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Vacuum Angle Valve with Release Valve XLJ
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・Prevents the reverse flow of oil through the roughing pump (rotary pump) into the chamber
・Reduced piping labor due to the built-in release valve structure |
Other Data |
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Series | Actuation | Valve type |
Shaft seal system |
Flange size |
---|---|---|---|---|
XLJ | Electromagnetic | Normally closed/Vacuum pilot | O-ring seal | 25, 40 |
Vacuum Angle Valve with Release ValveXLJ
Series | Download |
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XLJ |
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