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Compact Proportional Solenoid Valve PVQ
Modular F.R.L./Pressure Control Equipment » Proportional ValvesPressure Control Equipment » Proportional Valves

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・Stepless control of flow rate in proportion to current
・Repeatability: 3% or less
・Hysteresis: 10% or less
Safety Instructions F.R.L. Units/Precautions Series Variations/Pressure Control Equipment
Green Procurement (RoHS)
Green Procurement (RoHS)
Series | Flow control range L/min | Fluid |
---|---|---|
PVQ | 0 to 5 0 to 6 0 to 75 0 to 100 | Air, inert gas |
Clean Regulator/Fluororesin Type SRF
Modular F.R.L./Pressure Control Equipment » RegulatorsFluoropolymer Equipment/PVC Equipment » Fluororesin Regulators
Pressure Control Equipment » Regulators

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・Wetted parts Body: New PFA, Diaphragm: PTFE
・Recommended maximum flow rate: 20 L/min (SRF50),
(Inlet pressure: 0.3 MPa, Fluid: Water)
Safety Instructions F.R.L. Units/Precautions Series Variations/Pressure Control Equipment
Product Selection Guide Green Procurement (RoHS)
Product Selection Guide Green Procurement (RoHS)
Series | Type | Applicable tubing O.D. Metric size | Applicable tubing O.D. Inch size | Set pressure (MPa) |
---|---|---|---|---|
SRF | Integrated with fitting | φ4 to φ19 | φ1/8 to φ3/4 | 0.02 to 0.4 |
SRF | With nut | Fitting size:2 to 6 | Fitting size:2 to 6 | 0.02 to 0.4 |
SRF | Tube extension | - | Tubing O.D. φ1/4 to φ3/4 | 0.02 to 0.4 |
Miniature Regulator ARJ1020F
Modular F.R.L./Pressure Control Equipment » RegulatorsPressure Control Equipment » Regulators

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・Compact and lightweight (16 g)
・Low cracking pressure: 0.02 MPa
・Standard model comes equipped with backflow function.
・Manifold base (Option)
Safety Instructions F.R.L. Units/Precautions Series Variations/Pressure Control Equipment
Product Selection Guide Green Procurement (RoHS)
Product Selection Guide Green Procurement (RoHS)
Series | Features | Port size | Set pressure (MPa) |
---|---|---|---|
ARJ1020F | Direct operated relieving type with backflow function | M5 | 0.1 to 0.7 |
Modular F.R.L. Units AC-D
Modular F.R.L./Pressure Control Equipment » Modular F.R.L.Modular F.R.L. Units » Modular F.R.L. Units/Air Combination
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・Modular design with uniform body style
・Better visibility & environmental resistance
・2-layer construction: The bowl is covered with a transparent bowl guard!
Better visibility: 360°
・No tools are required.
Easier replacement of the element (AF-D only)
・Attachments:
Spacer: Y200-D, Y300-D, Y400-D
Spacer with bracket: Y200T-D, Y300T-D, Y400T-D
Safety Instructions F.R.L. Units/Precautions Product Selection Guide
Green Procurement (RoHS) List of spacers for old and new modular connection and spacers with bracket
Green Procurement (RoHS) List of spacers for old and new modular connection and spacers with bracket
Description | Series | Port size |
---|---|---|
Air filter, Regulator, Lubricator | AC20 to 60-D | 1/8,1/4,3/8,1/2,3/4,1 |
Filter regulator, Lubricator | AC20A to 60A-D | 1/8,1/4,3/8,1/2,3/4,1 |
Air filter, Regulator | AC20B to 60B-D | 1/8,1/4,3/8,1/2,3/4,1 |
Air filter, Mist separator, Regulator | AC20C to 40C-D | 1/8,1/4,3/8,1/2 |
Filter regulator, Mist separator | AC20D to 40D-D | 1/8,1/4,3/8,1/2 |
Auto Drain Valve AD402-A
Air Preparation Equipment » Auto Drains/Differential Pressure Gauges-
・Improved foreign matter resistance
・Increase in condensate discharge
Drain discharge: Max. 100 cm3/cycle (3 times that of the existing model)
・Improved environmental resistance: Transparent bowl guard can protect the inner
bowl
・Improved visibility: 360°
・Lightweight: Weight reduced by 22%
・Reduced required maintenance space
・Easier maintenance
One-touch mounting and removal of the bowl is possible without using any tools.
・Bowl material can be selected according to the operating environment.
Series | Port size | Drain port size |
---|---|---|
AD402-A | 1/4, 3/8, 1/2 | 3/8 |
Clean Gas Filter SF
Air Preparation Equipment » Air Preparation FiltersClean Series/Low-Particle Generation » Clean Gas Filters/Air Filters

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・Cartridge type allows for element replacement
(SFA100/200/300, SFB100)
・Compact, disposable type for the semiconductor industry
(SFB300, SFC100)
Safety Instructions Air Preparation Equipment/Precautions Model Selection Guide/Quick Reference Guide Green Procurement (RoHS)
Type | Series | Operating pressure | Filtration (μm) |
---|---|---|---|
Cartridge type disc | SFA100/200/300 | Max. 0.99 MPa (Vacuum: 1.3×10-6 kPa) | 0.01 (Filtration efficiency: 99.99%) |
Cartridge type straight | SFB100 | Max. 0.99 MPa (Vacuum: 1.3×10-6 kPa) | 0.01 (Filtration efficiency: 99.99%) |
Cartridge type straight | SFB200 | Max. 0.99 MPa (Vacuum: 1.3×10-6 kPa) | 120 |
Disposable type straight | SFB300 | Max. 0.99 MPa (Vacuum: 1.3×10-6 kPa) | 0.01 (Filtration efficiency: 99.99%) |
Disposable type multiple disc | SFC100 | Max. 0.99 MPa (Vacuum: 1.3×10-6 kPa) | 0.01 (Filtration efficiency: 99.99%) |
Line Filter AFF
Mist Separator AM
Micro Mist Separator AMD
Activated Carbon Filter AMK
Air Preparation Equipment » Air Preparation Filters-
・Modular connection type
・Compressed air purity class: ISO 8573
・Face-to-face and depth dimensions reduced by 30%
・Weight reduced by 50%
AFF/AM□20: 0.19 kg (Existing model: 0.38 kg)
・Flow capacity increased by 50%
・No tools are required.
Easy replacement of the element
・Transparent bowl guard (2-layer construction)
・Color-identifiable elements
・With element service indicator
・With clogging switch/With element service indicator
Safety Instructions Air Preparation Equipment/Precautions Selection/Technical Data Green Procurement (RoHS) Element Part No.
Type | Series | Filtration (μm) | Oil mist concentration on the outlet side | Air flow (L/min[ANR]) | Port size |
---|---|---|---|---|---|
Line filter | AFF | 1.0 (Filtration efficiency: 99%) | - | 300 to 3700 | 1/8, 1/4, 3/8, 1/2, 3/4, 1 |
Mist separator | AM | 0.1 (Filtration efficiency: 99%) | 1 (≈ 0.8 ppm) or less | 300 to 3700 | 1/8, 1/4, 3/8, 1/2, 3/4, 1 |
Micro mist separator | AMD | 0.01 (Filtration efficiency: 99.9%) | 0.1 (≈ 0.08 ppm) or less | 300 to 3700 | 1/8, 1/4, 3/8, 1/2, 3/4, 1 |
Activated carbon filter | AMK | - | 0.003 (≈ 0.0025 ppm) or less | 300 to 3700 | 1/8, 1/4, 3/8, 1/2, 3/4, 1 |
Thermo-dryer with Air Temperature Adjustment Function IDH□
Air Preparation Equipment » Air DryersTemperature Control Equipment » Air Temperature Controllers
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・Stable supply of temperature and pressure controlled dry clean air
Can supply compressed air with the same conditions and quality
regardless of the season
・Application example:
Supplying compressed air with constant conditions to air bearings
mounted on a tool
・Built-in filter
Nominal filtration: 0.01 μm (99.9% filtration efficiency)
Outlet oil mist concentration: Max. 0.01 mg/m3 (ANR)
Outlet cleanliness: Particles of 0.3 μm or more: 3.5 particles/L (ANR)
or less
・Compatible with power supplies from around the world Single-phase
100, 200, 230 VAC (50/60 Hz)
Safety Instructions Air Preparation Equipment/Precautions
Model Selection Guide/Quick Reference Guide Green Procurement (RoHS)
Model Selection Guide/Quick Reference Guide Green Procurement (RoHS)
Series | Air flow capacity L/min(ANR) | Outlet air temperature adjustment range | Outlet air set pressure range | Outlet air temperature stability | Cooling method | Compressor output |
---|---|---|---|---|---|---|
IDH□4 | 100 to 500 | 15 to 30℃ | 0.15 to 0.85 MPa | ±0.1 | Heater operation PID control | Less than 7.5kw |
IDH□6 | 200 to 800 | 15 to 30℃ | 0.15 to 0.85 MPa | ±0.1 | Heater operation PID control | Less than 7.5kw |
Refrigerated Air Dryer IDF
Air Preparation Equipment » Air Dryers-
・Applicable for the high-temperature environments
Ambient temperature : Max. 45℃
Inlet air temperature : Max. 65℃
・Increased air flow capacity
Safety Instructions Air Preparation Equipment/Precautions
Model Selection Guide/Quick Reference Guide Green Procurement (RoHS) Proposal for the Use of a Separate Refrigerated Air Dryer
Model Selection Guide/Quick Reference Guide Green Procurement (RoHS) Proposal for the Use of a Separate Refrigerated Air Dryer
Series | Rated inlet condition | Air flow capacity (m3/min[ANR]) 50 Hz | Air flow capacity (m3/min[ANR]) 60 Hz | Refrigerant | Port size | Compressor output |
---|---|---|---|---|---|---|
IDF60 | 35℃ 0.7 MPa | 5.6 | 6.5 | R410A(HFC) GWP:2088 | R1 | Less than 7.5kw |
IDF70 | 35℃ 0.7 MPa | 8 | 9.1 | R410A(HFC) GWP:2088 | R1 1/2 | Less than 7.5kw |
IDF80 | 40℃ 0.7 MPa | 11.6 | 13.6 | R410A(HFC) GWP:2088 | R2 | Less than 7.5kw |
IDF90 | 40℃ 0.7 MPa | 14.3 | 16.4 | R410A(HFC) GWP:2088 | R2 | Less than 7.5kw |
Air Cooled Aftercooler HAA
Air Preparation Equipment » Aftercoolers/Air Tanks
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・Can cool high-temperature compressed air from compressors down to
40°C or less and efficiently remove moisture from the air
・Cooling equipment is not required for this air-cooled type.
・Easy maintenance and reasonable running costs,
No need to worry about freezing or running out of water supply.
Safety Instructions Air Preparation Equipment/Precautions
Model Selection Guide/Quick Reference Guide Green Procurement (RoHS)
Model Selection Guide/Quick Reference Guide Green Procurement (RoHS)
Series | Applicable compressor (kW) | Air flow capacity L/min (ANR) |
---|---|---|
HAA | 7.5 to 37 | 1000 to 5700 |