Temperature Control Equipment » Thermo-Chiller (Circulating Fluid Temperature Controller) - Product List
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- Select from Cooling Capacity and Temperature Stability
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Thermo-chiller/High-performance Type HRZ
・Suitable for semiconductor processing equipment with a wide variety of features,
such as high-temperature stability, a wide temperature range, failure diagnosis,
external communication, etc.
・Compliant with various safety standards
・Compliant with UL Standards, SEMI Standards, CE-marking
∗ The HRZ series will be remodeled in December 2022.
Please select the HRZ-F series.
-20 to 40℃
20 to 90℃
-20 to 90℃
|1 kW, 2 kW, 4 kW, 8 kW||±0.1℃||
Fluorinated, Tap water, Deionized water,
Ethylene glycol aqueous solution (60%)