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Rectangular Multi-connector 10-KDM

Clean Series/Low-Particle Generation » Fittings

    Clean Series


    ・One-touch installation and removal of multi-tubes.
Safety Instructions　Features/Basic Specifications/Clean Series Precautions
Fittings and Tubing/Precautions　Green Procurement (RoHS)
SeriesNo. of connecting tubesConnection thread
10-KDM10, 20φ3.2, φ4, φ6, φ8

Micro Mist Separator with Pre-filter 10-AMH

Clean Series/Low-Particle Generation » Compressed Air Cleaning Filter Series

    Clean Series

Safety Instructions　Features/Basic Specifications/Clean Series Precautions
Air Preparation Equipment/Precautions　Green Procurement (RoHS)
SeriesFiltration (μm)Rated flow L/min (ANR)Port size
10-AMH0.01 (Filtration efficiency 99.9%)200 to 120001/8 to 2

Rotary Actuated Air Gripper 3-Finger Type 11-/22-MHR3/MDHR3

Clean Series/Low-Particle Generation » Air Grippers

    Clean Series


    ・A vertically compact configuration has been achieved through the use of a rotary actuator as the drive force source.
    ・Supports class 10 clean room.
Safety Instructions　Air Grippers Applicable Auto Switch List
Features/Basic Specifications/Clean Series Precautions
Air Grippers/Precautions　Auto Switches/Precautions　Green Procurement (RoHS)
SeriesBore size (mm)
11-/22-MHR3Nominal size 10, 15

Air Cylinder 10-/11-/21-/22-CA2

Clean Series/Low-Particle Generation » Air Cylinders

    Clean Series

Safety Instructions　Applicable Auto Switch List
Features/Basic Specifications/Clean Series Precautions
Actuators/Precautions　Auto Switches/Precautions　Green Procurement (RoHS)
TypeSeriesActionBore size (mm)
Standard10-/11-/21-/22-CA2Double acting, Single rod40, 50, 63

5 Port Solenoid Valve 10-SZ

Clean Series/Low-Particle Generation » Directional Control Valves

    Clean Series



    ＊The EX510 series is to be discontinued. When designing new equipment
    　and facilities, consider using another series (EX260/EX600) instead.
Safety Instructions　Features/Basic Specifications/Clean Series Precautions
3/4/5 Port Solenoid Valves/Precautions　Green Procurement (RoHS)
SeriesSonic conductance: CCylinder sizePower consumption (W)
10-SZ30000.77dm3(s・bar)φ320.6

Aluminum One-touch Connection and Release High Vacuum Angle Valve XLAQ/XLDQ

High Vacuum Equipment » High Vacuum Valves
Equipment for the Semiconductor Industries » Exhaust Line
Equipment for the Semiconductor Industries » N2 Gas/Air Supply Line
    ・One-touch connection and release (No tools are required.)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesActuationShaft seal
type		Valve
type		MaterialFlange
size
XLAQAir
operated		Bellows sealSingle acting
(N.C.)		Body : Aluminum
Bellows : Stainless steel 316L		16 to 50
XLDQAir
operated		Bellows seal
O-ring seal		Single acting
(N.C.)		Body : Aluminum
Bellows : Stainless steel 316L		40, 50

Compact Type High Purity Air Operated Chemical Liquid Valve LVD

Chemical Liquid Valves/Fittings & Needle Valves/Tubing » Chemical Liquid Valves
Fluoropolymer Equipment/PVC Equipment » High Purity Chemical Liquid Valves
    ・Space saving, compact model is available.
    　Dimension across inlet/outlet ports: Reduced by up to 29%
    ・Body material: New PFA
    ・Diaphragm material: PTFE
    ・Actuator materials: PPS, PVDF (LVD-F/FN)

    Note) Tubing O.D. for the tube extension type
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Series Variations　Work Procedure Instructions/LQ1, 2　Fitting Procedure/LQ3　Green Procurement (RoHS)
SeriesTypeValve typeApplicable tubing O.D.
Note)
Metric size		Applicable tubing O.D.
Note)
Inch size		Orifice diameter
(mmø)
LVDIntegrated fittingsN.C./N.O./
Double acting		3 to 191/8 to 3/42 to 16
LVDTube extensionsN.C./N.O./
Double acting		6 to 191/4 to 3/44 to 16
LVD-F/FNLQ1 Integrated fittingsN.C./N.O./
Double acting		3 to 251/8 to 14 to 22
LVD-F/FNLQ3 Integrated fittingsN.C./N.O./
Double acting		6 to 251/4 to 14 to 22
LVD-F/FNTube extensionsN.C./N.O./
Double acting		6 to 251/4 to 14 to 22

High Purity Air Operated Chemical Liquid Valve JLV20/30/40/50

Chemical Liquid Valves/Fittings & Needle Valves/Tubing » Chemical Liquid Valves
Features
    ・Suppresses the generation of particles and reduced footprint!
    　The special structure allows for reduced impact when the valve is closed
    　as well as particle generation suppression.
    　Reduced footprint (Compared to the existing model):
    　Valve width reduced by 20%, Mounting pitch reduced by 45%
    ・Applicable for applications requiring high pressure/high back pressure
    　Operating pressure: 0 to 0.5 MPa, Back pressure: 0 to 0.5 MPa
    　(Improved by 66% compared to the existing model)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Series Variations　Fitting Procedure/LQ3
Green Procurement (RoHS)
SeriesTypeValve typeApplicable tubing O.D.
Inch		Orifice diameter
(mmø)
JLVAir operated
Integrated fitting		N.C.1/4，3/8，1/2，3/44，8，10，16

High Speed 2 Port Valve (2 Way Valve) SX10

Process Valves » Compact 2/3 Port Solenoid Valves
Features
    ・High-speed response ON: 0.45 ms, OFF: 0.4 ms (±0.05 ms)
    ・Long service life: 5 billion cycles or more
    ・High frequency: 1200 Hz
    ・Width: 9 mm
    ・Low power consumption: 4 W
Safety Instructions　Green Procurement (RoHS)
SeriesFlow rate (L/min)Power consumption (W)Max. operating frequency (Hz)
SX105080
40
10
4		1200
1000
550
350
SX1010080
40
10
4		650
550
300
200
SX1015080
40
10
4		600
500
250
150

3-Color Display Digital Flow Switch for Water PF3W-Z/L

Switches/Sensors/Controller » Electronic Flow Switches/Sensors
IO-Link Compatible Products » Digital Flow Switch
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: IO-Link Compatible Products
Equipment for the Semiconductor Industries » Cooling Water Line
Features
    ・Applicable fluid: Water, Ethylene glycol aqueous solution
    ・Lightweight: Max. 53% reduction (40 L/min, With temperature sensor)
    ・IO-Link compatible
    ・3-color/2-screen display
    ・Compatible with the temperature sensor & flow adjustment valve
    ・Fluid temperature: 0 to 90℃
    ・Compatible with the PFG200 series 3-screen display 4-channel flow
    　monitor

    　▶IO-Link Master
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • 3-Color Display Digital Flow Switch for Water PF3W-Z/L
    Manual
    Series View search result
    PF3W-ZView search result
    PF3W-L
    (IO-Link compatible)    		View search result
  • 3-Color Display Digital Flow Switch for Water PF3W-Z/L
    DoC/IM
    Series View search result
    PF3W-ZView search result
    PF3W-L
    (IO-Link compatible)    		View search result
Safety Instructions　Pressure Switches/Flow Switches/Precautions　Flow Switch Series Variations
Green Procurement (RoHS)　IO-Link Master
SeriesRated flow range (L/min)
PF3W-Z0.5 to 4
2 to 16
5 to 40
10 to 100
PF3W-L
(IO-Link compatible)		0.5 to 4
2 to 16
5 to 40
10 to 100
50 to 250

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