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4-Port Solenoid Valve/Cassette Type Manifold SJ1000/2000/3000/4000

Directional Control Valves » Pilot Operated 4/5 Port Solenoid Valves
Equipment for the Semiconductor Industries » Exhaust Line
Features

Click here to see the catalog for
the 60JD/60GD manifold
(flat ribbon cable/PC wiring compatible type).

    ・Low-profile cassette type with baseless structure
    ・Takes up minimal space with a body width of 6.5 mm (SJ1000),
    　7.5 mm (SJ2000), 10 mm (SJ3000A), or 15 mm (SJ4000)
    ・Allows for the mixed mounting of 5 SJ series valve sizes
    ・The multi-pin connector makes it easy to add or subtract stations or to
    　exchange valves.
    ・One side solenoid
    ・4-position, dual 3-port specifications are available.
    ・Manifold type no.: SS5J1, SS5J2, SS5J3, SS5J4

    ＊The EX510 series is to be discontinued. When designing new equipment
    　and facilities, consider using another series (EX260/EX600) instead
Safety Instructions　3/4/5 Port Solenoid Valves/Precautions　Selection/Technical Data
Green Procurement (RoHS)
SeriesFlow rate characteristics
4/2 → 3/5 (A/B → E)
C［dm3/（s・bar）］		Flow rate characteristics
4/2→3/5（A/B→E）
b		Flow rate characteristics
4/2→3/5（A/B→E）
Cv		Applicable
cylinder size
Speed: At
100 mm/s		Power
consumption
(W)
SJ10000.320.330.08ø320.55 (Standard)
0.23 (With power-saving circuit)
SJ20000.360.130.08ø400.55 (Standard)
0.23 (With power-saving circuit)
SJ30000.560.110.12ø500.4 (Standard)
0.15 (With power-saving circuit)
SJ3000A
Large flow type		0.760.190.21ø630.4 (Standard)
0.15 (With power-saving circuit)
SJ40002.610.200.68ø800.4 (Standard)
0.15 (With power-saving circuit)

Air Gripper for Collaborative Robots/Long Stroke Type RMHF2

Rotary Actuators/Air Grippers » Parallel Type Air Grippers
Rotary Actuators/Air Grippers » Air Gripper Unit for Collaborative Robots
Air Gripper for Collaborative Robots » Air Grippers
Features
    ・Select from 3 types of tool changer.
    　Simple operation allows for easy tool changing.
    　Clamp type (Manual override), One-push type (Manual override) [New],
    　Auto type [New], Tool holder [New]
    ・Unitization of the peripheral devices required for gripper driving
    　Operation is possible simply by connecting 1 air supply tube and 1
    　electrical wire.
    　Built-in solenoid valve, exhaust throttle valve with silencer, auto switch,
    　fitting, etc.
    ・Can be used with the collaborative robots of 12 companies
    　UNIVERSAL ROBOTS, OMRON/TECHMAN ROBOT, FANUC, YASKAWA
    　Electric, Mitsubishi Electric, HAN’S ROBOT, KUKA, DOOSAN ROBOTICS,
    　SIASUN, JAKA, AUBO, ABB
    ・Air consumption reduced by up to 80%
    ・Allows for temporary workpiece drop prevention
    ・The 64 mm long stroke is ideal for a variety of workpieces.
    ・Height reduced by approx. 35% (Compared with the standard type)
    ・Actuator position sensor mountable (Option)
    　(Collaborative robot manufacturer: Compatible with robots from UNIVERSAL
    　ROBOTS and FANUC CORPORATION)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Air Gripper for Collaborative Robots/Long Stroke Type RMHF2
    Manual
    Series View search result
    RMHF2View search result
  • Air Gripper for Collaborative Robots/Long Stroke Type RMHF2
    DoC/IM
    Series View search result
    RMHF2View search result
Safety Instructions　Air Grippers/Precautions　Auto Switches/Precautions
Green Procurement (RoHS)
SeriesNumber of fingersExternal gripping force
[N]		Internal gripping force
[N]		Opening/Closing stroke
(Both sides) [mm]
RMHF22909064

Battery-less Absolute Encoder Type
Electric Actuator/High Performance Rod Type LEY□G

Electric Actuators/Cylinders » Battery-less Absolute Encoder Type
Features
    ・Reduces cycle time
    　Cycle time: Reduced by 33% (0.65 s ← 0.97 s) compared with the existing
    　model∗
    　Acceleration/Deceleration: 10000 mm/s2 (334% increase compared with
    　the existing model)
    　Max. speed: 700 mm/s (Improved by 40% compared with the existing
    　model)
    　∗When LEY25GA-300 is operated from 0 to 300 mm (stroke)
    ・Battery-less absolute encoder compatible
    　Easy operation restart after recovery of the power supply
    　Maintenance labor can be reduced as the product does not require the
    　use of batteries.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Electric Actuators/Precautions　Auto Switches/Precautions　Green Procurement (RoHS)
SpecificationModelStroke
(mm)		Pushing force
(N)		Speed
(mm/s)		Screw lead
(mm)
High performance
Battery-less absolute
(Step motor 24 VDC)		LEY16G30 to 300Max. 141Max. 7002.5，5，10
High performance
Battery-less absolute
(Step motor 24 VDC)		LEY25G30 to 400Max. 452Max. 7003，6，12
High performance
Battery-less absolute
(Step motor 24 VDC)		LEY40G30 to 500Max. 1058Max. 8004，8，16

Return Filter FH100

Hydraulic Equipment » Hydraulic Equipment
    ・Easy maintenance
    ・It is possible to detect clogging with the differential pressure indicator
    　and differential pressure indication switch (CB-□□H).
Safety Instructions　Hydraulic Filters/Precautions　Guide/INDEX　Made to Order　Differential Pressure Indication Switch　Green Procurement (RoHS)
SeriesPort size (Rc)Rated flow range L/minElement μm
(Nominal filtration)
FH1003/4 to 3Paper : 50 to 600
Micromesh : 60 to 700		Paper : 5, 10, 20
Micromesh : 74, 105

JIS Standard Hydraulic Cylinder CH2/CHD2

Hydraulic Equipment » Hydraulic Cylinders
    ・Uses a cushion seal type mechanism, Reduces impact at the stroke end, Improves durability
    ・Rod cover with block construction makes for easy disassembly and assembly
    ・With auto switch (CHD2 series: CHD2E, CHD2EW, CHD2F, CHD2FW, CHD2G, CHD2H)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Hydraulic Cylinders/Precautions　Auto Switches/Precautions　Series Variations　Technical Data　Green Procurement (RoHS)
SeriesNominal pressure (MPa)Tube materialActionBore Size (mm)
CH2E3.5AluminumDouble acting, Single rod32, 40, 50, 63, 80, 100
CH2EW3.5AluminumDouble acting, Double rod32, 40, 50, 63, 80, 100
CH2F7Stainless steelDouble acting, Single rod32, 40, 50, 63, 80, 100
CH2FW7Stainless steelDouble acting, Double rod32, 40, 50, 63, 80, 100
CH2G14IronDouble acting, Single rod32, 40, 50, 63, 80, 100
CH2H14Stainless steelDouble acting, Single rod32, 40, 50, 63, 80, 100

Bag Filter FGF

Industrial Filters/Sintered Metal Elements » Industrial Filters
    ・Highly effective for the filtration of high-temperature and high-viscosity fluids
    ・Ideal for high-flow filtration (Max. 2000 L/min)
    ・Easy handling of filtered impurities
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Bag Filter FGF
    Manual
    Series View search result
    FGFView search result
Safety Instructions　Industrial Filters/Precautions　Selection　Green Procurement (RoHS)
SeriesPort sizeMax. operating pressureOperating temperature (℃)
FGF100 (4B),150 (6B) JIS 10KFF0.5 MPaMAX. 80

Normal Close High Vacuum Solenoid Valve XSA

Process Valves » Compact 2/3 Port Solenoid Valves/Air Operated Valves
High Vacuum Equipment » High Vacuum Valves
Equipment for the Semiconductor Industries » Exhaust Line
Equipment for the Semiconductor Industries » N2 Gas/Air Supply Line
Features
    ・Minimum operating pressure: 1 × 10-6 Pa (abs)
    ・Leakage: Internal 1.3 × 10-9 Pa·m3/s, External 1.3 × 10-11 Pa·m3/s
    ・2 types of fittings and female threads are available.
    ・Power consumption: Max. 25% reduction
    ・Weight: Max. 18% lighter (0.5 kg → 0.41 kg)
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesValve typeFluidPipingPort size
XSANormally closedAir
Inert gas		Face seal fitting
Compression fitting		1/4, 3/8
XSANormally closedAir
Inert gas		Rc, NPT female thread1/8, 1/4, 3/8

Pilot Operated 2 Port Solenoid Valve (2 Way Valve) for Dry Air
 VQ

Process Valves » Compact 2/3 Port Solenoid Valves
    ・High-frequency operation is possible: High-speed response 7 ms or less (VQ20), 20 ms or less (VQ30)
    ・Easy piping with One-touch fittings
    ・The dust-tight, water-jet-proof enclosure (IP65) is compatible with the DIN terminal type.
    ・Applications: Air-blow, Blow-off of workpieces, etc.
    ・Manifold type no.: VV2Q22, VV2Q32
Safety Instructions　2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics　Series Variations/Solenoid Valves List
Green Procurement (RoHS)
SeriesValve typePort size
VQ20N.C.φ6, φ8
VQ30N.C.φ10, φ12

Regulator with Backflow Function AR□K-D

Modular F.R.L./Pressure Control Equipment » Modular F.R.L.
Modular F.R.L. Units » Regulators
Features
    ・The regulator with backflow function incorporates a mechanism that exhausts the air pressure in the outlet side quickly.
    ・Easy to handle
    　Easy to hold when unlocked
    ・Selection of pressure gauges
    　Square embedded type pressure gauge, Round type pressure gauge,
    　Digital pressure switch
    ・Interchangeability is maintained.
    　The mounting pitch for panel mounting is interchangeable with the AR(K)-B.
    　The brackets and set nuts are the same for both existing and new products.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Regulator with Backflow Function AR□K-D
    Manual
    Series View search result
    AR20K to 60K-DView search result
Safety Instructions　F.R.L. Units/Precautions　Product Selection Guide
Green Procurement (RoHS)
SeriesPort sizeSet pressure (MPa)
AR20K to 60K-D1/8，1/4，3/8，1/2，3/4，10.05 to 0.85
0.02 to 0.2

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