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Other: RS232C Compatible Products

Thermo-chiller/High-performance Type HRZ

    ・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
    ・Compliant with various safety standards
    ・Compliant with UL Standards, SEMI Standards, CE-marking

    ∗ The HRZ series will be discontinued in December 2022.
     Please select the HRZ-F series.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Thermo-chiller/High-performance Type HRZ
    Manual
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    HRZView search result
  • Thermo-chiller/High-performance Type HRZ
    DoC
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    HRZView search result
SeriesSet temperature
range
Cooling
capacity
Temperature
stability
Cooling
method
Circulating fluid
HRZ-20 to 40℃
20 to 90℃
-20 to 90℃
1 kW, 2 kW, 4 kW, 8 kW±0.1℃Water-cooled
refrigeration
Fluorinated, Tap water, Deionized water,
Ethylene glycol aqueous solution (60%)

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