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Aluminum High Vacuum Angle Valve XL□
High Vacuum Equipment » High Vacuum Valves
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・High fluorine resistance
・Minimal outgassing
・Minimal contamination from heavy metals
∗ The XLA(V)/C/F(V)/G with flange sizes of 16 to 80 has been
discontinued in September 2017.
Please select the XLA(V)-2/XLC-2/XLF(V)-2/XLG-2 series.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Auto Switches Common Specifications Green Procurement (RoHS)
| Series | Actuation | Valve type | Shaft seal type | Application | Flange size |
|---|---|---|---|---|---|
| XLA | Air operated | Single acting (N.C.) | Bellows seal | Dust-free Cleaned | 16 to 160 |
| XLAV (With solenoid valve) | Air operated | Single acting (N.C.) | Bellows seal | Dust-free Cleaned | 16 to 160 |
| XLC | Air operated | Double acting | Bellows seal | Dust-free Cleaned | 16 to 160 |
| XLCV (With solenoid valve) | Air operated | Double acting | Bellows seal | Dust-free Cleaned | 16 to 80 |
| XLF | Air operated | Single acting (N.C.) | O-ring seal | High-speed operation High operating cycles | 16 to 160 |
| XLFV (With solenoid valve) | Air operated | Single acting (N.C.) | O-ring seal | High-speed operation High operating cycles | 16 to 160 |
| XLG | Air operated | Double acting | O-ring seal | High-speed operation High operating cycles | 16 to 160 |
| XLGV (With solenoid valve) | Air operated | Double acting | O-ring seal | High-speed operation High operating cycles | 16 to 80 |
| XLD | Air operated | Single acting (N.C.) | Bellows/O-ring seal | For preventing dust turbulence For preventing a pump from running overloaded | 25 to 160 |
| XLDV (With solenoid valve) | Air operated | Single acting (N.C.) | Bellows/O-ring seal | For preventing dust turbulence For preventing a pump from running overloaded | 25 to 160 |
| XLH | Manual | Manual | Bellows seal | Dust-free Cleaned | 16 to 50 |
| XLS | Electromagnetic | Single acting (N.C.) | (Bellows balance) | For portable equipment not requiring air | 16, 25 |
Diaphragm Valve for Ultra High Purity AP
Process Gas Equipment » Process Gas Equipment
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・For UHP gas delivery in semiconductor and other clean industries
・Used as a gas shutoff valve
・No spring is used for the wetted parts and the drive part is also separated from the diaphragm. Dead space in the flow path is small in order to suppress particle generation.
Safety Instructions Process Gas Equipment/Common Precautions Series Variations Valve and Regulator Recommendations Technical Data/Glossary of Terms Green Procurement (RoHS)
| Series | Description | Type | Body material |
|---|---|---|---|
| AP | For Ultra High Purity | Air Operated Type Diaphragm Valve | 316L SS secondary remelt |
| AP | For Ultra High Purity | Manually Operated Type Diaphragm Valve | 316L SS secondary remelt |
| AP | For Ultra High Purity | Metering Valve | 316L SS secondary remelt |
| AZ | For Ultra High Purity | Air Operated Type Diaphragm Valve | SUS316L |
| AZ | For Ultra High Purity | Manually Operated Type Diaphragm Valve | SUS316L |
| AZ | For Ultra High Purity | Metering Valve | SUS316L |
| AK | For General Applications | Air Operated Type Diaphragm Valve | SUS316 |
| AK | For General Applications | Manually Operated Type Diaphragm Valve | SUS316 |
| AK | For General Applications | Metering Valve | SUS316 |
Thermo-chiller/High-performance Type HRZ
Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible ProductsIndustrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: DeviceNet Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance Type & Inverter Type
This product can only be shipped to China, Taiwan, Korea, Singapore,Malaysia, and Japan. For use in regions other than the aforementioned, order the HRZ-F.
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・Suitable for semiconductor processing equipment with a wide variety of
features, such as high-temperature stability, a wide temperature range,
failure diagnosis, external communication, etc.
・Compliant with various safety standards
・Compliant with UL Standards, SEMI Standards, CE-marking
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRZ | -20 to 40℃ 20 to 90℃ -20 to 90℃ | 1 kW, 2 kW, 4 kW, 8 kW | ±0.1℃ | Water-cooled refrigeration | Fluorinated fluids/Ethylene glycol aqueous solution (60%)/Tap water, Deionized water |
Thermo-chiller/Environmentally Resistant Type HRS-R
Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible ProductsIndustrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
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・Resistant to dust and water splashing
・Protection of the electrical unit: IP54
・Metal panel
The entire exterior surface is metal.
A stainless steel panel can be selected. (Option)
・A large capacity tank (12 L) is available. (Option)
・Ambient temperature: 5 to 45°C
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRS-R | 5 to 40℃ | 1.9 kW 2.9 kW 5 kW (60 Hz) | ±0.1℃ | Air-cooled refrigeration | Tap water Ethylene glycol aqueous solution (15%) |
Fluoropolymer Fittings/Hyper Fittings/Flare Type LQ3
Chemical Liquid Valves/Fittings & Needle Valves/Tubing » Fittings/Needle ValvesFluoropolymer Equipment/PVC Equipment » Fittings & Needle Valve/Tubing
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・Material: New PFA
・Triple-seal construction
・Easy installation
| Series | Max. operating pressure | Operating temperature (℃) |
|---|---|---|
| LQ3 | 1.0 MPa | Nut material PVDF: 0 to 150 Nut material PFA: 0 to 200 |
High Purity Chemical Liquid Valve/Manually Operated (Integrated Fitting Type/Threaded Type) LVH
Chemical Liquid Valves/Fittings & Needle Valves/Tubing » Chemical Liquid ValvesFluoropolymer Equipment/PVC Equipment » High Purity Chemical Liquid Valves
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・Body materials: New PFA/Stainless steel/PPS
・Compatible with locking and non-locking types
・Organic solvents compatible
Body: Stainless steel, Actuator section: ADC, Buffer: Choose from FKM/EPDM
・Manifold type no.: LLH2，LLH3，LLH4
| Series | Type | Valve type | Port size Applicable tubing O.D. | Orifice diameter (mmø) |
|---|---|---|---|---|
| LVH | Manually operated (Integrated fitting/Threaded type) | N.C. | Threaded type: 1/8 to 1/2 Integrated fitting: Metric: ø3 to ø12 Inch: 1/8 to 1/2 | 4 to 12 |
| LVH | Manually operated Organic solvents compatible | N.C. | Metric: 6 to 19 Inch: 1/4 to 1 | 4 to 22 |
2-Layer Soft Fluoropolymer Tubing TQ
Process Valves » Valves for Water and Chemical Base Fluids
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・Carries fluid such as solvent with a soft and abrasion resistant tube.
・2-layer structure
Outer layer: Special nylon resin
Inner layer: Special fluoropolymer
・Internal smoothness: Equivalent to Ra 0.02 μm
| Series | Tubing O.D. Metric size | Color | Fluid |
|---|---|---|---|
| TQ | φ4, φ6, φ8, φ10, φ12 | Translucent (Material color) | Air, Water, Inert gas, Solvent |
Coolant Valve (2 Way Valve) VNC
Process Valves » Coolant Valves
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・For controlling coolants (Cutting fluid) used in machine tools
・Maximum operating pressure: 0.5 MPa, 1 MPa
・Air operated, external pilot solenoid
Safety Instructions 2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics Series Variations/Process, Coolant Valves List
Green Procurement (RoHS)
Model Selection/Flow Rate Characteristics Series Variations/Process, Coolant Valves List
Green Procurement (RoHS)
| Series | Valve type | Port size | Orifice diameter (mmø) |
|---|---|---|---|
| VNC | N.C./N.O. | 1/8 to 2 1 1/4B to 3B | 7 to 80 |
Compact/Lightweight 2 Port Solenoid Valve (2 Way Valve) for Water and Air VDW-XF
Process Valves » Compact 2/3 Port Solenoid Valves
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・Compact, lightweight resin body (PPS)
・IP65
・Power consumption: 3 W (Standard), 0.5 W (With power-saving circuit)
Safety Instructions 2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics Series Variations/Solenoid Valves List
Green Procurement (RoHS)
Model Selection/Flow Rate Characteristics Series Variations/Solenoid Valves List
Green Procurement (RoHS)
| Series | Valve type | Port size | Orifice diameter (mmø) |
|---|---|---|---|
| VDW30/40-XF | N.C. | P7, P8 (Quick fastener) ø4, ø6, ø8, ø10 | 1 to 6 |
Steam Valve/2 Port Valve (2 Way Valve) for Steam VND
Process Valves » 2/3 Port Valves for General Purpose Fluid ControlProcess Valves » 2/3 Port Solenoid Valves/Air Operated Valves
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・For steam control
・Adopts PTFE seals
・With indicator light (Option)
・Air operated type
Safety Instructions 2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics Series Variations/Process, Coolant Valves List
Green Procurement (RoHS)
Model Selection/Flow Rate Characteristics Series Variations/Process, Coolant Valves List
Green Procurement (RoHS)
| Series | Valve type | Port size | Orifice diameter (mmø) |
|---|---|---|---|
| VND | N.C./N.O. | 1/8 to 2 1 1/4B to 2B | 7 to 50 |
