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Filter Regulator with Backflow Function 10-/21-AW□K
Clean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment
Safety Instructions Features/Basic Specifications/Clean Series Precautions
F.R.L. Units/Precautions Green Procurement (RoHS)
F.R.L. Units/Precautions Green Procurement (RoHS)
Series | Port size | Set pressure (MPa) | Filtration (μm) |
---|---|---|---|
10-AW20K to 40K | 1/8, 1/4, 3/8, 1/2, 3/4 | 0.05 to 0.85 | 5 |
21-AW20K to 40K | 1/8, 1/4, 3/8, 1/2, 3/4 | 0.05 to 0.85 | 5 |
Guide Table 10-MGF
Clean Series/Low-Particle Generation » Air Cylinders
Clean Series
・Low profile compact cylinder
・Cylinder with a large concentric guiding sleeve provides excellent eccentric load resistance.
Safety Instructions Applicable Auto Switch List
Features/Basic Specifications/Clean Series Precautions
Actuators/Precautions Auto Switches/Precautions Green Procurement (RoHS)
Features/Basic Specifications/Clean Series Precautions
Actuators/Precautions Auto Switches/Precautions Green Procurement (RoHS)
Series | Action | Bore size (mm) |
---|---|---|
10-MGF | Double acting | 40, 63, 100 |
Direct Operated 3 Port Solenoid Valve (3 Way Valve) VX3
Process Valves » 2/3 Port Solenoid Valves/Air Operated Valves
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・For air, water, oil, steam
・Manifold type no.: VVX31,VVX32,VVX33
Safety Instructions 2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics
Series Variations/Selection Procedure/Solenoid Valves List/Air Operated Valves List
Green Procurement (RoHS)
Model Selection/Flow Rate Characteristics
Series Variations/Selection Procedure/Solenoid Valves List/Air Operated Valves List
Green Procurement (RoHS)
Series | Valve type | Port size | Orifice diameter (mmø) |
---|---|---|---|
VX31/32/33 | N.C./N.O./COM. | 1/8 to 3/8 | 1.5 to 4 |
Digital Flow Switch for Water PF2W
Switches/Sensors/Controller » Electronic Flow Switches/Sensors
-
・An integrated type and a separate monitor type are available.
・Switch output, Accumulated pulse output, Analog output
・Capable of switching back and forth between cumulative and instantaneous flow
・Compatible with high temperatures up to 90°C
・IP65
・4-channel flow monitor
4 different flow ranges can be connected to 1 controller.
Safety Instructions Pressure Switches/Flow Switches/Precautions Flow Switch Series Variations
Green Procurement (RoHS)
Green Procurement (RoHS)
Series | Rated flow range (L/min) |
---|---|
PF2W | 0.5 to 4 2 to 16 5 to 40 10 to 100 |
Dual Speed Controller ASD
Flow Control Equipment » Speed Controllers for General Purposes
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・Enables bi-directional flow control with a speed controller (Meter-in and meter-out)
・Prevents cylinders from lurching
・Speed control of single acting cylinders
Type | Series | Port size on the cylinder side | Applicable tubing O.D. Metric size | Applicable tubing O.D. Inch size |
---|---|---|---|---|
Dual speed controller | ASD | M5 to 1/2 | φ4 to φ12 | φ1/8'' to φ3/8'' |
Precision Regulator IR
Modular F.R.L./Pressure Control Equipment » RegulatorsPressure Control Equipment » Regulators

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・Tension control
・Contact pressure control
・Setting sensitivity: Within 0.2% F.S.
・Repeatability: Within ±0.5% F.S.
Safety Instructions F.R.L. Units/Precautions Series Variations/Pressure Control Equipment
Product Selection Guide Green Procurement (RoHS)
Product Selection Guide Green Procurement (RoHS)
Series | Port size | Set pressure (MPa) |
---|---|---|
IR1000 | 1/8 | 0.005 to 0.2 0.01 to 0.4 0.01 to 0.8 |
IR2000 | 1/4 | 0.005 to 0.2 0.01 to 0.4 0.01 to 0.8 |
IR3000 | 1/4,3/8,1/2 | 0.01 to 0.2 0.01 to 0.4 0.01 to 0.8 |
Regulator AR-A
Modular F.R.L./Pressure Control Equipment » Modular F.R.L.Modular F.R.L. Units » Regulators
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・Energy-saving regulator Pressure drop: Max. 50% improvement
∗ The AR20 to 40-A is to be discontinued as of March 2025.
Select the AR20 to 40-D as a substitute.▶Click here for details.
The AR10-A will continue to be produced, so it can be selected and used
as before.
Series | Port size | Set pressure (MPa) |
---|---|---|
AR10 to 40-A | M5,1/8,1/4,3/8,1/2,3/4 | 0.05 to 0.7 0.02 to 0.2 |
Air-blow Module LLB1
Air Preparation Equipment » Air Preparation Filters
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・Reduced piping labor/Space saving
・Compact integration of devices
・Short-pitch mounting is possible.
Compact centralized pressure control
・Parts in contact with fluid: Grease-free
Series | Fluid | Set pressure | Flow range L/min (ANR) |
---|---|---|---|
LLB1 | Air, N2 gas | 0.05 to 0.6 MPa 0.05 to 0.35 MPa | Up to 100 |
Ball Spline Buffer Pad (Vacuum Suction Cup) ZP2
Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Vacuum Pads (Vacuum Suction Cups)
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・The ball spline guide is used for buffers.
Safety Instructions Vacuum Equipment/Precautions Vacuum Pads/Precautions Series Variations Model Selection Green Procurement (RoHS)
Series | Pad type | Pad diameter (mm) |
---|---|---|
ZP2 | Pad with ball spline buffer | φ2,φ4,φ6,φ8 |
Battery-less Absolute Encoder Type
Electric Rotary Table LER
Electric Actuators/Cylinders » Battery-less Absolute Encoder Type-
・Restart from the last stop position is possible.
・Easy operation restart after recovery of the power supply
The position information is held by the encoder even when the power supply is turned off.
A return to origin operation is not necessary when the power supply is recovered.
・No battery is installed. Reduced maintenance
No battery is used to store the position information.
There is no need to manage spare batteries or replacement maintenance.
・Rotation angle: 320º, 180º, 90º
・Space saving: Built-in step motor
・Shock-less/high speed actuation
Max. speed: 420º/sec
Max. acceleration/deceleration: 3000º/sec2
*Value when an external stopper is mounted
Safety Instructions Electric Actuators/Precautions Features
Series Variations Simplified Selection Flow Chart Green Procurement (RoHS)
Series Variations Simplified Selection Flow Chart Green Procurement (RoHS)
Model | Rotating torque [N·m] Basic | Rotating torque [N·m] High torque | Max. speed [º/s] Basic | Max. speed [º/s] High torque | Positioning repeatability [º] Basic | Positioning repeatability [º] High torque |
---|---|---|---|---|---|---|
LER50 | 6.6 | 10 | 420 | 280 | ±0.05 (At the end: ±0.01)* | ±0.05 (At the end: ±0.01)* |