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5 Port Solenoid Valve 10-S0700

Clean Series/Low-Particle Generation » Directional Control Valves

    Clean Series



    ＊The EX250/500 series is to be discontinued. When designing new
    　equipment and facilities, consider using another series (EX260/EX600)
    　instead.
Safety Instructions　Features/Basic Specifications/Clean Series Precautions
3/4/5 Port Solenoid Valves/Precautions　Green Procurement (RoHS)
SeriesFlow rate characteristics
1→4/2（P→A/B）
C［dm3/（s・bar）］		Flow rate characteristics
1→4/2（P→A/B）
b		Flow rate characteristics
1→4/2（P→A/B）
Cv		Cylinder sizePower consumption
(W)
10-S07000.390.390.11φ250.35

Stainless Steel High Vacuum Angle/In-line Valve XM/XY

High Vacuum Equipment » High Vacuum Valves
    ・The precision casting, unified composition prevents the accumulation of gas.
    ・The XM series is interchangeable with the XL series aluminum high vacuum angle valve.

    Note) Size 16 is not available for the in-line type.
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesActuationShaft seal
type		Valve
type		MaterialFlange
size
XMA/XYAAir operatedBellows sealSingle acting
(N.C.)		Body : SCS13 (Equivalent to
stainless steel 304)
Bellows : Stainless steel 316L		16 to 80 Note)
XMC/XYCAir operatedBellows sealDouble actingBody : SCS13 (Eequivalent to
stainless steel 304)
Bellows : Stainless steel 316L		16 to 80 Note)
XMD/XYDAir operatedBellows/O-ring
seal		Single acting
(N.C.)		Body : SCS13 (Equivalent to
stainless steel 304)
Bellows : Stainless steel 316L		25 to 80
XMH/XYHManualBellows sealManualBody : SCS13 (Equivalent to
stainless steel 304)
Bellows : Stainless steel 316L		16 to 50 Note)

Check Valve/Vacuum Generator/Flow Switch AP

Process Gas Equipment » Process Gas Equipment
    [Check valve]
    ・Fluid backflow is prevented by back pressure.
    ・Unique design with only one moving part in the gas stream, an O-ring
    ・Springless structure suppresses particle generation by vibration or chattering and pressure fluctuations on the downstream side

    [Vacuum generator]
    ・Vacuum generation equipment
    ・Applicable to the exhaustion of unnecessary gas remaining inside the piping during gas cylinder replacement

    [Flow switch]
    ・Detects excess flow above a given flow rate caused by pipe breakage, etc.
Safety Instructions　Process Gas Equipment/Common Precautions　Series Variations　Valve and Regulator Recommendations　Technical Data/Glossary of Terms　Green Procurement (RoHS)
SeriesTypeBody material
APCheck Valve316L SS secondary remelt
APVacuum Generators316L SS secondary remelt
APFlow Switches316L SS secondary remelt

Thermo-chiller/Standard Type HRS100/150

Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
Features
    ・No heater is required, as the circulating fluid is heated using only the heat exhausted by the refrigerating circuit.
    ・Compatible with power supplies in Europe, Asia, Oceania, North, Central, and South America
    ・Low-noise design: 70 dB (A)
    ・Outdoor installation: IPX4
    ・Compact, Space saving
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Can be used in a wide range of applications!
Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling methodCirculating fluid
HRS100
HRS150		5 to 35℃9.5 kW
14.5 kW
(60 Hz)		±1.0℃Air-cooled refrigeration
Water-cooled refrigeration		Tap water
Deionized water
Ethylene glycol aqueous solution (15%)

Liquid Dispense Pump (Solenoid Type) LSP

Process Pumps(Diaphragm Pumps) » Liquid Dispense Pump
Features
    ・Compact solenoid type diaphragm pump, which dispenses stable and repeatable volumes of liquid measuring 5 μL or more per shot.
    ・Adjustment of dispense volume is possible.
    ・Stable dispense volume: Repeatability: ±1%*
    　*±2% at 5 to 15 μL, Under SMC’s measurement conditions
    ・Shut-off function
    ・Self-contained system does not need any priming.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Liquid Dispense Pump (Solenoid Type) LSP
    Manual
    Series View search result
    LSPView search result
  • Liquid Dispense Pump (Solenoid Type) LSP
    DoC
    Series View search result
    LSPView search result
Safety Instructions
SeriesConnectionFluid contact material
Body		Fluid contact material
Diaphragm, Check valve		Fluid
LSPBody Ported
Base Mounted		PEEK
PP		EPDM
FKM		Water
DI water (Pure water)
Diluent
Cleaning fluid

High Purity Chemical Liquid Valve/Air Operated, Non-Metallic Exterior LVQ

Chemical Liquid Valves/Fittings & Needle Valves/Tubing » Chemical Liquid Valves
Fluoropolymer Equipment/PVC Equipment » High Purity Chemical Liquid Valves
    ・Screwless construction, Non-metallic construction doesn't use metal
    　screws to secure the body of the actuator
    ・Body material: New PFA
    ・Diaphragm material: PTFE
    ・Actuator material: PVDF

    Note) Tubing size

    * The LQ2 insert/integrated fitting type space-saving fitting for
    　the LVQ series high-purity chemical liquid valve is to be
    　discontinued as of March 2025. Select the LQ1 fitting instead.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • High Purity Chemical Liquid Valve/Air Operated, Non-Metallic Exterior LVQ
    Manual
    Series Type View search result
    LVQIntegrated fittingView search result
    LVQSpace saving typeView search result
    LVQTube extensionView search result
Safety Instructions　Series Variations　Work Procedure Instructions/LQ1, 2　Fitting Procedure/LQ3　Green Procurement (RoHS)
SeriesTypeValve typeApplicable tubing O.D.
Metric size		Applicable tubing O.D.
Inch size		Orifice diameter
(mmø)
LVQIntegrated fittingN.C./N.O./
Double acting		3 to 251/8 to 14 to 22
LVQSpace saving typeN.C./N.O./
Double acting		Fitting size:
2 to 6		Fitting size:
2 to 6		4 to 22
LVQTube extensionN.C./N.O./
Double acting		6 to 25 Note)1/4 to 1 Note)4 to 22

Digital Flow Switch Manifold for Water PF3WB/C/S/R

Switches/Sensors/Controller » Electronic Flow Switches/Sensors
IO-Link Devices » Digital Flow Switch
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: IO-Link Compatible Products
Features
    ・Applicable fluid: Water, Ethylene glycol aqueous solution
    ・Space saving
    　Footprint Max. 85% reduction
    　Weight Max. 65% reduction
    ・Needs no piping: Work-hour for installation reduced by up to 45%
    ・IO-Link compatible
    ・3-color/2-screen display
    ・Fluid temperature: 0 to 90℃

    　▶IO-Link Master
Safety Instructions　Pressure Switches/Flow Switches/Precautions　Flow Switch Series Variations
Green Procurement (RoHS)　IO-Link Master
SeriesRated flow range (L/min)
PF3WB
Integrated type (Basic type)		0.5 to 4
2 to 16
5 to 40
PF3WC
Integrated type (Straight type)		0.5 to 4
2 to 16
5 to 40
PF3WS
Remote type (Supply type)		0.5 to 4
2 to 16
5 to 40
PF3WR
Remote type (Return type)		0.5 to 4
2 to 16
5 to 40

Pressure Sensor/Switch for General Fluids PSE57□

Switches/Sensors/Controller » Electronic Pressure Switches/Sensors (Remote Type)
Features
    ・PSE Sensor Set Up Tool PSE-ST has been added. [New]
    ・Switch output specification
    ・IO-Link compatible
    ・Withstand voltage: 500 VAC
    ・Enclosure: IP65
    ・Materials of parts in contact with fluid
    　Piping port: C3604 + Nickel plating
    　Pressure sensor: Al2O3 (Alumina 96%)
    　O-ring: FKM + Grease (PSE570/573/574)
    　Square ring: FKM (PSE575/576/577)
Safety Instructions　Pressure Switches/Flow Switches/Precautions
Pressure Switch Series Variations/Application Example 　Glossary of Terms/Technical Information
Green Procurement (RoHS)
SeriesTypeRated pressure rangeProof pressure
PSE570Positive pressure0 to 1 MPa3.0 MPa
PSE573Compound pressure－100 to 100 kPa600 kPa
PSE574Positive pressure0 to 500 kPa1.5 MPa
PSE575Positive pressure0 to 2 MPa5.0 MPa
PSE576Positive pressure0 to 5 MPa12.5 MPa
PSE577Positive pressure0 to 10 MPa30 MPa

Pressure Gauge with Switch GP46

Silencers/Exhaust Cleaners/Blow Guns/Pressure Gauges » Pressure Gauges
Switches/Sensors/Controller » Mechanical Pressure Switches
    ・A pressure switch function has been added to the gauge.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Pressure Gauge with Switch GP46
    DoC
    Series View search result
    GP46View search result
Safety Instructions　Series Variations　Procedures for Setting and Assembling (P.1298)　Specific Product Precautions (P.1299)　Green Procurement (RoHS)
SeriesSize (O.D.)Connection thread
GP46φ42.5R1/8，1/4

Exhaust Flow Control Valve with Indicator AS-DPX00042

Flow Control Equipment » Related Equipment
Features
    ・Contributes to reduced setting errors and work hours by managing flow rate figures (indicator)
    ・Integrated restrictor and silencer
    　Reduced assembly time and number of components
    ・The speed can be adjusted on the valve side
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
Safety Instructions　Flow Control Equipment/Precautions　Green Procurement (RoHS)
TypeSeriesConnection thread
Exhaust flow control valve with indicatorAS-DPX00042R1/4

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