Site Map | Japanese | Chinese Corporate Site

WEB Catalog

Product Information » WEB Catalog » High Vacuum Equipment » Slit Valves

My List My List Guide

Product List

Directional Control Valves
1. Pilot Operated 4/5 Port Solenoid Valves
2. Pilot Operated 3 Port Solenoid Valves
3. Direct Operated 3/4/5 Port Solenoid Valves
4. Reduced-wiring Fieldbus System (Serial Transmission System)
5. Air Operated Valves
6. Mechanical Valves/Hand Valves
7. Power Valves
8. ISO Valves
9. Explosion-Proof Valves
Air Cylinders
1. Standard Air Cylinders (Round Type）
2. Standard Air Cylinders (Square Cover）
3. Compact Air Cylinders
4. Environment Resistant Cylinders
5. Floating Joints/Rod End
6. Air-hydro Units
7. Mechanically Jointed Rodless Cylinders
8. Magnetically Coupled Rodless Cylinders
9. Table Cylinders
10. Guide Cylinders (MG Series)
11. Guide Cylinders (CX Series)
12. Fine Lock Cylinders
13. Lock Cylinders/Cylinder with An End Lock
14. Specialty Cylinders
15. Clamp Cylinders
16. Pin Shift Cylinder
17. Stopper Cylinders
18. Stroke Reading Cylinders
19. Valve Mounted Air Cylinders
20. ISO Cylinders
21. Shock Absorbers
22. Auto Switches
23. Actuator Position Sensor
24. Cylinder Speed Checkers
Rotary Actuators/Air Grippers
1. Rotary Actuators Vane Type
2. Rotary Actuators Rack & Pinion Type
3. Parallel Type Air Grippers
4. Angular Type Air Grippers
5. Auto Switches
Electric Actuators/Cylinders
1. Card Motor
2. Slider Type
3. Rod Type/Guide Rod Type
4. Slide Tables
5. Miniature
6. Rotary Tables
7. Grippers
8. Controllers/Drivers
9. Environment
10. Motorless Type
11. Made to Order
12. Electric Cylinders
13. Moving Coil Actuators
Vacuum Equipment
1. Vacuum Ejectors (Vacuum Generators)/Vacuum Pump Systems
2. Vacuum Ejectors
3. Vacuum Release Valve Units
4. Air Suction Filters
5. Vacuum Pads (Vacuum Suction Cups)
6. Special Pads
7. Vacuum Saving Valves
8. Vacuum Flow
9. Vacuum Regulators
10. Related Equipment for Vacuum Systems
Air Preparation Equipment
1. Aftercoolers/Air Tanks
2. Air Dryers
3. Air Preparation Filters
4. Auto Drains/Differential Pressure Gauges
Modular F.R.L. ⁄ Pressure Control Equipment
1. Modular F.R.L.
2. Regulators
3. Electro-Pneumatic Regulators
4. Proportional Valves
5. Booster Regulators
Lubrication Equipment
1. Lubrication Equipment
Fittings and Tubing
1. Fittings for General Purposes
2. Fittings for General Purposes(S Couplers/Multi-connectors)
3. Fittings for Special Environments
4. Fittings for Special Environments(Clean/Fluoropolymer)
5. Tubing
6. Tubing(Tubing for Special Environments)
7. Tubing(Fluoropolymer/Clean)
8. Related Products
Flow Control Equipment
Speed Controllers
1. Speed Controllers for General Purposes
2. Speed Controllers for Low Speed Control
3. Speed Controllers Special Environments
4. Speed Controllers with Special Functions
5. Tool Operation Type Speed Controllers
6. Air Saving Speed Controllers Air Saving Valves
7. Related Equipment
Silencers ⁄ Exhaust Cleaners ⁄ Blow Guns ⁄ Pressure Gauges
1. Silencers
2. Exhaust Cleaners
3. Blow Guns
4. Pressure Gauges
Switches ⁄ Sensors ⁄ Controller
1. Electronic Pressure Switches/Sensors (Self-contained Type)
2. Electronic Pressure Switches/Sensors (Remote Type)
3. Mechanical Pressure Switches
4. Electronic Flow Switches/Sensors
5. Mechanical Flow Switches
6. Controllers
Static Neutralization Equipment
1. Static Neutralization Equipment/Ionizers
Process Valves
1. 2/3 Port Solenoid Valves/Air Operated Valves
2. Compact 2/3 Port Solenoid Valves
3. 5.0 MPa 2/3 Port Solenoid Valves
4. 2/3 Port Valves for General Purpose Fluid Control
5. Coolant Valves
6. Valves for Water and Chemical Base Fluids
Chemical Liquid Valves ⁄ Fittings & Needle Valves ⁄ Tubing
1. Chemical Liquid Valves
2. Fittings/Needle Valves
3. Tubing
Process Pumps(Diaphragm Pumps)
1. Process Pumps
Temperature Control Equipment
1. Thermo-Chillers (Circulating Fluid Temperature Controllers)
2. Thermo-cons/Thermoelectric Baths (Peltier-Type Temperature Control Equipment)
3. Air Temperature Controllers
Process Gas Equipment
1. Process Gas Equipment
High Vacuum Equipment
1. High Vacuum Valves
2. Slit Valves
3. Rodless Cylinders for Vacuum
Industrial Filters ⁄ Sintered Metal Elements
1. Industrial Filters
2. Sintered Metal Elements
Pneumatic Instrumentation Equipment
1. Positioners
2. Regulators
3. Relays/Valves
4. Electro-Pneumatic Transducers
5. Actuators
6. Detection Conversion Units
7. Solenoid Valves
8. Piping Materials
Hydraulic Equipment
1. Hydraulic Cylinders
2. Hydraulic Equipment

Subject ⁄ Industry Classified Products

Adobe Flash Player(v16 or later) is required to view the catalog.

Slit Valves

For 300 mm wafer Parallel Seal Type Slit Valve XGTP

	・Long service life: 3 million cycles (within standard temperature range) ・Low particle generation: Reduced by 1/5 or more 　(compared with the current product) ・Easier maintenance 　Easy replacement of bellows 　Gate can be replaced from above.(Made to order) ・Safety measures 　A mechanical end lock mechanism has been adopted.

Data Download CAD PDF

Other Data	Safety Instructions　System Configuration/Series Variations　Green Procurement (RoHS)

Series	Operating environmental pressure (Pa)(abs)	Fluid	Opening window size (Height x Width) (mm)	Operating pressure (MPa)(G)
XGTP	Atmospheric pressure to 10^-6	Inert gas	50 x 336	0.45 to 0.6

For 300 mm wafer Parallel Seal Type Slit ValveXGTP

Series	Download
XGTP

Slit Valve XGT

	・This product is suitable to act as the partition valve between 　the load lock chamber and the transfer chamber or between 　the transfer chamber and the process chamber in semiconductor 　equipment or other equipment.

Data Download CAD PDF

Other Data	Safety Instructions　System Configuration/Series Variations　Green Procurement (RoHS)

Series	Operating environmental pressure (Pa)(abs)	Fluid	Opening window size (Height x Width) (mm)	Operating pressure (MPa)(G)
XGT	Atmospheric pressure to 10^-6	Inert gas type vacuum	32 x 222 46 x 236 50 x 336	0.45 to 0.6

Slit ValveXGT

Series	Download
XGT

▲Page top