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For liquids Clamp-on Type Flow Sensor PFUW
Switches/Sensors/Controller » Clamp-on Type Flow Sensor
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・Benefit from the eight “zeros” with clamp mounting!
Zero piping work
Zero leakage
Zero clogging
Zero pressure loss
Zero fluid contact
Zero fluid contact parts material concerns
Zero foreign matter entry into piping
Rated flow rate range from zero L/min
・“Easy mounting and retrofitting” Reduced installation work
| Series | Rated flow range (L/min) |
|---|---|
| PFUW | 0 to 60 0 to 100 |
Pulse Blow Valve AXTS040-X202
Process Valves » Compact 2/3 Port Solenoid Valves
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・The peak pressure of repeatedly colliding air permits efficient blowing.
・CO2 emissions (Air consumption): 50% reduction
・Control for pulse generation is not required.
Pulse blow can be used by simply supplying air.
・Built-in pilot valve construction allows for stable blowing.
| Series | Valve construction | Type of actuation | Frequency adjustment range |
|---|---|---|---|
| AXTS040□-X202 | Metal seal | Internal pilot | 1 to 12 Hz |
Air Saving Impact Blow Valve IBV
Process Valves » Compact 2/3 Port Solenoid Valves
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・Increased impact force due to higher peak pressure
・Instantaneous air blow reduces CO2, air consumption, and operation
time
Peak pressure: 2 to 3 times or more
CO2/Air consumption: 93% reduction
Operation time: 97% reduction
| Series | Port size | Operating pressure range |
|---|---|---|
| IBV10 Solenoid valve type | IN: 3/8 OUT: 1/4 | 0.15 to 0.7 MPa |
| IBV11 Air operated type | IN: 3/8 OUT: 1/4 Pilot port: 1/8 | 0.1 to 0.5 MPa |
Speed Controller with Compact Indicator AS-FSMA/FSCA
Flow Control Equipment » Speed Controllers for Low Speed Control
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・Improvement of resolution has made it possible to make fine
adjustment.
1 to 50 mm/s: AS-FSMA series
50 to 150 mm/s: AS-FSCA series
・Flow rate can be controlled numerically with the indicator window.
Due to the vernier indication, it is possible to configure fine settings in 1/4
increments.
Reduces work-hours and setting mistakes
・Better visibility
Check from 360° directions is possible.
Inspection and maintenance works are facilitated.
Safety Instructions Flow Control Equipment/Precautions Series Variation
Green Procurement (RoHS) Panel Mount Adapter
*Panel mount adapters are only compatible with in-line type
Green Procurement (RoHS) Panel Mount Adapter
| Type | Series | Port size on the cylinder side | Applicable tubing O.D. Metric size | Applicable tubing O.D. Inch size |
|---|---|---|---|---|
| Speed controller with indicator Elbow type, Universal type | AS-FSMA AS-FSCA | M5×0.8 10-32UNF R,NPT,G 1/8,1/4 | φ2 to φ10 | φ1/8'' to φ3/8'' |
| Speed controller with indicator In-line type | AS□2-FSMA AS□2-FSCA | - | φ3.2 to φ8 | φ1/8'' to φ5/16'' |
Process Gas Equipment 25A
Series Compatible with Secondary Batteries Series 25A- » Process Gas Equipment
| Series | Model | Specification |
|---|---|---|
| Diaphragm Valve for Ultra High Purity | AZ3542□25A AZ4542□25A | Air Operated Type |
| Diaphragm Valves for General Applications | AK3542□25A AK4542□25A | Air Operated Type |
Flow Control Equipment/Fittings 25A-
Series Compatible with Secondary Batteries Series 25A- » Flow Control Equipment/Fittings
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＊Standard products: Standard products are copper (Cu) and zinc (Zn) free. Refer to the Web Catalog for details.
・Click here for Stainless Steel Speed Controller/Series AS-FG
・Click here for Speed Controller with Indicator/Series AS-FSG
・Click here for Speed Controller with Indicator/Series AS-FPG
・Click here for With One-touch fittings/Series KQ
（25A- is only applicable to the type without a connection thread.）
・Click here for Stainless Steel Fittings/Series KG
・Click here for Stainless Steel Fittings/Series KPG
・Click here for Stainless Steel Fittings/Series KQG2
・Click here for With One-touch fittings Stainless steel KQ2-G
・Click here for Stainless Steel Fittings/Series KFG2
・Click here for Stainless Steel Fittings/Series MS
・Click here for S Couplers stainless steel type/Series KKA
| Series | Model | Specification |
|---|---|---|
| Stainless Steel Speed Controller | AS-FG＊ | Elbow/Universal/In-line type |
| Speed Controller with Indicator | AS-FSG＊ | Elbow type |
| Speed Controller with Indicator | AS-FPG＊ | Elbow type |
| Quick Exhaust Valve | 25A-AQ240F, 340F | Built-in One-touch fittings |
| Check Valve | 25A-AKH | With One-touch fittings |
| One-touch Fittings | KQ2＊ （25A- is only applicable to the type without a connection thread.） | One-touch fittings |
| Rectangular Multi-connector | 25A-KDM | Rectangular multi-connector |
| Stainless Steel Fittings | KG＊ | One-touch fittings |
| Stainless Steel Fittings | KPG＊ | One-touch fittings |
| Stainless Steel Fittings | KQG2＊ | One-touch fittings |
| Stainless Steel Fittings | KQ2-G＊ | Stainless steel |
| Stainless Steel Fittings | KFG2＊ | Insert fittings |
| Stainless Steel Fittings | MS＊ | Miniature fittings |
| Stainless Steel Fittings | KKA＊ | S Couplers stainless steel type |
Aluminum High Vacuum Angle Valve XLA/C/F/G
High Vacuum Equipment » High Vacuum Valves
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・Aluminum bodied
Uniform baking temperature
Lightweight, Compact
Minimal outgassing
Minimal contamination from heavy metals
・Bellows are replaceable.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Auto Switches Common Specifications Green Procurement (RoHS)
| Series | Actuation | Valve type | Shaft seal type | Application | Flange size |
|---|---|---|---|---|---|
| XLA-2 | Air operated | Single acting (N.C.) | Bellows seal | Dust free, Cleaned | 16 to 80 |
| XLAV-2 (With solenoid valve) | Air operated | Single acting (N.C.) | Bellows seal | Dust free, Cleaned | 16 to 80 |
| XLC-2 | Air operated | Double acting | Bellows seal | Dust free, Cleaned | 16 to 80 |
| XLF-2 | Air operated | Single acting (N.C.) | O-ring seal | High-speed operation, High operating cycles | 16 to 80 |
| XLFV-2 (With solenoid valve) | Air operated | Single acting (N.C.) | O-ring seal | High-speed operation, High operating cycles | 16 to 80 |
| XLG -2 | Air operated | Double acting | O-ring seal | High-speed operation, High operating cycles | 16 to 80 |
Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ
Process Gas Equipment » Process Gas Equipment
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・For UHP gas delivery in semiconductor and other clean industries
・Body material: 316L SS secondary remelt or 316L SS
・Electropolished wetted parts
・External metal seal construction
Safety Instructions Process Gas Equipment/Common Precautions Series Variations Valve and Regulator Recommendations Technical Data/Glossary of Terms Green Procurement (RoHS)
| Series | Description | Type | Body material |
|---|---|---|---|
| AP | For Ultra High Purity | Single Stage Regulator | 316L SS secondary remelt |
| AP | For Ultra High Purity | Two Stage Regulator | 316L SS secondary remelt |
| AP | For Ultra High Purity | Pneumatic Actuation Pressure Regulator | 316L SS secondary remelt |
| SL | For Ultra High Purity | Single Stage Regulator | 316L SS secondary remelt |
| AZ | For Ultra High Purity | Single Stage Regulator | SUS316L |
| AZ | For Ultra High Purity | Pneumatic Actuation Pressure Regulator | SUS316L |
| AK | For General Applications | Single Stage Regulator | SUS316 |
| AK | For General Applications | Two Stage Regulator | SUS316 |
| AK | For General Applications | Pneumatic Actuation Pressure Regulator | SUS316 |
| BP | For Ultra High Purity | Back Pressure Regulator | SUS316 |
| BP | For General Applications· | Back Pressure Regulator | SUS316 |
Floating Joint J
Air Cylinders » Floating Joints/Rod End
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・The floating joint can absorb any off-centering or loss of parallel accuracy of the double acting cylinder, making centering unnecessary.
| Type | Series | Applicable cylinder bore size (mm) |
|---|---|---|
| Lightweight and compact type | JT | 20，25，32，40 |
| Light weight type for light load | JC | 20，25，32，40，50，63 |
| Standard | JA，JAF，JAL | 6，10，15，20，25，30，40，50，63，80，100，125，140，160 |
| Standard | JA-X530，JAF-X530， JAL-X530 | 180，200 |
| Heavy load | JAH，JAHF，JAHL | 40，50，63，80，100 |
| For compact cylinders | JB | 12，16，20，25，32，40，50，63，80，100，125，140，160 |
| Stainless steel type | JS | 10，15，16，20，25，32，40，50，63 |
