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Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance/Type & Inverter Type

Thermo-chiller/High-performance Type HRZ

This product can only be shipped to China, Taiwan, Korea, Singapore,Malaysia, and Japan. For use in regions other than the aforementioned, order the HRZ-F.

    ・Suitable for semiconductor processing equipment with a wide variety of
    　features, such as high-temperature stability, a wide temperature range,
    　failure diagnosis, external communication, etc.
    ・Compliant with various safety standards
    ・Compliant with UL Standards, SEMI Standards, CE-marking

  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Thermo-chiller/High-performance Type HRZ
    Manual
    Series Cooling capacity View search result
    HRZ1 kW, 2 kW,
    4 kW, 8 kW    		View search result
  • Thermo-chiller/High-performance Type HRZ
    DoC
    Series Cooling capacity View search result
    HRZ1 kW, 2 kW,
    4 kW, 8 kW    		View search result
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature rangeCooling capacityTemperature stabilityCooling methodCirculating fluid
HRZ-20 to 40℃
20 to 90℃
-20 to 90℃		1 kW, 2 kW,
4 kW, 8 kW		±0.1℃Water-cooled refrigerationFluorinated fluids/Ethylene glycol aqueous solution (60%)/Tap water, Deionized water

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