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Air Cylinder 10-/11-/21-/22-CM2-Z
Clean Series/Low-Particle Generation » Air Cylinders
Safety Instructions Applicable Auto Switch List
Features/Basic Specifications/Clean Series Precautions
Actuators/Precautions Auto Switches/Precautions Green Procurement (RoHS)
Features/Basic Specifications/Clean Series Precautions
Actuators/Precautions Auto Switches/Precautions Green Procurement (RoHS)
| Type | Series | Action | Bore size (mm) |
|---|---|---|---|
| Standard | 10-/11-/21-/22-CM2-Z | Double acting, Single rod | 20，25，32，40 |
| Standard | 10-/11-/21-/22-CM2W-Z | Double acting, Double rod | 20，25，32，40 |
| Direct mount | 10-/11-/21-/22-CM2R-Z | Double acting, Single rod | 20，25，32，40 |
| End lock | 10-/11-/21-/22-CBM2 | Double acting, Single rod | 20，25，32，40 |
5 Port Solenoid Valve 10-SV
Clean Series/Low-Particle Generation » Directional Control Valves
Clean Series
＊The EX500 series is to be discontinued. When designing new equipment
and facilities, consider using another series (EX260/EX600) instead.
Safety Instructions Features/Basic Specifications/Clean Series Precautions
3/4/5 Port Solenoid Valves/Precautions Green Procurement (RoHS)
3/4/5 Port Solenoid Valves/Precautions Green Procurement (RoHS)
| Series | Sonic conductance: C | Cylinder size | Power consumption (W) |
|---|---|---|---|
| 10-SV1000 | 1.1dm3(s・bar) | φ40 | 0.6 |
| 10-SV2000 | 2.8dm3(s・bar) | φ63 | 0.6 |
| 10-SV3000 | 4.5dm3(s・bar) | φ80 | 0.6 |
| 10-SV4000 | 10dm3(s・bar) | φ100 | 0.6 |
Suction Filter with Case FH99
Hydraulic Equipment » Hydraulic Equipment
-
・Compact, Lightweight
Cover and case material: Aluminum casting
・Prevents pump cavitation
・Easy element maintenance
・It is possible to detect clogging with the differential pressure indicator and
differential pressure indication switch (CB--□□H).
| Series | Port size | Rated flow rate L/min | Operating pressure | Element μm (Nominal filtration) |
|---|---|---|---|---|
| FH99 | INLET : 1B to 4B | 20 to 900 | Negative pressure | Micromesh : 74, 105, 149 |
JIS Standard Compact Hydraulic Cylinder CHK□/CHDK□
Hydraulic Equipment » Hydraulic Cylinders
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・Lightweight, compact aluminum body
・It is possible to mount auto switches.
・Same longitudinal dimensions for cylinders with/without auto switches
・Compliant with JIS Standards (CHKD series)
・With auto switch (CHDK□ series: CHDKD, CHDKG)
Safety Instructions Hydraulic Cylinders/Precautions Auto Switches/Precautions
Series Variations Technical Data Green Procurement (RoHS)
Series Variations Technical Data Green Procurement (RoHS)
| Series | Nominal pressure (MPa) | Body material | Action | Bore Size (mm) |
|---|---|---|---|---|
| CHKD | 10 | Aluminum | Double acting, Single rod | 20, 25, 32, 40, 50 63, 80, 100 |
| CHKG | 16 | Aluminum | Double acting, Single rod | 20, 25, 32, 40, 50 63, 80, 100 |
Reinforced Corrugated Cardboard Specification/Longer Length Reel: Nylon Tubing T0604-X64
Pneumatic Instrumentation Equipment » Piping Materials
-
・Length per roll: 500/250 m
・For general pneumatic tubing
・Nylon tubing
| Series | Tube size Tubing O.D. ×Tubing I.D. | Fluid |
|---|---|---|
| T0604-X64 | φ6×φ4 | Air/Oil, Water |
NAMUR Interface 5-Port Solenoid Valve VFN2000N
Pneumatic Instrumentation Equipment » Solenoid Valves
-
・The interface surface is compliant with NAMUR Standards.
Can be directly installed on industrial valve actuators that comply with NAMUR
| Series | Flow rate characteristics 4/2→5/3（A/B→EA/EB） C | Flow rate characteristics 4/2→5/3（A/B→EA/EB） b | Flow rate characteristics 4/2→5/3（A/B→EA/EB） Cv | Power consumption (W) |
|---|---|---|---|---|
| VFN2000N | 4.57 | 0.17 | 1.06 | 1.8 |
Industrial Filter/Vessel Series FGE
Industrial Filters/Sintered Metal Elements » Industrial Filters
-
・Ideal for medium flow rate filtration (Max. 230 L/min)
・Easy element replacement for the V-band type
(With cover anti-scattering mechanism)
| Series | Port size | Max. operating pressure | Operating temperature (℃) |
|---|---|---|---|
| FGE | R1, 2 | 0.7 MPa | MAX. 80 |
Slit Valve XGT
High Vacuum Equipment » Slit Valves
-
・This product is suitable to act as the partition valve between the load lock chamber and the transfer chamber or between the transfer chamber and the process chamber in semiconductor equipment or other equipment.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Green Procurement (RoHS)
| Series | Operating environmental pressure (Pa)(abs) | Fluid | Opening window size (Height x Width) (mm) | Operating pressure (MPa)(G) |
|---|---|---|---|---|
| XGT | Atmospheric pressure to 10-6 | Inert gas type vacuum | 32 x 222 46 x 236 50 x 336 | 0.45 to 0.6 |
Aluminum High Vacuum Angle Valve XLA/C-100/160(-1)-X152
High Vacuum Equipment » High Vacuum Valves
-
・Improved durability of bellows (Flange sizes 100 and 160)
・Service life of two million cycles
・Space required for equipment can be reduced
Without restriction on exhaust direction (two ways: from valve element side to bellows side and vice versa)
Increased flexibility of mounting orientation
・Lightweight, Compact
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Auto Switches Common Specifications Green Procurement (RoHS)
| Series | Actuation | Valve type | Shaft seal type | Application | Flange size |
|---|---|---|---|---|---|
| XLA-100/160-X152 | Air operated | Single acting (N.C.) | Bellows seal | Dust free, Cleaned | 100，160 |
| XLC-100/160-1-X152 | Air operated | Double acting | Bellows seal | Dust free, Cleaned | 100，160 |
Peltier-Type Thermo-con HEC
Temperature Control Equipment » Thermo-cons/Thermoelectric Baths (Peltier-Type Temperature Control Equipment)
-
・For applications requiring high-precision temperature control
・High-precision, refrigerant-free temperature control equipment that uses a Peltier
device
・Simple structure and high reliability
・Can easily be built into equipment due to its compact and low-vibration design
・Compatible with a wide range of power supply voltages
・Compliant with UL Standards, CE-marking
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HEC | 10 to 60℃ | 230 W, 600 W | ±0.01 to 0.03℃ | Peltier-type air-cooled | Tap water |
| HEC | 10 to 60℃ | 140 W, 320 W | ±0.01 to 0.03℃ | Peltier-type water-cooled | Tap water, Ethylene glycol aqueous solution (20%) |
| HEC | 10 to 60℃ | 600 W, 1200 W | ±0.01 to 0.03℃ | Peltier-type water-cooled | Tap water, Fluorinated fluid |
