Temperature Control Equipment » Thermo-Chiller (Circulating Fluid Temperature Controller) - Product List
- Select from Temperature Range
- Select from Cooling Capacity and Temperature Stability
- Convenient Functions
Water-cooled Thermo-chiller/High-performance Type HRW
・Direct heat exchanger for in-plant circulating fluid
・Can control the temperature over a wide range since a compressor is not required.
・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
・Compliant with UL Standards, SEMI Standards, CE-marking
・It is possible to select the inverter type.
|HRW||20 to 90℃||2 kW, 8 kW, 15 kW, 30 kW||±0.3℃||Water-cooled type|
|Fluorinated, Tap water, Deionized water, |
Ethylene glycol aqueous solution (60%)