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High Purity Chemical Liquid Valves

Compact Type High Purity Air Operated Chemical Liquid Valve LVD

    ・Space saving, compact model is available.
     Dimension across inlet/outlet ports: Reduced by up to 29%
    ・Body material: New PFA
    ・Diaphragm material: PTFE
    ・Actuator materials: PPS, PVDF (LVD-F/FN)

    Note) Tubing O.D. for the tube extension type
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SeriesTypeValve typeApplicable tubing O.D.
Metric size
Applicable tubing O.D.
Inch size
Orifice diameter
LVDIntegrated fittingsN.C./N.O./
Double acting
3 to 191/8 to 3/42 to 16
LVDTube extensionsN.C./N.O./
Double acting
6 to 191/4 to 3/44 to 16
LVD-F/FNLQ1 Integrated fittingsN.C./N.O./
Double acting
3 to 251/8 to 14 to 22
LVD-F/FNLQ3 Integrated fittingsN.C./N.O./
Double acting
6 to 251/4 to 14 to 22
LVD-F/FNTube extensionsN.C./N.O./
Double acting
6 to 251/4 to 14 to 22


■Space saving, compact model available

Compact type model is introduced as a new series to complement conventional LVC series with integral fittings.
Select a series according to the flow rate and installation requirements.
Mounting base dimensions conform to SEMI Standard, F65-1101.
(Except for the LVD10 and LVD60)

●Piping from 4 directions are possible.
●Integral clean One-touch fitting construction

●Dimension across inlet/outlet ports:Reduced by up to 29%


●Suck Back

■Material of actuator section: PVDF resin

Series LVD

Series LVD F/FN

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