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Micro Mist Separator Regulator 10-/21-AWD-D

Clean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
SeriesPort sizeSet pressure (MPa)Filtration (μm)
10-AWD20 to 40-D1/8, 1/4, 3/8, 1/20.05 to 0.850.01
21-AWD20 to 40-D1/8, 1/4, 3/8, 1/20.05 to 0.850.01

Push-lock Type Speed Controller: Stainless Steel Type 10-AS-FSG

Clean Series/Low-Particle Generation » Flow Control Equipment
TypeSeriesPort size
in the cylinder side
Applicable tubing O.D.
Metric size
Applicable tubing O.D.
Inch size
Elbow type
Stainless steel type
10-AS-FSGM5×0.8
10-32UNF
R,NPT,G 1/8 to 1/2
φ2 to φ16φ1/8'' to 1/2''
Universal type
Stainless steel type
10-AS13□1FSG~43□1FSGM5×0.8
10-32UNF
R,NPT,G 1/8~1/2
φ3.2 to φ16φ1/8'' to 1/2''

Magnetically Coupled Rodless Cylinder 12-CY3

Clean Series/Low-Particle Generation » Air Cylinders

    Clean Series


    ・Further improvement on Series CY1
    ・Same mounting dimensions as those of Series CY1.
    ・Upgraded bearing performance and reduction of sliding resistance.
    ・NPT thread and G thread as standard
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
Guide TypeTypeSeriesBore size (mm)
Guide non-integratedBasic12-CY3B6, 10, 15, 20, 25, 32, 40, 50, 63
Guide non-integratedDirect mount12-CY3R6, 10, 15, 20, 25, 32, 40, 50, 63

3 Port Solenoid Valve 10-V100

Clean Series/Low-Particle Generation » Directional Control Valves
ModelTypeSonic conductance: CPower consumption (W)
10-V100Standard type0.037dm3(s・bar)0.35*(0.1)
10-V100Large flow type0.076dm3(s・bar)1.0

Auto Switch D

Hydraulic Equipment » Hydraulic Cylinders
SeriesTypeFeatures
D SeriesReed auto switchGeneral purpose type
2-color indicator
2-color indicator with diagnostic output
Water resistant 2-color indicator
With timer
D SeriesReed auto switchGeneral purpose type
2-color indicator

Low Maintenance Filter FN

Industrial Filters/Sintered Metal Elements » Industrial Filters
    ・Element replacement is not required.
    ・System circuit allows for the automatic cleaning of the element when clogged
SeriesPort sizeMax. operating pressureOperating temperature (℃)
FN1Rc11 MPaMAX. 80
FN4Rc21 MPaMAX. 80

Compact Direct Operated 2/3-Port Solenoid Valve for Chemical Liquids LVM

Process Valves » Compact 2/3 Port Solenoid Valves/Air Operated Valves
Chemical Liquid Valves/Fittings & Needle Valves/Tubing » Chemical Liquid Valves
    ・Low particle generation, Oil-free, Metal-free * Fluid contact parts
    ・Isolated structure
     The solenoid drive body is separated from the fluid area by a diaphragm.
    ・Power consumption: 1.0 W or less (With power saving circuit)
    ・Change in volume (Pumping volume): 0.01 µL or less
SeriesValve constructionValve typeOperating pressure rangeOrifice diameter (mmø)
LVM07
Base mounted
Direct operated rocker typeN.C.-75 kPa to 0.1 MPa0.8
LVM09
Body ported
Base mounted
Direct operated rocker typeN.C.
N.O.
Universal
-75 kPa to 0.2 MPa1 (Body ported)
1.1 (Base mounted)
LVM10
Body ported
Base mounted
Direct operated rocker typeN.C.
N.O.
Universal
-75 kPa to 0.25 MPa1.4
LVM15
Body ported
Base mounted
Direct operated rocker typeN.C.
N.O.
Universal
-75 kPa to 0.25 MPa
(Max. 0.6 MPa)
1.6
1 (High-pressure type)
LVM20
Body ported
Base mounted
Direct operated rocker typeN.C.
N.O.
Universal
-75 kPa to 0.3 MPa
(Body ported: 0.25 MPa)
2
LVM1□
Body ported
Base mounted
Direct operated poppet typeN.C.0 to 0.25 MPa1.5
LVM3□
Body ported
Base mounted
Direct operated poppet typeN.C.-90 kPa to 0.2 MPa5

Flow Sensor PFMV5/PFGV301

Switches/Sensors/Controller » Electronic Flow Switches/Sensors
    ・For suction verification of very small workpieces
    ・Repeatability: ± 2% F.S.
    ・Response speed: 5 ms or less, Withstand pressure: 500 kPa
    ・Grease-free, RoHS compliant
    ・Only 1 voltage monitor is required to cover the complete range.
    ・Related equipment: Suction filter ZFC050 series
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Flow Sensor PFMV5/PFGV301
    Manual
    Series View search result
    PFMVView search result
  • Flow Sensor PFMV5/PFGV301
    DoC/IM
    Series View search result
    PFMVView search result
SeriesRated flow range (L/min)
PFMV0.0 to 0.1
0 to 0.5
0 to 1
0 to 3
-0.5 to 0.5
-1 to 1
-3 to 3

3-Screen Display Sensor Monitor PSE300AC

Switches/Sensors/Controller » Electronic Pressure Switches/Sensors (Remote Type)
    ・It is possible to change the settings while checking the measured value.
    ・Visualization of settings
    ・NPN/PNP switch function
    ・Input range selection (for pressure/flow rate)
    ・Simple 3-step setting
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • 3-Screen Display Sensor Monitor PSE300AC
    Manual
    Series View search result
    PSE300ACView search result
  • 3-Screen Display Sensor Monitor PSE300AC
    DoC/IM
    Series View search result
    PSE300ACView search result
SeriesSet pressure rangeApplicable pressure sensors
PSE300AC−0.2 to 2.1 kPa
10 to −105 kPa
−105 to 105 kPa
−10 to 105 kPa
−50 to 525 kPa
−0.105 to 1.05 MPa
−0.105 to 2.1 MPa
−0.1 to 5.25 MPa
−0.1 to 10.5 MPa
PSE550
PSE531/PSE541/PSE561
PSE533/PSE543/PSE563/PSE573
PSE532
PSE564/PSE574
PSE530/PSE540/PSE560/PSE570
PSE575
PSE576
PSE577

Compact Pressure Switch ZSE2/ISE2

Switches/Sensors/Controller » Electronic Pressure Switches/Sensors (Self-contained Type)
    ・Can be integrated with a ZX or ZR ejector system
    ・Comes equipped with a suction filter as standard

    ∗ The ZSE2-0X series was discontinued in May 2024.
     Please select the ZSE10 series.
SeriesTypeSet pressure range
ZSE2Vacuum pressure0 to -101 kPa
ISE2LPositive pressure0 to 100 kPa
ISE2Positive pressure0 to 1 MPa

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