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Stainless Steel High Vacuum Angle/In-line Valve XM/XY

High Vacuum Equipment » High Vacuum Valves
Equipment for the Semiconductor Industries » Exhaust Line
Equipment for the Semiconductor Industries » N2 Gas/Air Supply Line
    ・The precision casting, unified composition prevents the accumulation of gas.
    ・The XM series is interchangeable with the XL series aluminum high vacuum angle valve.

    Note) Size 16 is not available for the in-line type.
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesActuationShaft seal
type		Valve
type		MaterialFlange
size
XMA/XYAAir operatedBellows sealSingle acting
(N.C.)		Body : SCS13 (Equivalent to
stainless steel 304)
Bellows : Stainless steel 316L		16 to 80 Note)
XMC/XYCAir operatedBellows sealDouble actingBody : SCS13 (Eequivalent to
stainless steel 304)
Bellows : Stainless steel 316L		16 to 80 Note)
XMD/XYDAir operatedBellows/O-ring
seal		Single acting
(N.C.)		Body : SCS13 (Equivalent to
stainless steel 304)
Bellows : Stainless steel 316L		25 to 80
XMH/XYHManualBellows sealManualBody : SCS13 (Equivalent to
stainless steel 304)
Bellows : Stainless steel 316L		16 to 50 Note)

Check Valve/Vacuum Generator/Flow Switch AP

Process Gas Equipment　AP Tech » Process Gas Equipment
Equipment for the Semiconductor Industries » N2 Gas/Air Supply Line
    [Check valve]
    ・Fluid backflow is prevented by back pressure.
    ・Unique design with only one moving part in the gas stream, an O-ring
    ・Springless structure suppresses particle generation by vibration or chattering and pressure fluctuations on the downstream side

    [Vacuum generator]
    ・Vacuum generation equipment
    ・Applicable to the exhaustion of unnecessary gas remaining inside the piping during gas cylinder replacement

    [Flow switch]
    ・Detects excess flow above a given flow rate caused by pipe breakage, etc.
Safety Instructions　Process Gas Equipment/Common Precautions　Series Variations　Valve and Regulator Recommendations　Technical Data/Glossary of Terms　Green Procurement (RoHS)
SeriesTypeBody material
APCheck Valve316L SS secondary remelt
APVacuum Generators316L SS secondary remelt
APFlow Switches316L SS secondary remelt

Peltier-Type Thermoelectric Bath HEB

Temperature Control Equipment » Thermo-cons/Thermoelectric Baths (Peltier-Type Temperature Control Equipment)
Equipment for the Semiconductor Industries (Temperature Adjustment Line) » Thermo-cons/Thermoelectric Baths (Peltier-Type Temperature Control Equipment)
Temperature Adjustment Line » Thermo-cons/Thermoelectric Baths (Peltier-Type Temperature Control Equipment)
    ・High-precision temperature control bath that uses a Peltier device
    ・Compact and low noise
    ・Minimal up-down temperature distribution by a unique agitation method
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Peltier-Type Thermoelectric Bath HEB
    Manual
    Series View search result
    HEBView search result
  • Peltier-Type Thermoelectric Bath HEB
    DoC/IM
    Series View search result
    HEBView search result
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature rangeCooling
capacity		Temperature
stability		Cooling methodCirculating fluid
HEB−15 to 60℃140 W, 280 W0.01℃Round type Peltier-type water-cooledTap water,
Fluorinated fluid

Thermo-chiller/Standard Type HRS100/150

Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
Temperature Adjustment Line » Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
Equipment for the Semiconductor Industries (Temperature Adjustment Line) » Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
Features
    ・No heater is required, as the circulating fluid is heated using only the heat exhausted by the refrigerating circuit.
    ・Compatible with power supplies in Europe, Asia, Oceania, North, Central, and South America
    ・Low-noise design: 70 dB (A)
    ・Outdoor installation: IPX4
    ・Compact, Space saving
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Can be used in a wide range of applications!
Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling methodCirculating fluid
HRS100
HRS150		5 to 35℃9.5 kW
14.5 kW
(60 Hz)		±1.0℃Air-cooled refrigeration
Water-cooled refrigeration		Tap water
Deionized water
Ethylene glycol aqueous solution (15%)

Low Profile 2/3-Port Solenoid Valve SX90/090

Process Valves » Compact 2/3 Port Solenoid Valves
Features
    ・Compact
    　Overall length: Approx. 38 mm (2-port), 54 mm (3-port)
    　Valve width/height: 10 mm
    　Weight: 10 g (2-port), 20 g (3-port)
    ・Large flow rate
    　C [dm3/(s·bar)]: 0.25 (2-port), 0.5 (3-port)
    　Flow rate [L/min (ANR)]: 45 (2-port), 90 (3-port) (At 0.2 MPa)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Low Profile 2/3-Port Solenoid Valve SX90/090
    DoC/IM
    Series View search result
    SX91
    SX92
    SX090View search result
Safety Instructions　Green Procurement (RoHS)
SeriesValve constructionC［dm3/（s·bar）］Flow rate [L/min (ANR)]
at 0.2 MPa		Type of actuation
SX912-port
direct operated poppet valve		0.2545Normally closed
SX922-port
direct operated poppet valve		0.1222Universal
SX0903-port
direct operated poppet valve		0.590Universal

Zero Differential Pressure Type/Pilot Operated 2 Port Solenoid Valve (2 Way Valve) VXZ

Process Valves » 2/3 Port Solenoid Valves/Air Operated Valves
Features
    ・For air, water, oil, heated water, high-temperature oil
    ・Body materials: Aluminum, Resin, C37, Stainless steel
    ・A type with One-touch fittings (Resin body) is available.
    ・IP65
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Zero Differential Pressure Type/Pilot Operated 2 Port Solenoid Valve (2 Way Valve) VXZ
    DoC/IM
    Series View search result
    VXZView search result
Safety Instructions　2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics
Series Variations/Selection Procedure/Solenoid Valves List/Air Operated Valves List
Green Procurement (RoHS)
SeriesValve typePort sizeOrifice diameter (mmø)
VXZN.C./N.O.φ10, φ12，φ3/8''
1/4 to 1		10 to 25

Digital Flow Switch Manifold for Water PF3WB/C/S/R

Switches/Sensors/Controller » Electronic Flow Switches/Sensors
IO-Link Compatible Products » Digital Flow Switch
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: IO-Link Compatible Products
Equipment for the Semiconductor Industries » Cooling Water Line
Features
    ・Applicable fluid: Water, Ethylene glycol aqueous solution
    ・Space saving
    　Footprint Max. 85% reduction
    　Weight Max. 65% reduction
    ・Needs no piping: Work-hour for installation reduced by up to 45%
    ・IO-Link compatible
    ・3-color/2-screen display
    ・Fluid temperature: 0 to 90℃

    　▶IO-Link Master
Safety Instructions　Pressure Switches/Flow Switches/Precautions　Flow Switch Series Variations
Green Procurement (RoHS)　IO-Link Master
SeriesRated flow range (L/min)
PF3WB
Integrated type (Basic type)		0.5 to 4
2 to 16
5 to 40
PF3WC
Integrated type (Straight type)		0.5 to 4
2 to 16
5 to 40
PF3WS
Remote type (Supply type)		0.5 to 4
2 to 16
5 to 40
PF3WR
Remote type (Return type)		0.5 to 4
2 to 16
5 to 40

Pressure Sensor/Switch for General Fluids PSE57□

Switches/Sensors/Controller » Electronic Pressure Switches/Sensors (Remote Type)
Equipment for the Semiconductor Industries » Cooling Water Line
Features
    ・PSE Sensor Set Up Tool PSE-ST has been added. [New]
    ・Switch output specification
    ・IO-Link compatible
    ・Withstand voltage: 500 VAC
    ・Enclosure: IP65
    ・Materials of parts in contact with fluid
    　Piping port: C3604 + Nickel plating
    　Pressure sensor: Al2O3 (Alumina 96%)
    　O-ring: FKM + Grease (PSE570/573/574)
    　Square ring: FKM (PSE575/576/577)
Safety Instructions　Pressure Switches/Flow Switches/Precautions
Pressure Switch Series Variations/Application Example 　Glossary of Terms/Technical Information
Green Procurement (RoHS)
SeriesTypeRated pressure rangeProof pressure
PSE570Positive pressure0 to 1 MPa3.0 MPa
PSE573Compound pressure－100 to 100 kPa600 kPa
PSE574Positive pressure0 to 500 kPa1.5 MPa
PSE575Positive pressure0 to 2 MPa5.0 MPa
PSE576Positive pressure0 to 5 MPa12.5 MPa
PSE577Positive pressure0 to 10 MPa30 MPa

Pressure Gauge with Switch GP46

Silencers/Exhaust Cleaners/Blow Guns/Pressure Gauges » Pressure Gauges
Switches/Sensors/Controller » Mechanical Pressure Switches
    ・A pressure switch function has been added to the gauge.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Pressure Gauge with Switch GP46
    DoC/IM
    Series View search result
    GP46View search result
Safety Instructions　Series Variations　Procedures for Setting and Assembling (P.1298)　Specific Product Precautions (P.1299)　Green Procurement (RoHS)
SeriesSize (O.D.)Connection thread
GP46φ42.5R1/8，1/4

Exhaust Flow Control Valve with Indicator AS-DPX00042

Flow Control Equipment » Related Equipment
Features
    ・Contributes to reduced setting errors and work hours by managing flow rate figures (indicator)
    ・Integrated restrictor and silencer
    　Reduced assembly time and number of components
    ・The speed can be adjusted on the valve side
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
Safety Instructions　Flow Control Equipment/Precautions　Green Procurement (RoHS)
TypeSeriesConnection thread
Exhaust flow control valve with indicatorAS-DPX00042R1/4

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