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Reinforced Corrugated Cardboard Specification/Longer Length Reel: Nylon Tubing T0604-X64
Pneumatic Instrumentation Equipment » Piping Materials
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・Length per roll: 500/250 m
・For general pneumatic tubing
・Nylon tubing
| Series | Tube size Tubing O.D. ×Tubing I.D. | Fluid |
|---|---|---|
| T0604-X64 | φ6×φ4 | Air |
| CLJ2 | Fine lock cylinder | http://www.smcworld.com/cad2d/en/item.do?mode=ser&word=clj2 |
NAMUR Interface 5-Port Solenoid Valve VFN2000N
Pneumatic Instrumentation Equipment » Solenoid Valves
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・The interface surface is compliant with NAMUR Standards.
Can be directly installed on industrial valve actuators that comply with NAMUR
| Series | Flow rate characteristics 4/2→5/3（A/B→EA/EB） C | Flow rate characteristics 4/2→5/3（A/B→EA/EB） b | Flow rate characteristics 4/2→5/3（A/B→EA/EB） Cv | Power consumption (W) |
|---|---|---|---|---|
| VFN2000N | 4.57 | 0.17 | 1.06 | 1.8 |
Lock-Up Valve IL201/211/220
Pneumatic Instrumentation Equipment » Relays/Valves
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・The lock-up valve is used when any air source or air supply piping line failure occurs in the air operated process control line.
Single acting, Double acting: Retains the pressure at the operating area as an emergency operation until the air source recovers to its normal state
3-port: Changes the supply port if a problem occurs
| Series | Port size | Set pressure (MPa) | Shut-off pneumatic circuit pressure |
|---|---|---|---|
| IL201/211/220 | Rc1/4 | 0.14 to 0.7 | Max. 0.7 MPa |
Filter Regulator: Made to Order AW30 to AW60-X430/X440
Pneumatic Instrumentation Equipment » Regulators
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・Special temperature environment:
Special materials are used in the manufacturing of seals and resin parts to allow them to withstand various temperature conditions in cold or tropical (hot) climates.
| Series | Environment | Port size | Set pressure (MPa) | Filtration accuracy (μm) |
|---|---|---|---|---|
| AW30 to AW60-X430 | Low temperature -30 to 60℃ | 1/4 to 1 | 0.05 to 0.85 | 5 |
| AW30 to AW60-X440 | High temperature -5 to 80℃ | 1/4 to 1 | 0.02 to 0.2 | 5 |
Smart Positioner/External Input Signal (Remote) Type
IP8101-X419-□
Pneumatic Instrumentation Equipment » Positioners
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・Allows for the remote control of cylinders
Controls the cylinder by feedback signal
| Description | Series | Type | Port size (Rc, NPT, G) | Supply air pressure (MPa) | Input current |
|---|---|---|---|---|---|
| Smart positioner | IP8101-X419-□ | External input signal (remote) type | 1/4 | 0.3 to 0.7 | 4 to 20 mA DC |
Industrial Filter/Vessel Series FGE
Industrial Filters/Sintered Metal Elements » Industrial Filters
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・Ideal for medium flow rate filtration (Max. 230 L/min)
・Easy element replacement for the V-band type
(With cover anti-scattering mechanism)
| Series | Port size | Max. operating pressure | Operating temperature (℃) |
|---|---|---|---|
| FGE | R1, 2 | 0.7 MPa | MAX. 80 |
Slit Valve XGT
High Vacuum Equipment » Slit Valves
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・This product is suitable to act as the partition valve between the load lock chamber and the transfer chamber or between the transfer chamber and the process chamber in semiconductor equipment or other equipment.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Green Procurement (RoHS)
| Series | Operating environmental pressure (Pa)(abs) | Fluid | Opening window size (Height x Width) (mm) | Operating pressure (MPa)(G) |
|---|---|---|---|---|
| XGT | Atmospheric pressure to 10-6 | Inert gas type vacuum | 32 x 222 46 x 236 50 x 336 | 0.45 to 0.6 |
Aluminum High Vacuum Angle Valve XLA/C-100/160(-1)-X152
High Vacuum Equipment » High Vacuum Valves
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・Improved durability of bellows (Flange sizes 100 and 160)
・Service life of two million cycles
・Space required for equipment can be reduced
Without restriction on exhaust direction (two ways: from valve element side to bellows side and vice versa)
Increased flexibility of mounting orientation
・Lightweight, Compact
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Auto Switches Common Specifications Green Procurement (RoHS)
| Series | Actuation | Valve type | Shaft seal type | Application | Flange size |
|---|---|---|---|---|---|
| XLA-100/160-X152 | Air operated | Single acting (N.C.) | Bellows seal | Dust free, Cleaned | 100，160 |
| XLC-100/160-1-X152 | Air operated | Double acting | Bellows seal | Dust free, Cleaned | 100，160 |
Peltier-Type Thermo-con HEC
Temperature Control Equipment » Thermo-cons/Thermoelectric Baths (Peltier-Type Temperature Control Equipment)
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・For applications requiring high-precision temperature control
・High-precision, refrigerant-free temperature control equipment that uses a Peltier
device
・Simple structure and high reliability
・Can easily be built into equipment due to its compact and low-vibration design
・Compatible with a wide range of power supply voltages
・Compliant with UL Standards, CE-marking
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HEC | 10 to 60℃ | 230 W, 600 W | ±0.01 to 0.03℃ | Peltier-type air-cooled | Tap water |
| HEC | 10 to 60℃ | 140 W, 320 W | ±0.01 to 0.03℃ | Peltier-type water-cooled | Tap water, Ethylene glycol aqueous solution (20%) |
| HEC | 10 to 60℃ | 600 W, 1200 W | ±0.01 to 0.03℃ | Peltier-type water-cooled | Tap water, Fluorinated fluid |
Water-cooled Thermo-chiller/High-performance Type HRW
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: DeviceNet Compatible ProductsTemperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance Type & Inverter Type
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・Direct heat exchanger for in-plant circulating fluid
・Can control the temperature over a wide range since a compressor is not required.
・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
・Compliant with UL Standards, SEMI Standards, CE-marking
・It is possible to select the inverter type.
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRW | 20 to 90℃ | 2 kW, 8 kW, 15 kW, 30 kW | ±0.3℃ | Water-cooled type (Without compressor) | Fluorinated, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |
