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Aluminum High Vacuum Angle Valve XLA/C/F/G

High Vacuum Equipment » High Vacuum Valves
Features
    ・Aluminum bodied
    　Uniform baking temperature
    　Lightweight, Compact
    　Minimal outgassing
    　Minimal contamination from heavy metals
    ・Bellows are replaceable.
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesActuationValve
type		Shaft seal
type		ApplicationFlange
size
XLA-2Air
operated		Single
acting
(N.C.)		Bellows sealDust free,
Cleaned		16 to 80
XLAV-2
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		Bellows sealDust free,
Cleaned		16 to 80
XLC-2Air
operated		Double
acting		Bellows sealDust free,
Cleaned		16 to 80
XLF-2Air
operated		Single
acting
(N.C.)		O-ring sealHigh-speed operation,
High operating cycles		16 to 80
XLFV-2
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		O-ring sealHigh-speed operation,
High operating cycles		16 to 80
XLG -2Air
operated		Double
acting		O-ring sealHigh-speed operation,
High operating cycles		16 to 80

Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ

Process Gas Equipment » Process Gas Equipment
    ・For UHP gas delivery in semiconductor and other clean industries
    ・Body material: 316L SS secondary remelt or 316L SS
    ・Electropolished wetted parts
    ・External metal seal construction
Safety Instructions　Process Gas Equipment/Common Precautions　Series Variations　Valve and Regulator Recommendations　Technical Data/Glossary of Terms　Green Procurement (RoHS)
SeriesDescriptionTypeBody material
APFor Ultra High PuritySingle Stage Regulator316L SS secondary remelt
APFor Ultra High PurityTwo Stage Regulator316L SS secondary remelt
APFor Ultra High PurityPneumatic Actuation Pressure Regulator 316L SS secondary remelt
SLFor Ultra High PuritySingle Stage Regulator316L SS secondary remelt
AZFor Ultra High PuritySingle Stage RegulatorSUS316L
AZFor Ultra High PurityPneumatic Actuation Pressure Regulator SUS316L
AKFor General ApplicationsSingle Stage RegulatorSUS316
AKFor General ApplicationsTwo Stage RegulatorSUS316
AKFor General ApplicationsPneumatic Actuation Pressure Regulator SUS316
BPFor Ultra High PurityBack Pressure RegulatorSUS316
BPFor General Applications·Back Pressure RegulatorSUS316

Peltier-Type Thermo-con/Rack Mount Type 
HECR

Temperature Control Equipment » Thermo-cons/Thermoelectric Baths (Peltier-Type Temperature Control Equipment)
Features
    ・Good space utilization: Mountable in a 19-inch rack
    　Saves space by allowing multiple pieces of equipment to be mounted
    　together in a rack.
    ・Temperature stability: ±0.01℃ to 0.03℃
    ・Set temperature range: 10℃ to 60℃
    ・Cooling capacity: 200 W, 400 W, 510 W, 800 W, 1 kW, 1.2 kW
    ・Power consumption: 200 W, 300 W, 400 W
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling
method
HECR002-A10 to 60℃200 W±0.01 to 0.03℃Peltier-type air-cooled
HECR004-A10 to 60℃400 W±0.01 to 0.03℃Peltier-type air-cooled
HECR006-A10 to 60℃510 W±0.01 to 0.03℃Peltier-type air-cooled
HECR006L-A10 to 60℃510 W±0.01 to 0.03℃Peltier-type air-cooled
HECR008-A10 to 60℃800 W±0.01 to 0.03℃Peltier-type air-cooled
HECR010-A10 to 60℃1 kW±0.01 to 0.03℃Peltier-type air-cooled
HECR008-W10 to 60℃800 W±0.01 to 0.03℃Peltier-type water-cooled
HECR012-W10 to 60℃1.2 kW±0.01 to 0.03℃Peltier-type water-cooled

EU F-Gas Regulation-compliant Refrigerated Thermo-chiller HRZ-F

Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance Type & Inverter Type
Features
    ・More effective energy-saving is achieved through use of a DC inverter compressor and an inverter pump.
    ・Energy saving
    　The inverter controls the number of motor rotations of the compressor and pump according to the load from the user’s application.
    　Power consumption: Max. 65% reduction
    　Facility water: Max. 67% reduction
    ・High performance
    　Temperature stability: ±0.1°C (When a load is stable)
    　Cooling time: Max. 46% reduction (SMC comparison)
    ・Refrigerant: R410A (HFC)/R448A (HFC/HFO)
  • EU F-Gas Regulation-compliant Refrigerated Thermo-chiller HRZ-F
    Manual
    Series View search result
    HRZ-FView search result
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling
method		Circulating fluid
HRZ-F-20 to 40℃
10 to 60℃
-20 to 90℃		2 kW, 4 kW, 8 kW, 10 kW±0.1℃Water-cooled
refrigeration		Fluorinated fluids
Ethylene glycol aqueous solution
Tap water/Deionized water

Thermo-chiller/Rack Mount Type HRR

Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Rack Mount Type
Features
    ・Operable without the need to remove the unit from the rack
    　Front access: Simple to control, service, and maintain with all filters and drainage accessible via the front panel
    ・Space saving: Multiple chillers can be mounted to a 19-inch rack.
    ・Cooling capacity: 1.1/1.2/1.8/2.4/3.0/5.1 kW (60 Hz)
    ・Temperature stability: ±0.1℃
    ・Global power supply:
    　Single-phase 100 VAC (50/60 Hz)/115 VAC (60 Hz)
    　Single-phase 200 to 230 VAC (50/60 Hz)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Thermo-chiller/Rack Mount Type HRR
    Manual
    Series View search result
    HRRView search result
  • Thermo-chiller/Rack Mount Type HRR
    DoC/IM
    Series View search result
    HRRView search result
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling methodCirculating fluid
HRR5 to 35℃
15 to 35℃		1.1 kW
1.2 kW
1.8 kW
2.4 kW
3.0 kW
5.1 kW		±0.1℃Air-cooled refrigeration
Water-cooled refrigeration		Tap water
Ethylene glycol aqueous solution (15%)

Thermo-chiller/Dual Channel Thermo-chiller for Lasers HRL

Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Dual Channel Thermo chiller for Lasers
Features
    ・Temperatures for 2 fluid channel systems can be controlled individually
    　by one chiller.
    ・Space saving, Reduced wiring
    　Footprint: 22% reduction
    　One power supply system for 2 channels
    ・Energy saving
    　Power consumption reduced by 30%
    ・Touch panel
    ・Power supply:
    　3-phase 200 VAC (50 Hz)
    　3-phase 200 to 230 VAC (60 Hz)
    　3-phase 380 to 415 VAC (50/60 Hz)
    　3-phase 460 to 480 VAC (60 Hz)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Thermo-chiller/Dual Channel Thermo-chiller for Lasers HRL
    Manual
    Series Cooling capacity View search result
    HRL100CH1:9 kw, CH2: 1.0 kW (Max. 5.0 kW)View search result
    HRL200CH1:9 kw, CH2: 1.0 kW (Max. 5.0 kW)View search result
    HRL300CH1:26 kw, CH2: 1.0 kW (Max. 5.0 kW)View search result
    HRL400CH1:26 kw, CH2: 1.0 kW (Max. 5.0 kW)View search result
  • Thermo-chiller/Dual Channel Thermo-chiller for Lasers HRL
    DoC/IM
    Series Cooling capacity View search result
    HRL100CH1:9 kw, CH2: 1.0 kW (Max. 5.0 kW)View search result
    HRL200CH1:9 kw, CH2: 1.0 kW (Max. 5.0 kW)View search result
    HRL300CH1:26 kw, CH2: 1.0 kW (Max. 5.0 kW)View search result
    HRL400CH1:26 kw, CH2: 1.0 kW (Max. 5.0 kW)View search result
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Can be used in a wide range of applications!
Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature rangeCooling capacityTemperature stabilityCooling methodCirculating fluid
HRL100CH1: 15 to 35℃ CH2: 10 to 40℃CH1:9 kw, CH2: 1.0 kW (Max. 5.0 kW)CH1:±0.1, CH2:±0.5Air-cooled refrigeration, Water-cooled refrigerationTap water, Deionized water
HRL200CH1: 15 to 35℃ CH2: 10 to 40℃CH1:9 kw, CH2: 1.0 kW (Max. 5.0 kW)CH1:±0.1, CH2:±0.5Air-cooled refrigeration, Water-cooled refrigerationTap water, Deionized water
HRL300CH1: 15 to 35℃ CH2: 10 to 40℃CH1:26 kw, CH2: 1.0 kW (Max. 5.0 kW)CH1:±0.1, CH2:±0.5Air-cooled refrigerationTap water, Deionized water
HRL400CH1: 15 to 35℃ CH2: 10 to 40℃CH1:26 kw, CH2: 1.0 kW (Max. 5.0 kW)CH1:±0.1, CH2:±0.5Air-cooled refrigerationTap water, Deionized water

Thermo-chiller/Inverter Type HRSH090

Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Inverter Type
Features
    ・Power consumption reduced by 53%
    　Complete with energy-saving triple inverter!
    ・Cooling capacity: 9.5 kW (Air-cooled), 11.0 kW (Water-cooled)
    ・Temperature stability: ±0.1°C
    ・Set temperature range: 5°C to 40°C
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Thermo-chiller/Inverter Type HRSH090
    Manual
    Series View search result
    HRSH090View search result
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Can be used in a wide range of applications!
Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling methodCirculating fluid
HRSH0905 to 40℃9.5 kW±0.1℃Air-cooled refrigeration
Water-cooled refrigeration		Tap water
Deionized water
Ethylene glycol aqueous solution (15%)

Thermo-chiller/Standard Type HRS

Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
Features
    ・With this chiller, cooling water can be obtained anywhere it is necessary because of easy installation and easy operation.
    ・For a wide range of applications, such as laser machine tools, analytical equipment,
    　LCD manufacturing equipment, mold temperature control, etc.
    ・Compact: W 377 x H 615 x D 500 mm, 40 kg (HRS012/018/024)
    ・Timer function, Low liquid level protection, Power failure auto-restart,
    　Anti-freezing function, etc.
    ・Self diagnosis function
    ・Ideal for overseas models (Single-phase 200 to 230 VAC, Single-phase 100, 115 VAC)
    ・Compliant with UL Standards, CE-marking
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Thermo-chiller/Standard Type HRS
    Manual
    Series View search result
    HRS012 to 060View search result
  • Thermo-chiller/Standard Type HRS
    DoC/IM
    Series View search result
    HRS012 to 060View search result
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Can be used in a wide range of applications!
Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling methodCirculating fluid
HRS012 to 0605 to 40℃1.3 kW
1.9 kW
2.4 kW
3.2 kW
4.2 kW
5.1 kW
5.9 kW
（60 Hz）		±0.1℃Air-cooled refrigeration
Water-cooled refrigeration		Tap water
Deionized water
Ethylene glycol aqueous solution （15％）

Process Pump/Single Acting Pump PB

Process Pumps(Diaphragm Pumps) » Process Pumps
Fluoropolymer Equipment/PVC Equipment » Fluoropolymer Process Pumps
Safety Instructions　Series Variations　Related Products　Applicable Fluids　Product Specific Precautions　Green Procurement (RoHS)
SeriesActuationDischarge rate
(mL/min)		Wetted parts material
PB1011ABuilt-in solenoid valve8 to 2000Polypropylene Stainless Steel 316
PB1013AAir operated type8 to 1000Polypropylene Stainless Steel 316
PB1313AAir operated type8 to 1000New PFA
(Fluororesin)

Process Pump/Double Acting Pump PA/PAX

Process Pumps(Diaphragm Pumps) » Process Pumps
Safety Instructions　Series Variations　Related Products　Applicable Fluids　Product Specific Precautions　Green Procurement (RoHS)
SeriesActuationDischarge rate
(L/min)		Wetted parts material
PA3□□0Automatically operated type1 to 20ADC12 (Aluminum)
SCS14 (Stainless steel)
PA3□13Air operated type0.1 to 12ADC12 (Aluminum)
SCS14 (Stainless steel)
PAX1□12Automatically operated type
Built-in pulsation attenuator		0.5 to 10ADC12 (Aluminum)
SCS14(Stainless steel)

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