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Smooth Vent Valve XVD

High Vacuum Equipment » High Vacuum Valves
Equipment for the Semiconductor Industries » N2 Gas/Air Supply Line
    ・The valve/needle valve-integrated construction requires only 1/4 the piping space of previous models.
    ・Particle numbers have been significantly reduced through the use of a metal diaphragm in the sheet portion.
    ・Flow of both the initial air supply and the main air supply can be adjusted.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesValve typeFluidPipingPort size
XVDNormally closed
(Pressurize to open, Spring seal)		Nitrogen, Air,
Inert gas, etc.		VCR®
Swagelok®		1/4B

3-Screen Display Sensor Monitor PSE300A

Switches/Sensors/Controller » Electronic Pressure Switches/Sensors (Remote Type)
Features
    ・Compatible with 5 types of pressure sensor
    　Applicable sensor: PSE53m, PSE54m, PSE550, PSE57m, PSE56m
    ・It is possible to change the settings while checking the measured value.
    ・NPN/PNP switch function
    ・Input range selection (for pressure/flow rate)
    ・Simple 3-step setting
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • 3-Screen Display Sensor Monitor PSE300A
    Manual
    Series View search result
    PSE300AView search result
  • 3-Screen Display Sensor Monitor PSE300A
    DoC/IM
    Series View search result
    PSE300AView search result
Safety Instructions　Pressure Switches/Flow Switches/Precautions
Pressure Switch Series Variations/Application Example 　Glossary of Terms/Technical Information
Green Procurement (RoHS)
SeriesSet pressure range
PSE300A−0.2 to 2.1 kPa
10 to −105 kPa
−105 to 105 kPa
−10 to 105 kPa
−50 to 525 kPa
−0.105 to 1.05 MPa
−0.105 to 2.1 MPa
−0.25 to 5.25 MPa
−0.5 to 10.5 MPa

3-Screen Display Multi-channel Digital Sensor Monitor PSE200A

Switches/Sensors/Controller » Electronic Pressure Switches/Sensors (Remote Type)
IO-Link Devices » Pressure Switches
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: IO-Link Compatible Products
Features
    ・Up to 4 pressure sensors can be connected!
    　Centralized control saves installation space.
    　A single monitor various applications
    ・It is possible to change the settings while checking the measured value.
    ・IO-Link compatible

    　▶IO-Link Master
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • 3-Screen Display Multi-channel Digital Sensor Monitor PSE200A
    Manual
    Series View search result
    PSE200AView search result
  • 3-Screen Display Multi-channel Digital Sensor Monitor PSE200A
    DoC/IM
    Series View search result
    PSE200AView search result
Safety Instructions　Pressure Switches/Flow Switches/Precautions
Pressure Switch Series Variations/Application Example 　Glossary of Terms/Technical Information
Green Procurement (RoHS)　IO-Link Master
SeriesSet pressure rangeApplicable pressure sensors
PSE200A−0.2 to 2.1 kPa
10 to −105 kPa
−105 to 105 kPa
−10 to 105 kPa
−50 to 525 kPa
−0.105 to 1.05 MPa
−0.105 to 2.1 MPa
−0.25 to 5.25 MPa
−0.5 to 10.5 MPa		PSE550
PSE531/PSE541/PSE561
PSE533/PSE543/PSE563/PSE573
PSE532
PSE564/PSE574
PSE530/PSE540/PSE560/PSE570
PSE575
PSE576
PSE577

Stainless Steel Speed Controller (Elbow Type) ASG

Flow Control Equipment » Speed Controllers Special Environments
    ・Material: Stainless steel 316
    　Sealant: Special FKM
    　Seat ring: Stainless steel 303
    ・Applicable tubing materials
    　FEP, PFA, Nylon, Soft nylon, Polyurethane, Polyolefin
Safety Instructions　Flow Control Equipment/Precautions　Green Procurement (RoHS)
TypeSeriesPort size on
the cylinder side		Applicable tubing O.D.
Metric size
Elbow TypeASGM5 to 1/2φ4 to φ12

Soft Polyurethane Flat Tubing/Multi-core, Multi-color TUS

Fittings and Tubing » Tubing
Features
    ・Multi-core, multi-color specification
    ・Compact piping is possible.
    ・8 color variations
Safety Instructions　Fittings and Tubing/Precautions　Green Procurement (RoHS)
SeriesTubing O.D.ColorNumber of coresFluid
TUSφ4，φ6，φ8，φ10，φ12Black, White, Red, Blue, Yellow,
Green, Translucent, Yellow-brown		2, 3, 4, 5Air

Miniature Fittings M

Fittings and Tubing » Fittings for General Purposes
    ・Compact and doesn't require tools for connection
    ・Compact piping space
    ・Hose nipple, Hose elbow, Barb
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Fittings and Tubing/Precautions　Series Variations
Green Procurement (RoHS)
SeriesApplicable tubing O.D.Connection thread
M-□□-2φ2M3，M5
Mφ3.2，φ4，φ6M3，M5，1/8

Modular Type Common Supply Regulator AR□M(K)-D

Modular F.R.L./Pressure Control Equipment » Modular F.R.L.
Modular F.R.L. Units » Regulators
Features
    ・Supply different pressure for multiple applications
    　OUT port is on the back of the product.
    ・Space-saving design and reduced piping labor
    ・Modular connection is possible.
    ・Branch piping
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　F.R.L. Units/Precautions　Product Selection Guide
Green Procurement (RoHS)
SeriesPort sizeSet pressure (MPa)
AR20M-D to AR40M-D1/8，1/4，3/8，1/20.05 to 0.85
0.02 to 0.2
AR20MK-D to AR40MK-D
With backflow function		1/8，1/4，3/8，1/20.1 to 0.85
0.1 to 0.2

Micro Mist Separator with Pre-filter AMH

Air Preparation Equipment » Air Preparation Filters
    ・The integration of the AM series and AMD series achieves a reduction in
    　installation space and reduced piping installation labor and costs.
    ・Can separate and remove aerosol state oil mist and remove carbon or
    　dust of 0.01 μm or larger
    ・Should be used as a pre-filter for compressed air for precision instruments
    　or clean rooms requiring high levels of clean air
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Micro Mist Separator with Pre-filter AMH
    Manual
    Series View search result
    AMHView search result
  • Micro Mist Separator with Pre-filter AMH
    DoC/IM
    Series View search result
    AMHView search result
Safety Instructions　Air Preparation Equipment/Precautions　Model Selection Guide/Quick Reference Guide　Green Procurement (RoHS)　Element Part No.
SeriesFiltration (μm)Air flow L/min (ANR)Port size
AMH0.01 (Filtration efficiency: 99.9%)200 to 120001/8 to 2

Compact Vacuum Ejector (Vacuum Generators) ZA

Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Vacuum Ejectors (Vacuum Generators)/Vacuum Pump Systems
    ・Total width: 9.9 mm, Total length: 72.9 mm, Total height: 52.5 mm,
    　Weight: 50 g
    ・Can be installed on moving parts
    ・Improved response through the shortening of the length of the tube to the pad
    ・Adaptable to manifold applications
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Compact Vacuum Ejector (Vacuum Generators) ZA
    Manual
    Series Nozzle diameter
    (mm)    		 View search result
    ZA1050.5View search result
    ZA1070.7View search result
Safety Instructions　Vacuum Equipment/Precautions　Series Variations/Model Selection
Green Procurement (RoHS)
SeriesNozzle diameter
(mm)		Max. suction flow
[L/min(ANR)]		Air consumption
[L/min(ANR)]		Guidelines for applicable pad
(mm)
ZA1050.54122 to 13
ZA1070.78282 to 20

Electric Actuator/Guide Rod Type LEYG

Electric Actuators/Cylinders » Motorless Type
Features
    ・Various servo motors can be mounted due to the addition of the motorless type.
    ・Compatible motors:
    　Mitsubishi Electric Corporation, YASKAWA Electric Corporation,
    　SANYO DENKI CO., LTD., OMRON Corporation, Panasonic Corporation,
    　FANUC CORPORATION, NIDEC INSTRUMENTS,
    　KEYENCE CORPORATION, FUJI ELECTRIC CO., LTD., MinebeaMitsumi Inc.,
    　Shinano Kenshi Co., Ltd., ORIENTAL MOTOR Co., Ltd., FASTECH Co., Ltd.,
    　Rockwell Automation, Inc. (Allen-Bradley), Beckhoff Automation GmbH,
    　Siemens AG, Delta Electronics, Inc., ANCA Motion
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Electric Actuators/Precautions　Auto Switches/Precautions　Features　Series Variations　Simplified Selection Flow Chart　Green Procurement (RoHS)
SpecificationModelStroke
(mm)		Pushing force
(N) 		Speed
(mm/s)		Screw lead
(mm)
Motorless
Top mounting		LEYG2530 to 300Max. 485Max. 9003, 6, 12
Motorless
In-line		LEYG25D30 to 300Max. 485Max. 9003, 6, 12
Motorless
Top mounting		LEYG3230 to 300Max. 588Max. 12004, 8, 16
Motorless
In-line		LEYG32D30 to 300Max. 736Max. 10004, 8, 16

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