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Water-cooled Thermo-chiller/High-performance Type HRW

Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: DeviceNet Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance Type & Inverter Type
    ・Direct heat exchanger for in-plant circulating fluid
    ・Can control the temperature over a wide range since a compressor is not required.
    ・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
    ・Compliant with UL Standards, SEMI Standards, CE-marking
    ・It is possible to select the inverter type.
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling
method		Circulating fluid
HRW20 to 90℃2 kW, 8 kW, 15 kW, 30 kW±0.3℃Water-cooled type
(Without compressor)		Fluorinated, Tap water, Deionized water,
Ethylene glycol aqueous solution (60%)

Thermo-chiller Compact Dual/Basic Type for Lasers HRLE

Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Dual Channel Thermo chiller for Lasers
Features
    ・The temperatures of 2 fluid channel systems can be controlled individually by 1 chiller.
    ・Space saving, Reduced wiring
    　Footprint reduced by 21%
    　One power supply system for 2 channels
    ・Energy saving
    　Power consumption reduced by 17%
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling capacity
(CH1, 2 total)		Temperature
stability		Cooling methodCirculating fluid
HRLE050-ACH1:15 to 25℃
CH2:CH1
temperature
＋ 0 to 15℃		4.8kW/5.8k
(50Hz/60Hz)		CH1:±0.1
CH2:±0.5		Air-cooled
refrigeration		Tap water,
Deionized (pure) water
HRLE050-WCH1:15 to 25℃
CH2:CH1
temperature
＋ 0 to 15℃		4.8kW/5.8k
(50Hz/60Hz)		CH1:±0.1
CH2:±0.5		Water-cooled
refrigeration		Tap water,
Deionized (pure) water
HRLE090-ACH1:15 to 25℃
CH2:CH1
temperature
＋ 0 to 15℃		8.0 kW/9.5 kW
(50 Hz/60 Hz)		CH1: ±0.1
CH2: ±0.5		Air-cooled
refrigeration		Tap water,
Deionized (pure) water
HRLE090-WCH1: 9 kw,19 kW, 26 kW
CH2: 1.0 kW
(Max. 1.5 kW)		9.5 kW/11.0 kW
(50 Hz/60 Hz)		CH1: ±0.1
CH2: ±0.5		Water-cooled
refrigeration		Tap water,
Deionized (pure) water

Thermo-chiller/Inverter Type HRSH

Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Inverter Type
Features
    ・Complete with energy-saving triple inverter!
    ・Outdoor installation, Splashproof type (IPX4)
    ・Max. ambient temperature: 45℃
    ・Min. ambient temperature: –20℃ (For the air-cooled type)
    ・Temperature stability: ±0.1℃ (When a load is stable)
    ・Space saving and lightweight: 280 kg (25 kW type)
    ・Compliant with UL Standards, CE-marking
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Thermo-chiller/Inverter Type HRSH
    Manual
    Series View search result
    HRSHView search result
  • Thermo-chiller/Inverter Type HRSH
    DoC
    Series View search result
    HRSHView search result
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Can be used in a wide range of applications!
Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling methodCirculating fluid
HRSH5 to 35℃10 kW
15 kW
20 kW
25 kW
28 kW		±0.1℃Air-cooled refrigeration
Water-cooled refrigeration		Tap water
Deionized water
Ethylene glycol aqueous solution (15%)

Non-Metallic Pump/Double Acting Pump PAF

Process Pumps(Diaphragm Pumps) » Process Pumps
Fluoropolymer Equipment/PVC Equipment » Fluoropolymer Process Pumps
    ＊Tightening bolt, Air switching valve: Stainless steel
    　Use the PAF series standard products when a metal-free pump is necessary for hydrofluoric acid, etc.
Safety Instructions　Features/Series Variations　Made to Order Specifications/Maintenance Parts List
Related Products　Applicable Fluids　Product Specific Precautions
Green Procurement (RoHS)
SeriesActuationDischarge rate
(L/min)		Wetted parts material
PAF3410Automatically operated type1 to 20New PFA
(Fluororesin)
PAF3413Air operated type1 to 15New PFA
(Fluororesin)
PAF3410-X68Automatically operated type1 to 20New PFA
(Fluororesin)
PAF5410Automatically operated type5 to 45New PFA
(Fluororesin)
PAF5413Air operated type5 to 38New PFA
(Fluororesin)

Process Pump PA5000

Process Pumps(Diaphragm Pumps) » Process Pumps
Features
    ・Now with compact / energy saving / high-dispense-volume body material polypropylene (PP)!
    ・Compact: Height 185 mm x Width 134 mm x Depth 202 mm
    ・Lightweight: 3.0 kg (Polypropylene)
    ・Fluid contact body material:
    　Selectable from PP (polypropylene), aluminum or stainless steel
    ・Automatically operated type and air operated type are available.
    ・Self-priming makes priming unnecessary
Safety Instructions　Features/Series Variations　Related Products　Product Specific Precautions
Green Procurement (RoHS)
SeriesActuationDischarge rate
(L/min)		Wetted parts material
PA50□□Automatically operated
Air operated		63Polypropylene (PP)
PA51□□Automatically operated
Air operated		60Aluminum (ADC12)
PA52□□Automatically operated
Air operated		60Stainless steel (SCS14)

SUS316L Stainless Steel Fitting VCK

Process Valves » Valves for Water and Chemical Base Fluids
    ・Since sealing tape is not required, there is no need to worry about insulation.
    　(Applicable for painting with high voltage)
    ・Easy insertion/removal of piping in narrow spaces
Safety Instructions　2 Port Solenoid Valves for Fluid Control Precautions
Green Procurement (RoHS)
SeriesMaterial/DescriptionPort size
VCKStainless steel fitting
(316L SS)		G1/4

High Pressure Coolant Valve SGH

Process Valves » Coolant Valves
Features
    ・Max. operating pressure: 3 MPa, 7 MPa, 10 MPa [New], 14 MPa [New]
    ・Applicable to high-speed grinding and long drilling processes
    ・Coolant valve for high-pressure coolant liquid that is ideal for lubrication, dust blowing, and cooling
    ・Service life: 3 million cycles (Based on SMC's test conditions)
    ・Water hammer: Reduced by 20% (Compared to existing model, VNH series)
    ・Power consumption: 0.35 W (24 VDC, V116)
    ・The 3-port dual pressure type has been standardized.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • High Pressure Coolant Valve SGH
    DoC
    Series View search result
    SGHView search result
Safety Instructions　2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics　Series Variations/Process, Coolant Valves List
Green Procurement (RoHS)
SeriesValve typePort sizeOrifice diameter (mmø)
SGHN.C./N.O.3/8 to 17.5 to 15.9

Process Valve/2 Port Valve (2 Way Valve) for Fluid Control VNB

Process Valves » 2/3 Port Valves for General Purpose Fluid Control
    ・For controlling various fluids
    ・Can operate with a wide range of fluids, such as air, water, oil, gas, vacuum, etc., depending on the selected body and seal materials
    ・Air operated, external pilot solenoid
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Process Valve/2 Port Valve (2 Way Valve) for Fluid Control VNB
    Manual
    Series View search result
    VNBView search result
  • Process Valve/2 Port Valve (2 Way Valve) for Fluid Control VNB
    DoC
    Series View search result
    VNBView search result
Safety Instructions　2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics　Series Variations/Process, Coolant Valves List
Green Procurement (RoHS)
SeriesValve typePort sizeOrifice diameter (mmø)
VNBN.C./N.O./C.O.1/8 to 2
1 1/4B to 2B		7 to 50

Compact Direct Operated 3 Port Solenoid Valve (3 Way Valve) for Water and Air VDW

Process Valves » Compact 2/3 Port Solenoid Valves
    ∗ The production of the VDW10/20 series was discontinued
    　in December 2012. Please select the new VDW10/20 series.
    ∗ Excludes the VDW10/20 series manifold
    ∗ The production of the VDW30 series was discontinued
    　in July 2015. Please select the VX21 series.
    ∗ The production of the 3-port solenoid valve VDW200/300 series
    　is continued.
Safety Instructions　2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Technical Data　Series Variations/Solenoid Valves List
Green Procurement (RoHS)
SeriesValve typePort sizeOrifice diameter (mmø)
VDW200/300C.O.M5 to 1/4 (8A)1 to 4

Direct Operated 2 Port Solenoid Valve (2 Way Valve) VX2

Process Valves » 2/3 Port Solenoid Valves/Air Operated Valves
Features
    ・For air, medium vacuum, water, oil, steam (Can be used with heated water)
    ・Flow rate: 20% more flow＊
    ・Height: 10% smaller＊
    ・Weight: 30% lighter＊
    ・Body materials: Aluminum, Resin, C37, Stainless steel
    ・Available with One-touch fittings (Resin body)
    　＊Comparison made with SMC’s existing model
    ・Manifold type no.: VVX21, VVX22, VVX23
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Direct Operated 2 Port Solenoid Valve (2 Way Valve) VX2
    DoC
    Series View search result
    VX21/22/23View search result
Safety Instructions　2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics
Series Variations/Selection Procedure/Solenoid Valves List/Air Operated Valves List
Green Procurement (RoHS)
SeriesValve typePort sizeOrifice diameter (mmø)
VX21/22/23N.C./N.O.1/8 to 1/2
ø6 to ø12		2 to 10

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