There were 1,278 hits in the keyword search.
Discontinued products is also a hit. Click here for details.
For 300 mm Wafer: Parallel Seal Type Slit Valve XGTP
High Vacuum Equipment » Slit Valves
-
・Long service life: 3 million cycles (within standard temperature range)
・Low particle generation: Reduced by 1/5 or more
(compared with the existing product)
・Easier maintenance
Easy replacement of bellows
Gate can be replaced from above. (Made to order)
・Safety measures
A mechanical end lock mechanism has been adopted.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Green Procurement (RoHS)
| Series | Operating environmental pressure (Pa)(abs) | Fluid | Opening window size (Height x Width) (mm) | Operating pressure (MPa)(G) |
|---|---|---|---|---|
| XGTP | Atmospheric pressure to 10-6 | Inert gas | 50 x 336 | 0.45 to 0.6 |
Vacuum Angle Valve with Release Valve XLJ
High Vacuum Equipment » Other
-
・Prevents the reverse flow of oil through the roughing pump (rotary pump) into the chamber
・Reduced piping labor due to the built-in release valve structure
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Green Procurement (RoHS)
| Series | Actuation | Valve type | Shaft seal type | Flange size |
|---|---|---|---|---|
| XLJ | Electromagnetic | Normally closed/Vacuum pilot | O-ring seal | 25, 40 |
Aluminum High Vacuum Angle Valve XLA/C/F/G
High Vacuum Equipment » High Vacuum Valves
-
・Aluminum bodied
Uniform baking temperature
Lightweight, Compact
Minimal outgassing
Minimal contamination from heavy metals
・Bellows are replaceable.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Auto Switches Common Specifications Green Procurement (RoHS)
| Series | Actuation | Valve type | Shaft seal type | Application | Flange size |
|---|---|---|---|---|---|
| XLA-2 | Air operated | Single acting (N.C.) | Bellows seal | Dust free, Cleaned | 16 to 80 |
| XLAV-2 (With solenoid valve) | Air operated | Single acting (N.C.) | Bellows seal | Dust free, Cleaned | 16 to 80 |
| XLC-2 | Air operated | Double acting | Bellows seal | Dust free, Cleaned | 16 to 80 |
| XLF-2 | Air operated | Single acting (N.C.) | O-ring seal | High-speed operation, High operating cycles | 16 to 80 |
| XLFV-2 (With solenoid valve) | Air operated | Single acting (N.C.) | O-ring seal | High-speed operation, High operating cycles | 16 to 80 |
| XLG -2 | Air operated | Double acting | O-ring seal | High-speed operation, High operating cycles | 16 to 80 |
Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ
Process Gas Equipment » Process Gas Equipment
-
・For UHP gas delivery in semiconductor and other clean industries
・Body material: 316L SS secondary remelt or 316L SS
・Electropolished wetted parts
・External metal seal construction
Safety Instructions Process Gas Equipment/Common Precautions Series Variations Valve and Regulator Recommendations Technical Data/Glossary of Terms Green Procurement (RoHS)
| Series | Description | Type | Body material |
|---|---|---|---|
| AP | For Ultra High Purity | Single Stage Regulator | 316L SS secondary remelt |
| AP | For Ultra High Purity | Two Stage Regulator | 316L SS secondary remelt |
| AP | For Ultra High Purity | Pneumatic Actuation Pressure Regulator | 316L SS secondary remelt |
| SL | For Ultra High Purity | Single Stage Regulator | 316L SS secondary remelt |
| AZ | For Ultra High Purity | Single Stage Regulator | SUS316L |
| AZ | For Ultra High Purity | Pneumatic Actuation Pressure Regulator | SUS316L |
| AK | For General Applications | Single Stage Regulator | SUS316 |
| AK | For General Applications | Two Stage Regulator | SUS316 |
| AK | For General Applications | Pneumatic Actuation Pressure Regulator | SUS316 |
| BP | For Ultra High Purity | Back Pressure Regulator | SUS316 |
| BP | For General Applications· | Back Pressure Regulator | SUS316 |
Peltier-Type Thermo-con/Rack Mount Type
HECR
Temperature Control Equipment » Thermo-cons/Thermoelectric Baths (Peltier-Type Temperature Control Equipment)
-
・Good space utilization: Mountable in a 19-inch rack
Saves space by allowing multiple pieces of equipment to be mounted
together in a rack.
・Temperature stability: ±0.01℃ to 0.03℃
・Set temperature range: 10℃ to 60℃
・Cooling capacity: 200 W, 400 W, 510 W, 800 W, 1 kW, 1.2 kW
・Power consumption: 200 W, 300 W, 400 W
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method |
|---|---|---|---|---|
| HECR002-A | 10 to 60℃ | 200 W | ±0.01 to 0.03℃ | Peltier-type air-cooled |
| HECR004-A | 10 to 60℃ | 400 W | ±0.01 to 0.03℃ | Peltier-type air-cooled |
| HECR006-A | 10 to 60℃ | 510 W | ±0.01 to 0.03℃ | Peltier-type air-cooled |
| HECR006L-A | 10 to 60℃ | 510 W | ±0.01 to 0.03℃ | Peltier-type air-cooled |
| HECR008-A | 10 to 60℃ | 800 W | ±0.01 to 0.03℃ | Peltier-type air-cooled |
| HECR010-A | 10 to 60℃ | 1 kW | ±0.01 to 0.03℃ | Peltier-type air-cooled |
| HECR008-W | 10 to 60℃ | 800 W | ±0.01 to 0.03℃ | Peltier-type water-cooled |
| HECR012-W | 10 to 60℃ | 1.2 kW | ±0.01 to 0.03℃ | Peltier-type water-cooled |
EU F-Gas Regulation-compliant Refrigerated Thermo-chiller HRZ-F
Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible ProductsIndustrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance Type & Inverter Type
-
・More effective energy-saving is achieved through use of a DC inverter compressor and an inverter pump.
・Energy saving
The inverter controls the number of motor rotations of the compressor and pump according to the load from the user’s application.
Power consumption: Max. 65% reduction
Facility water: Max. 67% reduction
・High performance
Temperature stability: ±0.1°C (When a load is stable)
Cooling time: Max. 46% reduction (SMC comparison)
・Refrigerant: R410A (HFC)/R448A (HFC/HFO)
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRZ-F | -20 to 40℃ 10 to 60℃ -20 to 90℃ | 2 kW, 4 kW, 8 kW, 10 kW | ±0.1℃ | Water-cooled refrigeration | Fluorinated fluids Ethylene glycol aqueous solution Tap water/Deionized water |
Thermo-chiller/Rack Mount Type HRR
Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible ProductsIndustrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Rack Mount Type
-
・Operable without the need to remove the unit from the rack
Front access: Simple to control, service, and maintain with all filters and drainage accessible via the front panel
・Space saving: Multiple chillers can be mounted to a 19-inch rack.
・Cooling capacity: 1.1/1.2/1.8/2.4/3.0/5.1 kW (60 Hz)
・Temperature stability: ±0.1℃
・Global power supply:
Single-phase 100 VAC (50/60 Hz)/115 VAC (60 Hz)
Single-phase 200 to 230 VAC (50/60 Hz)
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRR | 5 to 35℃ 15 to 35℃ | 1.1 kW 1.2 kW 1.8 kW 2.4 kW 3.0 kW 5.1 kW | ±0.1℃ | Air-cooled refrigeration Water-cooled refrigeration | Tap water Ethylene glycol aqueous solution (15%) |
Thermo-chiller/Dual Channel Thermo-chiller for Lasers HRL
Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible ProductsIndustrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Dual Channel Thermo chiller for Lasers
-
・Temperatures for 2 fluid channel systems can be controlled individually
by one chiller.
・Space saving, Reduced wiring
Footprint: 22% reduction
One power supply system for 2 channels
・Energy saving
Power consumption reduced by 30%
・Touch panel
・Power supply:
3-phase 200 VAC (50 Hz)
3-phase 200 to 230 VAC (60 Hz)
3-phase 380 to 415 VAC (50/60 Hz)
3-phase 460 to 480 VAC (60 Hz)
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Can be used in a wide range of applications!
Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Can be used in a wide range of applications!
Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRL100 | CH1: 15 to 35℃ CH2: 10 to 40℃ | CH1:9 kw, CH2: 1.0 kW (Max. 5.0 kW) | CH1:±0.1, CH2:±0.5 | Air-cooled refrigeration, Water-cooled refrigeration | Tap water, Deionized water |
| HRL200 | CH1: 15 to 35℃ CH2: 10 to 40℃ | CH1:9 kw, CH2: 1.0 kW (Max. 5.0 kW) | CH1:±0.1, CH2:±0.5 | Air-cooled refrigeration, Water-cooled refrigeration | Tap water, Deionized water |
| HRL300 | CH1: 15 to 35℃ CH2: 10 to 40℃ | CH1:26 kw, CH2: 1.0 kW (Max. 5.0 kW) | CH1:±0.1, CH2:±0.5 | Air-cooled refrigeration | Tap water, Deionized water |
| HRL400 | CH1: 15 to 35℃ CH2: 10 to 40℃ | CH1:26 kw, CH2: 1.0 kW (Max. 5.0 kW) | CH1:±0.1, CH2:±0.5 | Air-cooled refrigeration | Tap water, Deionized water |
Thermo-chiller/Inverter Type HRSH090
Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible ProductsIndustrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Inverter Type
-
・Power consumption reduced by 53%
Complete with energy-saving triple inverter!
・Cooling capacity: 9.5 kW (Air-cooled), 11.0 kW (Water-cooled)
・Temperature stability: ±0.1°C
・Set temperature range: 5°C to 40°C
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Can be used in a wide range of applications!
Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Can be used in a wide range of applications!
Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRSH090 | 5 to 40℃ | 9.5 kW | ±0.1℃ | Air-cooled refrigeration Water-cooled refrigeration | Tap water Deionized water Ethylene glycol aqueous solution (15%) |
Thermo-chiller/Standard Type HRS
Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible ProductsIndustrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
-
・With this chiller, cooling water can be obtained anywhere it is necessary because of easy installation and easy operation.
・For a wide range of applications, such as laser machine tools, analytical equipment,
LCD manufacturing equipment, mold temperature control, etc.
・Compact: W 377 x H 615 x D 500 mm, 40 kg (HRS012/018/024)
・Timer function, Low liquid level protection, Power failure auto-restart,
Anti-freezing function, etc.
・Self diagnosis function
・Ideal for overseas models (Single-phase 200 to 230 VAC, Single-phase 100, 115 VAC)
・Compliant with UL Standards, CE-marking
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Can be used in a wide range of applications!
Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Can be used in a wide range of applications!
Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRS012 to 060 | 5 to 40℃ | 1.3 kW 1.9 kW 2.4 kW 3.2 kW 4.2 kW 5.1 kW 5.9 kW （60 Hz） | ±0.1℃ | Air-cooled refrigeration Water-cooled refrigeration | Tap water Deionized water Ethylene glycol aqueous solution （15％） |
