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High Vacuum Valves

Aluminum High Vacuum Angle Valve XL□

    ・High fluorine resistance
    ・Minimal outgassing
    ・Minimal contamination from heavy metals

    ∗ The XLA(V)/C/F(V)/G with flange sizes of 16 to 80 has been
     discontinued in September 2017.
     Please select the XLA(V)-2/XLC-2/XLF(V)-2/XLG-2 series.
SeriesActuationValve
type
Shaft seal
type
ApplicationFlange
size
XLAAir
operated
Single
acting
(N.C.)
Bellows sealDust-free
Cleaned
16 to 160
XLAV
(With solenoid valve)
Air
operated
Single
acting
(N.C.)
Bellows sealDust-free
Cleaned
16 to 160
XLCAir
operated
Double
acting
Bellows sealDust-free
Cleaned
16 to 160
XLCV
(With solenoid valve)
Air
operated
Double
acting
Bellows sealDust-free
Cleaned
16 to 80
XLFAir
operated
Single
acting
(N.C.)
O-ring sealHigh-speed operation
High operating cycles
16 to 160
XLFV
(With solenoid valve)
Air
operated
Single
acting
(N.C.)
O-ring sealHigh-speed operation
High operating cycles
16 to 160
XLGAir
operated
Double
acting
O-ring sealHigh-speed operation
High operating cycles
16 to 160
XLGV
(With solenoid valve)
Air
operated
Double
acting
O-ring sealHigh-speed operation
High operating cycles
16 to 80
XLDAir
operated
Single
acting
(N.C.)
Bellows/O-ring
seal
For preventing dust turbulence
For preventing a pump from
running overloaded
25 to 160
XLDV
(With solenoid valve)
Air
operated
Single
acting
(N.C.)
Bellows/O-ring
seal
For preventing dust turbulence
For preventing a pump from
running overloaded
25 to 160
XLHManualManualBellows sealDust-free
Cleaned
16 to 50
XLSElectromagneticSingle
acting
(N.C.)
(Bellows balance)For portable equipment not
requiring air
16, 25

Features

■Aluminum High Vacuum Angle Valve
■Aluminum bodied

Uniform baking temperature

Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve.


Lightweight, Compact

Large conductance, small body, excellent resistance against fluorine corrosion (body)

Low outgassing

Low outgassing makes it possible to use a lower capacity pump and also to shorten exhaust time.

Little heavy metal contamination

The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

■Possible to replace the bellows
(Bellows seal type)

Bellows assembly can be replaced which reduces maintenance costs and waste materials.

■A model with a solenoid valve has been added. New



■A heat-resistant 2-color indicator solid state auto switch is available for models with a heater. (Option) New

・Ambient temperature: Max. 150° C (Sensor)
・2-color indicator

■Heater is available for option.


For 100/120° C

■Auto switches are mountable from 4 directions.


■High Vacuum Angle Valve Series Variations

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