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Temperature Control Equipment
Temperature Control Equipment » Thermo-Chiller (Circulating Fluid Temperature Controller) - Product List
- Select from Temperature Range
- Select from Cooling Capacity and Temperature Stability
- Convenient Functions
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Dual Thermo-chiller/High-performance Inverter Type HRZD
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・Temperatures for 2 systems can be controlled separately by one chiller.
・Double inverter type: Substantially more energy is saved by using a DC inverter refrigerator and inverter pump. ・Space saving: Footprint reduced by 23% ・Reduced wiring, piping, and labor: Single power cable, Single facility-water piping system ・Compliant with SEMI Standards, CE-marking |
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| Other Data |
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| Series | Set temperature range |
Cooling capacity |
Temperature stability |
Cooling method |
Circulating liquid |
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| HRZD | −30 to 90℃ | 9.5 kW x 2 | ±0.1℃ |
Water-cooled refrigeration |
Fluorinated liquid, Ethylene glycol aqueous solution (60%) |
Dual Thermo-chiller/High-performance Inverter TypeHRZD
| Series | Download |
|---|---|
| HRZD |
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