・Stable supply of temperature and pressure controlled dry clean air
Can supply compressed air with the same conditions and quality regardless of
Supplying compressed air with constant conditions to air bearings mounted on
Nominal filtration: 0.01 μm (99.9% filtration efficiency)
Outlet oil mist concentration: Max. 0.01 mg/m3 (ANR)
Outlet cleanliness: Particles of 0.3 μm or more: 3.5 particles/L (ANR) or less
・Compatible with power supplies from around the world Single-phase 100, 200,
230 VAC (50/60 Hz)
|Series||Air flow capacity
|Outlet air set
|IDH□4||100 to 500||15 to 30℃||0.15 to 0.85 MPa||±0.1||
|IDH□6||200 to 800||15 to 30℃||0.15 to 0.85 MPa||±0.1||
Power failure auto-restart function
Even if operation is stopped by unexpected power failure, once the power supply is recovered, the operation will start automatically.
* If an instantaneous power failure occurs, the operation may restart after a few minutes.
Control temperature failure alarm
If the temperature exceeds the set temperature by an arbitrary amount, an error signal will be generated.
* At shipment, if the control temperature exceeds or goes under the set temperature by ±5ºC, an error signal will be generated.
Auto-tuning (A·T) function
The control set values (PID) are automatically set.
The set value is protected so it will not be changed even if keys are touched by mistake or setting is changed.