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Rotary Actuator 10-/21-CRB1

Clean Series/Low-Particle Generation » Rotary Actuators
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Rotary Actuator Applicable Auto Switch List
Features/Basic Specifications/Clean Series Precautions
Rotary actuators precautions　Auto Switches/Precautions　Green Procurement (RoHS)
SeriesVane typeSizeRotating angle
Single		Rotating angle
Double
10-CRB1Single, Double10, 15, 20, 3090°, 180°, 270°90°, 100°
21-CRB1Single, Double10, 15, 20, 3090°, 180°, 270°90°, 100°

Air Cylinder 10-/11-/21-/22-CJ2-Z

Clean Series/Low-Particle Generation » Air Cylinders

    Clean Series

  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Applicable Auto Switch List
Features/Basic Specifications/Clean Series Precautions
Actuators/Precautions　Auto Switches/Precautions　Green Procurement (RoHS)
TypeSeriesActionBore size (mm)
Standard10-/11-/21-/22-CJ2Double acting, Single rod6
Standard10-/11-/21-/22-CJ2-ZDouble acting, Single rod10，16
Standard10-/11-/21-/22-CJ2W-ZDouble acting, Double rod10，16
Direct mount10-/11-/21-/22-CJ2RA-ZDouble acting, Single rod10，16

5 Port Solenoid Valve 10-SY

Clean Series/Low-Particle Generation » Directional Control Valves

    Clean Series



    ＊The EX510 series is to be discontinued. When designing new equipment
    　and facilities, consider using another series (EX260/EX600) instead.
Safety Instructions　Features/Basic Specifications/Clean Series Precautions
3/4/5 Port Solenoid Valves/Precautions　Green Procurement (RoHS)
SeriesSonic conductance: CCylinder sizePower consumptio (W)
10-SY30001.1dm3(s・bar)φ400.35
10-SY50002.8dm3(s・bar)φ630.35
10-SY70004.5dm3(s・bar)φ800.35
10-SY900010dm3(s・bar)φ1000.35

NAMUR Interface 3-Port Solenoid Valve VFN200N

Pneumatic Instrumentation Equipment » Solenoid Valves
    ・The interface surface is compliant with NAMUR Standards.
    　Can be directly installed on industrial valve actuators that comply with NAMUR
  • NAMUR Interface 3-Port Solenoid Valve VFN200N
    DoC/IM
    Series View search result
    VFN200NView search result
Safety Instructions　Automation Example　Specific Product Precautions　Green Procurement (RoHS)
SeriesFlow rate characteristics
4/2→5/3（A/B→EA/EB）
C		Flow rate characteristics
4/2→5/3（A/B→EA/EB）
b		Flow rate characteristics
4/2→5/3（A/B→EA/EB）
Cv		Power consumption (W)
VFN200N5.410.311.381.8

Electro-Pneumatic Transducer IT600/601

Pneumatic Instrumentation Equipment » Electro-Pneumatic Transducers
    ・Air pressure in proportion to the current signal can be output.
    ・Wide output pressure range: 0.02 to 0.6 MPa
    ・Fast response
    ・Independent electric unit/Explosion-proof (flameproof) construction
    ・Easy span adjustment
Safety Instructions　Automation Example　Green Procurement (RoHS)
SeriesPort sizeSupply air pressure (MPa)Input current
IT600Rc1/40.14 to 0.244 to 20 mA DC
IT601Rc1/40.24 to 0.74 to 20 mA DC

Booster Relay IL100/XT240

Pneumatic Instrumentation Equipment » Relays/Valves
Features
    ・Used when the piping distance between the instrumentation and operational area is long, or when the operational area has a large capacity
    ・Can help accelerate actuation speed considerably
  • Booster Relay IL100/XT240
    Manual
    Series View search result
    IL100View search result
    XT240
Safety Instructions　Automation Example　Green Procurement (RoHS)
SeriesPort sizePressure ratioInput/Output pressure
IL100Rc1/4, 3/81：10.7 MPa
XT240Rc. NPT 1/4 (SIG), 1 (SUP. OUT)1：10.7 MPa

Industrial Filter/Vessel Series FGD

Industrial Filters/Sintered Metal Elements » Industrial Filters
    ・Ideal for low-flow filtration (Max. 60 L/min)
    ・It is possible to select the antistatic specification (FGDE, FGDF).
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Industrial Filter/Vessel Series FGD
    Manual
    Series View search result
    FGDView search result
Safety Instructions　Industrial Filters/Precautions　Selection　Green Procurement (RoHS)
SeriesPort sizeMax. operating pressureOperating temperature (℃)
FGDRc3/8，1/2，3/40.7, 1 MPaMAX. 80

Rodless Cylinder for Vacuum CYV

High Vacuum Equipment » Rodless Cylinders for Vacuum
Equipment for the Semiconductor Industries » Slit Valve/Transfer
    ・Air cylinder for transfer in vacuum environments (1.3 x 10-4 Pa)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Rodless Cylinder for Vacuum CYV
    Manual
    Series Bore size (mm) View search result
    CYV15, 32View search result
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Green Procurement (RoHS)
SeriesOperating environment pressure
[Pa (ABS)]		Bore size (mm)
CYVAtmosphere to 1.3 x 10-415, 32

For 300 mm Wafer: Parallel Seal Type Slit Valve XGTP

High Vacuum Equipment » Slit Valves
Equipment for the Semiconductor Industries » Slit Valve/Transfer
Features
    ・Long service life: 3 million cycles (within standard temperature range)
    ・Low particle generation: Reduced by 1/5 or more
    　(compared with the existing product)
    ・Easier maintenance
    　Easy replacement of bellows
    　Gate can be replaced from above. (Made to order)
    ・Safety measures
    　A mechanical end lock mechanism has been adopted.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • For 300 mm Wafer: Parallel Seal Type Slit Valve XGTP
    Manual
    Series View search result
    XGTPView search result
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Green Procurement (RoHS)
SeriesOperating environmental
pressure (Pa)(abs)		FluidOpening window size
(Height x Width)
(mm)		Operating
pressure
(MPa)(G)
XGTPAtmospheric pressure
to 10-6		Inert gas50 x 3360.45 to 0.6

Aluminum High Vacuum Angle Valve XLA/C/F/G

High Vacuum Equipment » High Vacuum Valves
Equipment for the Semiconductor Industries » Exhaust Line
Features
    ・Aluminum bodied
    　Uniform baking temperature
    　Lightweight, Compact
    　Minimal outgassing
    　Minimal contamination from heavy metals
    ・Bellows are replaceable.
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesActuationValve
type		Shaft seal
type		ApplicationFlange
size
XLA-2Air
operated		Single
acting
(N.C.)		Bellows sealDust free,
Cleaned		16 to 80
XLAV-2
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		Bellows sealDust free,
Cleaned		16 to 80
XLC-2Air
operated		Double
acting		Bellows sealDust free,
Cleaned		16 to 80
XLF-2Air
operated		Single
acting
(N.C.)		O-ring sealHigh-speed operation,
High operating cycles		16 to 80
XLFV-2
(With solenoid valve)		Air
operated		Single
acting
(N.C.)		O-ring sealHigh-speed operation,
High operating cycles		16 to 80
XLG -2Air
operated		Double
acting		O-ring sealHigh-speed operation,
High operating cycles		16 to 80

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