Temperature Control Equipment » Thermo-Chiller (Circulating Fluid Temperature Controller) - Product List
- Select from Temperature Range
- Select from Cooling Capacity and Temperature Stability
- Convenient Functions
Thermo-chiller/High-performance Inverter Type HRZ
・In addition to the state-of-the-art functions of the HRZ series,
these models employ a DC inverter compressor to achieve better energy
・A wide temperature range and cooling capacity range are covered by one unit.
・Suited to the short innovation cycle of semiconductor equipment,
Capable of responding flexibly to changes in the process conditions
・Compliant with UL Standards, SEMI Standards, CE-marking
∗ The HRZ series will be remodeled in December 2022.
Please select the HRZ-F series.
−20 to 90℃
10 to 60℃
Fluorinated, Tap water, Deionized water,
Ethylene glycol aqueous solution (60%)
Thermo-chiller/High-performance Inverter TypeHRZ