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Product List

Directional Control Valves
1. Pilot Operated 4/5 Port Solenoid Valves
2. Pilot Operated 3 Port Solenoid Valves
3. Direct Operated 3/4/5 Port Solenoid Valves
4. Reduced-wiring Fieldbus System (Serial Transmission System)
5. Air Operated Valves
6. Mechanical Valves/Transmitters
7. Finger Valve/Hand Valves/Residual Relief 3 Port Valve
8. Blow Guns
9. Power Valves
10. ISO Valves
11. Explosion-Proof Valves
Air Cylinders
1. Standard Air Cylinders (Round Type）
2. Standard Air Cylinders (Square Cover）
3. Compact Air Cylinders
4. Environment Resistant Cylinders
5. Floating Joints/Rod End
6. Air-hydro Units
7. Mechanically Jointed Rodless Cylinders
8. Magnetically Coupled Rodless Cylinders
9. Table Cylinders
10. Guide Cylinders
11. Dual Rod Cylinders
12. Fine Lock Cylinders
13. Lock Cylinders/Cylinder with An End Lock
14. Specialty Cylinders
15. Clamp Cylinders
16. Pin Shift Cylinder
17. Stopper Cylinders
18. Stroke Reading Cylinders
19. Valve Mounted Air Cylinders
20. ISO Cylinders
21. Shock Absorbers
22. Auto Switches
23. Actuator Position Sensor
Rotary Actuators/Air Grippers
1. Rotary Actuators Vane Type
2. Rotary Actuators Rack & Pinion Type
3. Parallel Type Air Grippers
4. Angular Type Air Grippers
5. Air Gripper Unit for Collaborative Robots
6. Auto Switches
Electric Actuators/Cylinders
1. Card Motor
2. Battery-less Absolute Encoder Type
3. Slider Type
4. Rod Type/Guide Rod Type
5. Slide Tables
6. Miniature
7. Rotary Tables
8. Grippers
9. Controllers/Drivers
10. Environment
11. Motorless Type
12. Electric Cylinders
13. Made to Order
Vacuum Equipment
1. Vacuum Ejectors (Vacuum Generators)/Vacuum Pump Systems
2. Vacuum Ejectors
3. Vacuum Release Valve Units
4. Air Suction Filters
5. Vacuum Pads (Vacuum Suction Cups)
6. Special Pads
7. Gripper for Collaborative Robots
8. Vacuum Saving Valves
9. Vacuum Flow
10. Vacuum Regulators
11. Related Equipment for Vacuum Systems
Air Preparation Equipment
1. Aftercoolers/Air Tanks
2. Air Dryers
3. Air Preparation Filters
4. Auto Drains/Differential Pressure Gauges
Modular F.R.L. ⁄ Pressure Control Equipment
1. Modular F.R.L.
2. Regulators
3. Electro-Pneumatic Regulators
4. Proportional Valves
5. Booster Regulators
Lubrication Equipment
1. Lubrication Equipment
Fittings and Tubing
1. Fittings for General Purposes
2. Fittings for General Purposes(S Couplers/Multi-connectors)
3. Fittings for Special Environments
4. Fittings for Special Environments(Clean/Fluoropolymer)
5. Tubing
6. Tubing(Tubing for Special Environments)
7. Tubing(Fluoropolymer/Clean)
8. Related Products
Flow Control Equipment
Speed Controllers
1. Speed Controllers for General Purposes
2. Speed Controllers for Low Speed Control
3. Speed Controllers Special Environments
4. Speed Controllers with Special Functions
5. Tool Operation Type Speed Controllers
6. Air Saving Speed Controllers Air Saving Valves
7. Related Equipment
Silencers ⁄ Exhaust Cleaners ⁄ Blow Guns ⁄ Pressure Gauges
1. Silencers
2. Exhaust Cleaners
3. Blow Guns
4. Pressure Gauges
Switches ⁄ Sensors ⁄ Controller
1. Electronic Pressure Switches/Sensors (Self-contained Type)
2. Electronic Pressure Switches/Sensors (Remote Type)
3. Mechanical Pressure Switches
4. Electronic Flow Switches/Sensors
5. Mechanical Flow Switches
6. Controllers
Static Neutralization Equipment
1. Static Neutralization Equipment/Ionizers
Process Valves
1. 2/3 Port Solenoid Valves/Air Operated Valves
2. Compact 2/3 Port Solenoid Valves
3. 5.0 MPa 2/3 Port Solenoid Valves
4. 2/3 Port Valves for General Purpose Fluid Control
5. Coolant Valves
6. Valves for Water and Chemical Base Fluids
Chemical Liquid Valves ⁄ Fittings & Needle Valves ⁄ Tubing
1. Chemical Liquid Valves
2. Fittings/Needle Valves
3. Tubing
Process Pumps(Diaphragm Pumps)
1. Process Pumps
Temperature Control Equipment
1. Thermo-Chillers (Circulating Fluid Temperature Controllers)
2. Thermo-cons/Thermoelectric Baths (Peltier-Type Temperature Control Equipment)
3. Air Temperature Controllers
Process Gas Equipment
1. Process Gas Equipment
High Vacuum Equipment
1. High Vacuum Valves
2. Other
3. Slit Valves
4. Rodless Cylinders for Vacuum
Industrial Filters ⁄ Sintered Metal Elements
1. Industrial Filters
2. Sintered Metal Elements
Pneumatic Instrumentation Equipment
1. Positioners
2. Regulators
3. Relays/Valves
4. Electro-Pneumatic Transducers
5. Actuators
6. Detection Conversion Units
7. Solenoid Valves
8. Piping Materials
Hydraulic Equipment
1. Hydraulic Cylinders
2. Hydraulic Equipment

Subject ⁄ Industry Classified Products

Clean Gas Filters/Air Filters

Clean Gas Filter SF

	・Cartridge type allows for element replacement 　 (SFA100/200/300, SFB100) ・Compact, disposable type for the semiconductor industry 　(SFB300, SFC100)
	Product Number Check

Data Download CAD Manual PDF

Other Data	Safety Instructions　Air Preparation Equipment/Precautions Model Selection Guide/Quick Reference Guide　Green Procurement (RoHS)

Type	Series	Operating pressure	Filtration (μm)
Cartridge type disc	SFA100/200/300	Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa）	0.01 (Filtration efficiency: 99.99%)
Cartridge type straight	SFB100	Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa）	0.01 (Filtration efficiency: 99.99%)
Cartridge type straight	SFB200	Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa）	120
Disposable type straight	SFB300	Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa）	0.01 (Filtration efficiency: 99.99%)
Disposable type multiple disc	SFC100	Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa）	0.01 (Filtration efficiency: 99.99%)

Clean Gas FilterSF

Type	Series	Download
Cartridge type disc	SFA100/200/300
Cartridge type straight	SFB100
Cartridge type straight	SFB200
Disposable type straight	SFB300
Disposable type multiple disc	SFC100

Clean Air Filter/Hollow Fiber Element SFD

	・Built-in hollow fiber element ・Pressure drop: 0.03 MPa (Inlet pressure 0.7 MPa, Max. flow rate) ・Compliant with the RoHS Directives regulations regarding 　the reduction of environmentally detrimental chemicals
	Product Number Check

Data Download CAD Manual PDF

Other Data	Safety Instructions　Air Preparation Equipment/Precautions Model Selection Guide/Quick Reference Guide　Green Procurement (RoHS)

Series	Type	Operating pressure	Filtration (μm)
SFD100	Disposable type (Irreplaceable element)	Max.1.0MPa	0.01 (Filtration efficiency: 99.99%)
SFD200	Cartridge type (Replaceable element)	Max.1.0MPa	0.01 (Filtration efficiency: 99.99%)

Clean Air Filter/Hollow Fiber ElementSFD

Series	Type	Download
SFD100	Disposable type (Irreplaceable element)
SFD200	Cartridge type (Replaceable element)

Clean Air Module LLB

・Modularized clean equipment (Reduced piping labor/Space saving)
　Makes clean air easily available
・Nominal filtration rating: 0.01 μm (Filtration efficiency: 99.99%)
・Wetted parts: Grease-free, Silicone-free
・Assembled in a clean room, Shipped and packed in double packaging
・24 combinations are available.

　Note) Inlet air conditions ISO 8573-1 Quality grade: Equivalent to 1.4.1 to 1.6.1

Product Number Check

Data Download CAD Manual DoC PDF

Other Data	Safety Instructions　Air Preparation Equipment/Precautions Model Selection Guide/Quick Reference Guide　Green Procurement (RoHS)

Series	Fluid	Set pressure	Flow range L/min (ANR)
LLB3	Clean air N2 gas Note)	0.05 to 0.4 MPa	5 to 100
LLB4	Clean air N2 gas Note)	0.05 to 0.4 MPa	50 to 500

Clean Air ModuleLLB

Series	Download
LLB3
LLB4

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