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Clean Regulator SRH
Modular F.R.L./Pressure Control Equipment » RegulatorsClean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment
Pressure Control Equipment » Regulators

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・Contamination-controlled stainless steel regulator
・Oil-free
・2 types of diaphragm materials: PTFE, Fluororubber
Safety Instructions F.R.L. Units/Precautions Series Variations/Pressure Control Equipment
Product Selection Guide Green Procurement (RoHS)
Product Selection Guide Green Procurement (RoHS)
Series | Relief mechanism | Port size | Set pressure (MPa) |
---|---|---|---|
SRH | Non-relief | Rc1/8,1/4,3/8,1/2 9/16-18UNF,7/8-14UNF | Low pressure type:0.02 to 0.2 High pressure type:0.05 to 0.7 |
SRH | Relief | Rc1/8,1/4,3/8,1/2 | Low pressure type:0.02 to 0.2 High pressure type:0.05 to 0.7 |
Compact Cylinder/Plate Type CQU
Air Cylinders » Compact Air Cylinders
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・The oval piston design reduces the width by a maximum of 40%.
(Compared with the CQ2 series)
・Weight: Reduced by up to 36% (Compared with the MU series)
・A small type auto switch can be mounted from 4 directions.
・No protrusion of the auto switch from the mounting slot
Safety Instructions Actuators/Precautions
Auto Switches/Precautions Model Selection/Technical Data Green Procurement (RoHS)
Auto Switches/Precautions Model Selection/Technical Data Green Procurement (RoHS)
Type | Series | Action | Bore size (mm) |
---|---|---|---|
Standard | CQU | Double acting, Single rod | 20,25,32,40 |
5-Port Solenoid Valve VQZ1000/2000/3000
Directional Control Valves » Pilot Operated 4/5 Port Solenoid Valves-
・The combined mounting of a 3-port valve and a 5-port valve on a manifold valve is possible.
・Can be mounted on an aluminum body manifold or a DIN rail
・Manifold type no.: VV5QZ12, VV5QZ15, VV5QZ22, VV5QZ25, VV5QZ32, VV5QZ35
*The EX510 series is to be discontinued. When designing new equipment
and facilities, consider using another series (EX260/EX600) instead.
Safety Instructions 3/4/5 Port Solenoid Valves/Precautions Selection/Technical Data
Green Procurement (RoHS)
Green Procurement (RoHS)
Series | Flow rate characteristics 4/2→5/3(A/B→EA/EB) C[dm3/(s・bar)] | Flow rate characteristics 4/2→5/3(A/B→EA/EB) b | Flow rate characteristics 4/2→5/3(A/B→EA/EB) Cv | Applicable cylinder size | Power consumption (W) |
---|---|---|---|---|---|
VQZ1000 | 1.3 | 0.24 | 0.32 | φ63 | 0.35(Standard) 0.9 (High pressure type, High speed response type) |
VQZ2000 | 2.3 | 0.29 | 0.53 | φ80 | 0.35(Standard) 0.9 (High pressure type, High speed response type) |
VQZ3000 | 4.6 | 0.26 | 1.2 | φ100 | 0.35(Standard) 0.9 (High pressure type, High speed response type) |
Precision Clean Regulator SRP
Modular F.R.L./Pressure Control Equipment » RegulatorsClean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment
Pressure Control Equipment » Regulators

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・High-precision low flow consumption stainless steel regulator
・Bleed air flow of 0.5 L/min (ANR) or less (0.2 MPa at outlet pressure)
・Setting sensitivity: 0.3% F.S.
・Repeatability: 1% F.S.
Safety Instructions F.R.L. Units/Precautions Series Variations/Pressure Control Equipment
Product Selection Guide Green Procurement (RoHS)
Product Selection Guide Green Procurement (RoHS)
Series | Port size | Set pressure (MPa) |
---|---|---|
SRP | M5,1/8 | Low pressure type:0.005 to 0.2 High pressure type:0.01 to 0.4 |
Plate Cylinder MU/MDU
Air Cylinders » Compact Air Cylinders
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・The oval piston design saves space. Cylinders can be mounted from multiple directions.
・It is possible to mount small auto switches in 4 directions.
・No protrusion of the auto switch from the mounting slot
・Available with a stroke of up to 300 mm
・With auto switch (MDU series: MDU, MDUW)
Safety Instructions Actuators/Precautions Auto Switches/Precautions
Model Selection/Technical Data Quick Selection Table Simple Specials
Green Procurement (RoHS)
Model Selection/Technical Data Quick Selection Table Simple Specials
Green Procurement (RoHS)
Type | Series | Action | Bore size (mm) |
---|---|---|---|
Standard | MU-Z | Double acting, Single rod | 25,32,40,50,63 |
Standard | MU-Z | Single acting (Spring return/extend) | 25,32,40,50,63 |
Standard | MUW-Z | Double acting, Double rod | 25,32,40,50,63 |
5-Port Solenoid Valve SQ1000/2000
Directional Control Valves » Pilot Operated 4/5 Port Solenoid Valves-
・Power saving: Power consumption of 0.4 W (Standard)
・Easy to add or decrease the number of valve stations
・Easy valve maintenance, mountable with one screw
・Easy replacement of clip type One-touch fittings
・Connector entry direction can be changed with a single push.
・4-position, dual 3-port valve
・Built-in back pressure check valve (Option)
・Manifold type no.: SS5Q13, SS5Q14, SS5Q23, SS5Q24
*The EX510 series is to be discontinued. When designing new equipment
and facilities, consider using another series (EX260/EX600) instead.
Safety Instructions 3/4/5 Port Solenoid Valves/Precautions Selection/Technical Data
Green Procurement (RoHS)
Green Procurement (RoHS)
Series | Flow rate characteristics 4/2→5/3(A/B→R1/R2) C[dm3/(s・bar)] | Flow rate characteristics 4/2→5/3(A/B→R1/R2) b | Flow rate characteristics 4/2→5/3(A/B→R1/R2) Cv | Applicable cylinder size | Power consumption (W) |
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SQ1000 | 0.8 | 0.20 | 0.19 | φ32 | 0.4(Standard) 0.95(High pressure type) |
SQ2000 | 3.1 | 0.18 | 0.71 | φ63 | 0.4(Standard) 0.95(High pressure type) |
Water Regulator WR110
Modular F.R.L./Pressure Control Equipment » RegulatorsProcess Valves » 2/3 Port Solenoid Valves/Air Operated Valves
Pressure Control Equipment » Regulators
Series | Port size | Set pressure (MPa) |
---|---|---|
WR110-□-X224 | Rc1/8, 1/4 | 0.08 to 0.39 |
WR110-□-X215 | Rc1/8, 1/4、NPT1/8, 1/4 | 0.05 to 0.69 |
Pallet Lock Cylinder W-R1/W-R3
Air Cylinders » Clamp Cylinders-
・Centering applied to correct positional deviation of up to ±50 mm
・Through the toggle mechanism, max. clamping force of 4430 N
・Arm opening angle: Approx. 70°
・The integration of the clamping unit and cylinder unit reduces design and assembly labor.
Series | Mass of transferred object | Clamping force [N] | Bore size (mm) |
---|---|---|---|
W-R1 | 1000 kg or less | 4430 | 100 |
W-R3 | 3000 kg or less | 4070 | 100 |
5-Port Solenoid Valve VFS1000/2000/3000/4000/5000/6000
Directional Control Valves » Pilot Operated 4/5 Port Solenoid Valves
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・Metal seal main valve construction
・Extensive size variations are available.
・For driving medium and large cylinders
・A wide variety of manifold options are available.
・Compatible with control units (VFS2000/3000/4000, Base mounted type)
・Manifold type no.: VV5FS1, VV5FS2, VV5FS3, VV5FS4, VV5FS5
・Supports Interface regulators
Safety Instructions 3/4/5 Port Solenoid Valves/Precautions Selection/Technical Data
Green Procurement (RoHS)
Green Procurement (RoHS)
Series | Flow rate characteristics 4/2→5/3(A/B→R1/R2) C[dm3/(s・bar)] | Flow rate characteristics 4/2→5/3(A/B→R1/R2) b | Flow rate characteristics 4/2→5/3(A/B→R1/R2) Cv | Applicable cylinder size | Power consumption (W) |
---|---|---|---|---|---|
VFS1000 | 1.8 | 0.19 | 0.40 | φ50 | 1.8 |
VFS2000 | 3.5 | 0.32 | 0.85 | φ63 | 1.8 |
VFS3000 | 6.8 | 0.12 | 1.6 | φ80 | 1.8 |
VFS4000 | 12 | 0.22 | 3.1 | φ140 | 1.8 |
VFS5000 | 20 | 0.13 | 4.7 | φ160 | 1.8 |
VFS6000 | 38 | 0.10 | 9.0 | φ200 | 1.8 |
Water Strainer WF300
Modular F.R.L./Pressure Control Equipment » RegulatorsIndustrial Filters/Sintered Metal Elements » Industrial Filters
Pressure Control Equipment » Regulators
Series | Port size | Mesh |
---|---|---|
WF300 | Rc1/4, 3/8, 1/2 | 100/70/50/25 mesh |