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Filter Regulator 1301/IW
Pneumatic Instrumentation Equipment » Regulators
| Series | Port size | Set pressure (MPa) | Filtration accuracy (μm) |
|---|---|---|---|
| IW | Rc1/4 | 0.02 to 0.2 0.02 to 0.3 0.02 to 0.5 | 5 |
| 1301 | Rc1/4 | 0.02 to 0.2 0.02 to 0.29 0.02 to 0.49 | 5 |
Electro-Pneumatic Positioner/Smart Positioner IP8□00/IP8□01
Pneumatic Instrumentation Equipment » Positioners
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・Enclosure: JISF8007 IP65 (Compliant with IEC 60529)
・Monitoring function
・Explosion-proof construction
・Electro-pneumatic positioner:
TIIS explosion-proof construction (Exd II BT5)
ATEX intrinsically safe explosion-proof construction
(II 2G Ex h ib II CT5/T6 Gb)
・Smart positioner:
ATEX intrinsically safe explosion-proof construction
(II 1G Ex h ia II CT4/T5/T6 Ga)
・HART transmission function (Smart positioner)
| Description | Series | Type | Port size (Rc, NPT, G) | Supply air pressure (MPa) | Input current |
|---|---|---|---|---|---|
| Electro-pneumatic positioner | IP8000 | Lever type | 1/4 | 0.14 to 0.7 | 4 to 20 mA DC |
| Electro-pneumatic positioner | IP8100 | Rotary type | 1/4 | 0.14 to 0.7 | 4 to 20 mA DC |
| Smart positioner | IP8001 | Lever type | 1/4 | 0.14 to 0.7 | 4 to 20 mA DC |
| Smart positioner | IP8101 | Rotary type | 1/4 | 0.3 to 0.7 | 4 to 20 mA DC |
Sintered Metal Element EB/ES
Industrial Filters/Sintered Metal Elements » Sintered Metal Elements
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・Large mechanical strength and withstand pressure, Anti-corrosive
・Mechanical process, caulking, brazing, soldering, welding, and simultaneous sintering are possible.
・Can be cleaned and reused
| Series | Material | Nominal filtration accuracy |
|---|---|---|
| EB | Bronze | (1)＊, 2, 5, 10, 20, 40, 70, 100, 120 μm ＊( ): Semi-standard |
| ES | Stainless steel | (1)＊, 2, 5, 10, 20, 40, 70, 100, 120 μm ＊( ): Semi-standard |
Industrial Filter/Vessel Series FGD
Industrial Filters/Sintered Metal Elements » Industrial Filters
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・Ideal for low-flow filtration (Max. 60 L/min)
・It is possible to select the antistatic specification (FGDE, FGDF).
| Series | Port size | Max. operating pressure | Operating temperature (℃) |
|---|---|---|---|
| FGD | Rc3/8，1/2，3/4 | 0.7, 1 MPa | MAX. 80 |
Rodless Cylinder for Vacuum CYV
High Vacuum Equipment » Rodless Cylinders for Vacuum
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・Air cylinder for transfer in vacuum environments (1.3 x 10-4 Pa)
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Green Procurement (RoHS)
| Series | Operating environment pressure [Pa (ABS)] | Bore size (mm) |
|---|---|---|
| CYV | Atmosphere to 1.3 x 10-4 | 15, 32 |
For 300 mm Wafer: Parallel Seal Type Slit Valve XGTP
High Vacuum Equipment » Slit Valves
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・Long service life: 3 million cycles (within standard temperature range)
・Low particle generation: Reduced by 1/5 or more
(compared with the existing product)
・Easier maintenance
Easy replacement of bellows
Gate can be replaced from above. (Made to order)
・Safety measures
A mechanical end lock mechanism has been adopted.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Green Procurement (RoHS)
| Series | Operating environmental pressure (Pa)(abs) | Fluid | Opening window size (Height x Width) (mm) | Operating pressure (MPa)(G) |
|---|---|---|---|---|
| XGTP | Atmospheric pressure to 10-6 | Inert gas | 50 x 336 | 0.45 to 0.6 |
Vacuum Angle Valve with Release Valve XLJ
High Vacuum Equipment » Other
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・Prevents the reverse flow of oil through the roughing pump (rotary pump) into the chamber
・Reduced piping labor due to the built-in release valve structure
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Green Procurement (RoHS)
| Series | Actuation | Valve type | Shaft seal type | Flange size |
|---|---|---|---|---|
| XLJ | Electromagnetic | Normally closed/Vacuum pilot | O-ring seal | 25, 40 |
Aluminum High Vacuum Angle Valve XLA/C/F/G
High Vacuum Equipment » High Vacuum Valves
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・Aluminum bodied
Uniform baking temperature
Lightweight, Compact
Minimal outgassing
Minimal contamination from heavy metals
・Bellows are replaceable.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Auto Switches Common Specifications Green Procurement (RoHS)
| Series | Actuation | Valve type | Shaft seal type | Application | Flange size |
|---|---|---|---|---|---|
| XLA-2 | Air operated | Single acting (N.C.) | Bellows seal | Dust free, Cleaned | 16 to 80 |
| XLAV-2 (With solenoid valve) | Air operated | Single acting (N.C.) | Bellows seal | Dust free, Cleaned | 16 to 80 |
| XLC-2 | Air operated | Double acting | Bellows seal | Dust free, Cleaned | 16 to 80 |
| XLF-2 | Air operated | Single acting (N.C.) | O-ring seal | High-speed operation, High operating cycles | 16 to 80 |
| XLFV-2 (With solenoid valve) | Air operated | Single acting (N.C.) | O-ring seal | High-speed operation, High operating cycles | 16 to 80 |
| XLG -2 | Air operated | Double acting | O-ring seal | High-speed operation, High operating cycles | 16 to 80 |
Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ
Process Gas Equipment » Process Gas Equipment
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・For UHP gas delivery in semiconductor and other clean industries
・Body material: 316L SS secondary remelt or 316L SS
・Electropolished wetted parts
・External metal seal construction
Safety Instructions Process Gas Equipment/Common Precautions Series Variations Valve and Regulator Recommendations Technical Data/Glossary of Terms Green Procurement (RoHS)
| Series | Description | Type | Body material |
|---|---|---|---|
| AP | For Ultra High Purity | Single Stage Regulator | 316L SS secondary remelt |
| AP | For Ultra High Purity | Two Stage Regulator | 316L SS secondary remelt |
| AP | For Ultra High Purity | Pneumatic Actuation Pressure Regulator | 316L SS secondary remelt |
| SL | For Ultra High Purity | Single Stage Regulator | 316L SS secondary remelt |
| AZ | For Ultra High Purity | Single Stage Regulator | SUS316L |
| AZ | For Ultra High Purity | Pneumatic Actuation Pressure Regulator | SUS316L |
| AK | For General Applications | Single Stage Regulator | SUS316 |
| AK | For General Applications | Two Stage Regulator | SUS316 |
| AK | For General Applications | Pneumatic Actuation Pressure Regulator | SUS316 |
| BP | For Ultra High Purity | Back Pressure Regulator | SUS316 |
| BP | For General Applications· | Back Pressure Regulator | SUS316 |
Peltier-Type Thermo-con/Rack Mount Type
HECR
Temperature Control Equipment » Thermo-cons/Thermoelectric Baths (Peltier-Type Temperature Control Equipment)
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・Good space utilization: Mountable in a 19-inch rack
Saves space by allowing multiple pieces of equipment to be mounted
together in a rack.
・Temperature stability: ±0.01℃ to 0.03℃
・Set temperature range: 10℃ to 60℃
・Cooling capacity: 200 W, 400 W, 510 W, 800 W, 1 kW, 1.2 kW
・Power consumption: 200 W, 300 W, 400 W
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method |
|---|---|---|---|---|
| HECR002-A | 10 to 60℃ | 200 W | ±0.01 to 0.03℃ | Peltier-type air-cooled |
| HECR004-A | 10 to 60℃ | 400 W | ±0.01 to 0.03℃ | Peltier-type air-cooled |
| HECR006-A | 10 to 60℃ | 510 W | ±0.01 to 0.03℃ | Peltier-type air-cooled |
| HECR006L-A | 10 to 60℃ | 510 W | ±0.01 to 0.03℃ | Peltier-type air-cooled |
| HECR008-A | 10 to 60℃ | 800 W | ±0.01 to 0.03℃ | Peltier-type air-cooled |
| HECR010-A | 10 to 60℃ | 1 kW | ±0.01 to 0.03℃ | Peltier-type air-cooled |
| HECR008-W | 10 to 60℃ | 800 W | ±0.01 to 0.03℃ | Peltier-type water-cooled |
| HECR012-W | 10 to 60℃ | 1.2 kW | ±0.01 to 0.03℃ | Peltier-type water-cooled |
