Temperature Control Equipment » Thermo-Chiller (Circulating Fluid Temperature Controller) - Product List
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Dual Thermo-chiller/High-performance Inverter Type HRZD
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・Temperatures for 2 systems can be controlled separately by one chiller.
・Double inverter type: Substantially more energy is saved by using a DC inverter refrigerator and inverter pump.
・Space saving: Footprint reduced by 23%
・Reduced wiring, piping, and labor: Single power cable, Single facility-water piping system
・Compliant with SEMI Standards, CE-marking
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRZD | −30 to 90℃ | 9.5 kW x 2 | ±0.1℃ | Water-cooled refrigeration | Fluorinated, Ethylene glycol aqueous solution (60%) |
