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WEB Catalog
IN_PROD_561
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Clean Series/Low-Particle Generation
IN_PROD_569
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Clean Gas Filters/Air Filters
Clean Gas Filters/Air Filters
Clean Gas Filter SF
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・Cartridge type allows for element replacement
(SFA100/200/300, SFB100) ・Compact, disposable type for the semiconductor industry (SFB300, SFC100) |
Other Data |
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Type | Series | Operating pressure | Filtration (μm) |
---|---|---|---|
Cartridge type disc | SFA100/200/300 |
Max. 0.99 MPa (Vacuum: 1.3×10-6 kPa) |
0.01 (Filtration efficiency: 99.99%) |
Cartridge type straight | SFB100 |
Max. 0.99 MPa (Vacuum: 1.3×10-6 kPa) |
0.01 (Filtration efficiency: 99.99%) |
Cartridge type straight | SFB200 |
Max. 0.99 MPa (Vacuum: 1.3×10-6 kPa) |
120 |
Disposable type straight | SFB300 |
Max. 0.99 MPa (Vacuum: 1.3×10-6 kPa) |
0.01 (Filtration efficiency: 99.99%) |
Disposable type multiple disc | SFC100 |
Max. 0.99 MPa (Vacuum: 1.3×10-6 kPa) |
0.01 (Filtration efficiency: 99.99%) |
Clean Gas FilterSF
Type | Series | Download |
---|---|---|
Cartridge type disc | SFA100/200/300 |
|
Cartridge type straight | SFB100 |
|
Cartridge type straight | SFB200 |
|
Disposable type straight | SFB300 |
|
Disposable type multiple disc | SFC100 |
|
Clean Air Filter/Hollow Fiber Element SFD
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・Built-in hollow fiber element
・Pressure drop: 0.03 MPa (Inlet pressure 0.7 MPa, Max. flow rate) ・Compliant with the RoHS Directives regulations regarding the reduction of environmentally detrimental chemicals |
Other Data |
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Series | Type | Operating pressure | Filtration (μm) |
---|---|---|---|
SFD100 |
Disposable type (Irreplaceable element) |
Max.1.0MPa |
0.01 (Filtration efficiency: 99.99%) |
SFD200 |
Cartridge type (Replaceable element) |
Max.1.0MPa |
0.01 (Filtration efficiency: 99.99%) |
Clean Air Filter/Hollow Fiber ElementSFD
Series | Type | Download |
---|---|---|
SFD100 | Disposable type (Irreplaceable element) |
|
SFD200 | Cartridge type (Replaceable element) |
|
Clean Air Module LLB
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・Modularized clean equipment (Reduced piping labor/Space saving)
Makes clean air easily available ・Nominal filtration rating: 0.01 μm (Filtration efficiency: 99.99%) ・Wetted parts: Grease-free, Silicone-free ・Assembled in a clean room, Shipped and packed in double packaging ・24 combinations are available. Note) Inlet air conditions ISO 8573-1 Quality grade: Equivalent to 1.4.1 to 1.6.1 |
Other Data |
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Series | Fluid | Set pressure | Flow range L/min (ANR) |
---|---|---|---|
LLB3 |
Clean air N2 gas Note) |
0.05 to 0.4 MPa | 5 to 100 |
LLB4 |
Clean air N2 gas Note) |
0.05 to 0.4 MPa | 50 to 500 |
Clean Air ModuleLLB
Series | Download |
---|---|
LLB3 |
|
LLB4 |
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