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P Cylinder (Cylinder with Positioner) CPA2/CPS1
Pneumatic Instrumentation Equipment » Actuators
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・Cylinder positioning in proportion to the input signal (air pressure) is possible.
・Correction operation function: Returns to the initial setting position even when the position deviates due to load variations
| Series | Bore size | Stroke (mm) | Air connection port | Supply pressure (MPa) | Input pressure (MPa) |
|---|---|---|---|---|---|
| CPA2 | φ50 to 100 | 25 to 300 | Rc1/4 female thread | 0.3 to 0.7 | 0.02 to 0.1 |
| CPS1 | φ125 to 300 | 30 to 300 | Rc1/4 female thread | 0.3 to 0.7 | 0.02 to 0.1 |
Electro-Pneumatic Transducer IT600/601
Pneumatic Instrumentation Equipment » Electro-Pneumatic Transducers
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・Air pressure in proportion to the current signal can be output.
・Wide output pressure range: 0.02 to 0.6 MPa
・Fast response
・Independent electric unit/Explosion-proof (flameproof) construction
・Easy span adjustment
| Series | Port size | Supply air pressure (MPa) | Input current |
|---|---|---|---|
| IT600 | Rc1/4 | 0.14 to 0.24 | 4 to 20 mA DC |
| IT601 | Rc1/4 | 0.24 to 0.7 | 4 to 20 mA DC |
Booster Relay IL100/XT240
Pneumatic Instrumentation Equipment » Relays/Valves
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・Used when the piping distance between the instrumentation and operational area is long, or when the operational area has a large capacity
・Can help accelerate actuation speed considerably
| Series | Port size | Pressure ratio | Input/Output pressure |
|---|---|---|---|
| IL100 | Rc1/4, 3/8 | 1：1 | 0.7 MPa |
| XT240 | Rc. NPT 1/4 (SIG), 1 (SUP. OUT) | 1：1 | 0.7 MPa |
Filter Regulator 1301/IW
Pneumatic Instrumentation Equipment » Regulators
| Series | Port size | Set pressure (MPa) | Filtration accuracy (μm) |
|---|---|---|---|
| IW | Rc1/4 | 0.02 to 0.2 0.02 to 0.3 0.02 to 0.5 | 5 |
| 1301 | Rc1/4 | 0.02 to 0.2 0.02 to 0.29 0.02 to 0.49 | 5 |
Electro-Pneumatic Positioner/Smart Positioner IP8□00/IP8□01
Pneumatic Instrumentation Equipment » Positioners
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・Enclosure: JISF8007 IP65 (Compliant with IEC 60529)
・Monitoring function
・Explosion-proof construction
・Electro-pneumatic positioner:
TIIS explosion-proof construction (Exd II BT5)
ATEX intrinsically safe explosion-proof construction
(II 2G Ex h ib II CT5/T6 Gb)
・Smart positioner:
ATEX intrinsically safe explosion-proof construction
(II 1G Ex h ia II CT4/T5/T6 Ga)
・HART transmission function (Smart positioner)
| Description | Series | Type | Port size (Rc, NPT, G) | Supply air pressure (MPa) | Input current |
|---|---|---|---|---|---|
| Electro-pneumatic positioner | IP8000 | Lever type | 1/4 | 0.14 to 0.7 | 4 to 20 mA DC |
| Electro-pneumatic positioner | IP8100 | Rotary type | 1/4 | 0.14 to 0.7 | 4 to 20 mA DC |
| Smart positioner | IP8001 | Lever type | 1/4 | 0.14 to 0.7 | 4 to 20 mA DC |
| Smart positioner | IP8101 | Rotary type | 1/4 | 0.3 to 0.7 | 4 to 20 mA DC |
Sintered Metal Element EB/ES
Industrial Filters/Sintered Metal Elements » Sintered Metal Elements
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・Large mechanical strength and withstand pressure, Anti-corrosive
・Mechanical process, caulking, brazing, soldering, welding, and simultaneous sintering are possible.
・Can be cleaned and reused
| Series | Material | Nominal filtration accuracy |
|---|---|---|
| EB | Bronze | (1)＊, 2, 5, 10, 20, 40, 70, 100, 120 μm ＊( ): Semi-standard |
| ES | Stainless steel | (1)＊, 2, 5, 10, 20, 40, 70, 100, 120 μm ＊( ): Semi-standard |
Industrial Filter/Vessel Series FGD
Industrial Filters/Sintered Metal Elements » Industrial Filters
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・Ideal for low-flow filtration (Max. 60 L/min)
・It is possible to select the antistatic specification (FGDE, FGDF).
| Series | Port size | Max. operating pressure | Operating temperature (℃) |
|---|---|---|---|
| FGD | Rc3/8，1/2，3/4 | 0.7, 1 MPa | MAX. 80 |
Rodless Cylinder for Vacuum CYV
High Vacuum Equipment » Rodless Cylinders for Vacuum
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・Air cylinder for transfer in vacuum environments (1.3 x 10-4 Pa)
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Green Procurement (RoHS)
| Series | Operating environment pressure [Pa (ABS)] | Bore size (mm) |
|---|---|---|
| CYV | Atmosphere to 1.3 x 10-4 | 15, 32 |
For 300 mm Wafer: Parallel Seal Type Slit Valve XGTP
High Vacuum Equipment » Slit Valves
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・Long service life: 3 million cycles (within standard temperature range)
・Low particle generation: Reduced by 1/5 or more
(compared with the existing product)
・Easier maintenance
Easy replacement of bellows
Gate can be replaced from above. (Made to order)
・Safety measures
A mechanical end lock mechanism has been adopted.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Green Procurement (RoHS)
| Series | Operating environmental pressure (Pa)(abs) | Fluid | Opening window size (Height x Width) (mm) | Operating pressure (MPa)(G) |
|---|---|---|---|---|
| XGTP | Atmospheric pressure to 10-6 | Inert gas | 50 x 336 | 0.45 to 0.6 |
Vacuum Angle Valve with Release Valve XLJ
High Vacuum Equipment » Other
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・Prevents the reverse flow of oil through the roughing pump (rotary pump) into the chamber
・Reduced piping labor due to the built-in release valve structure
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Green Procurement (RoHS)
| Series | Actuation | Valve type | Shaft seal type | Flange size |
|---|---|---|---|---|
| XLJ | Electromagnetic | Normally closed/Vacuum pilot | O-ring seal | 25, 40 |
