VDC) | EQY25□H | 30 to 400 | MAX. 452 | MAX. 900 | 3, 6, 12, 20 |
| Battery-less absolute (Step motor 24 VDC) | EQY32□H | 30 to 500 | MAX. 707 | MAX. 900 | 4, 8, 16, 24 |
Slit Valve XGT
High Vacuum Equipment » Slit Valves
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・This product is suitable to act as the partition valve between the load lock chamber and the transfer chamber or between the transfer chamber and the process chamber in semiconductor equipment or other equipment.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Green Procurement (RoHS)
| Series | Operating environmental pressure (Pa)(abs) | Fluid | Opening window size (Height x Width) (mm) | Operating pressure (MPa)(G) |
|---|---|---|---|---|
| XGT | Atmospheric pressure to 10-6 | Inert gas type vacuum | 32 x 222 46 x 236 50 x 336 | 0.45 to 0.6 |
Peltier-Type Thermo-con HEC
Temperature Control Equipment » Thermo-cons/Thermoelectric Baths (Peltier-Type Temperature Control Equipment)
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・For applications requiring high-precision temperature control
・High-precision, refrigerant-free temperature control equipment that uses a Peltier
device
・Simple structure and high reliability
・Can easily be built into equipment due to its compact and low-vibration design
・Compatible with a wide range of power supply voltages
・Compliant with UL Standards, CE-marking
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HEC | 10 to 60℃ | 230 W, 600 W | ±0.01 to 0.03℃ | Peltier-type air-cooled | Tap water |
| HEC | 10 to 60℃ | 140 W, 320 W | ±0.01 to 0.03℃ | Peltier-type water-cooled | Tap water, Ethylene glycol aqueous solution (20%) |
| HEC | 10 to 60℃ | 600 W, 1200 W | ±0.01 to 0.03℃ | Peltier-type water-cooled | Tap water, Fluorinated fluid |
Water-cooled Thermo-chiller/High-performance Type HRW
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: DeviceNet Compatible ProductsTemperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance Type & Inverter Type
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・Direct heat exchanger for in-plant circulating fluid
・Can control the temperature over a wide range since a compressor is not required.
・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
・Compliant with UL Standards, SEMI Standards, CE-marking
・It is possible to select the inverter type.
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRW | 20 to 90℃ | 2 kW, 8 kW, 15 kW, 30 kW | ±0.3℃ | Water-cooled type (Without compressor) | Fluorinated, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |
