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Electro-Pneumatic Regulator / High Flow Rate ITV1100/2100/3100

Modular F.R.L. Units » Modular Connection Compatible Devices
Features
    ・For the stepless control of air pressure in proportion to electrical signals
    ・Flow rate: Max. approx. 5 times (Compared with the existing model)
    ・Sensitivity: ±0.2% F.S. or less
    ・Linearity: ±1% F.S. or less
    ・Hysteresis: 0.5% F.S. or less
Safety Instructions　F.R.L. Units/Precautions　Series Variations/Pressure Control Equipment　Green Procurement (RoHS)　Electro-Pneumatic Regulator Application Examples
シリーズ適用コンビネーション
ITV1100AF20-D
ITV2100AF30-D
ITV3100AF40-D

Electro-pneumatic Regulator Integrated Type 64-station Compatible Manifold Plug-in Compact 5-Port Solenoid Valve JSY3000-P

Directional Control Valves » Pilot Operated 4/5 Port Solenoid Valves
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: PROFINET Compatible Products
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: EtherNet/IP Compatible Products
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: EtherCAT Compatible Products
Features
    ・Solenoid valves and electro-pneumatic regulators can be connected to
    　the same manifold.
    　Valve stations/Number of outputs: For 4 to 64 stations∗/128 points
    　∗ Stations are only available in multiples of 4.
    　Electro-pneumatic regulator stations: 1 to 4 stations
    　I/O unit stations: Max. 8 stations
    ・Equipment integration allows for the centralized management of control
    　and wiring as well as reduced wiring
    　Reduced wiring, Reduced number of SI units, Reduced wiring work,
    　Compact
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Electro-pneumatic Regulator Integrated Type 64-station Compatible Manifold Plug-in Compact 5-Port Solenoid Valve JSY3000-P
    Manual
    Series View search result
    JSY3000-PView search result
  • Electro-pneumatic Regulator Integrated Type 64-station Compatible Manifold Plug-in Compact 5-Port Solenoid Valve JSY3000-P
    Manifold
    Series View search result
    JSY3000-PView search result
Safety Instructions　3/4/5 Port Solenoid Valves/Precautions　Selection/Technical Data
Green Procurement (RoHS)
SeriesEnclosureCommunication protocolApplicable devices
JSY3000-PIP65PROFINET
EtherNet/IP™
EtherCAT		SI unit: EX600
Valve: JSY3000
Electro-pneumatic regulator: ITV2340

Low-Pressure / High-Precision Type 5.0 MPa Maximum Supply Pressure High Pressure Electro-Pneumatic Regulator ITVX2030-X10

Pressure Control Equipment » Electro-Pneumatic Regulators
Features
    ・Improved accuracy at 1 MPa or less
    　Repeatability: ±0.5% F.S. or less
    　Pressure stability: 0.5% F.S. or less
    ・Max. supply pressure: 5.0 MPa
    ・Set pressure range: 0.01 to 3.0 MPa
    ・Max. flow rate: 3000 L/min (ANR)
    ・Fluid: Air, N2, O2, Ar
    ・Wetted parts: Fluorine grease
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
Safety Instructions　F.R.L. Units/Precautions　Series Variations/Pressure Control Equipment
Green Procurement (RoHS)
SeriesPort sizeSet pressure [MPa]
ITVX2030-X103/80.01 to 3.0

Plug-in Electro-Pneumatic Regulator / Manifold Type IITV23

Modular F.R.L./Pressure Control Equipment » Electro-Pneumatic Regulators
Pressure Control Equipment » Electro-Pneumatic Regulators
Features
    ・Connects the electro-pneumatic regulator and the fieldbus device to
    　the same manifold. This results in reduced wiring, less man hours for
    　piping and a more compact size.
    ・Compact
    　Installation area: 20% reduction, Occupied volume: 10% reduction
    ・Gain setting
    ・Sensitivity setting
    ・Remote control and monitoring are available.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Plug-in Electro-Pneumatic Regulator / Manifold Type IITV23
    Manual
    Series View search result
    ITV234
    Electro-pneumatic
    regulator for manifold    		View search result
    ITV235
    Electro-pneumatic
    regulator for manifold    		View search result
Safety Instructions　F.R.L. Units/Precautions　Series Variations/Pressure Control Equipment
Green Procurement (RoHS)
SeriesPort sizeSet pressure (MPa)
ITV234
Electro-pneumatic
regulator for manifold		ø10 One-touch fitting0 to 0.7
ITV235
Electro-pneumatic
regulator for manifold		ø10 One-touch fitting0 to 0.9

Electro-Pneumatic Regulator / High Flow Rate ITV1100/2100/3100

Modular F.R.L./Pressure Control Equipment » Electro-Pneumatic Regulators
Pressure Control Equipment » Electro-Pneumatic Regulators
Features
    ・For the stepless control of air pressure in proportion to electrical signals
    ・Flow rate: Max. approx. 5 times (Compared with the existing model)
    ・Sensitivity: ±0.2% F.S. or less
    ・Linearity: ±1% F.S. or less
    ・Hysteresis: 0.5% F.S. or less
Safety Instructions　F.R.L. Units/Precautions　Series Variations/Pressure Control Equipment　Green Procurement (RoHS)　Electro-Pneumatic Regulator Application Examples
SeriesPort sizeSet pressure
ITV11001/8，1/40.005 to 0.1 MPa
0.005 to 0.5 MPa
0.005 to 0.9 MPa
ITV21001/4，3/80.005 to 0.1 MPa
0.005 to 0.5 MPa
0.005 to 0.9 MPa
ITV31001/4，3/8，1/20.005 to 0.1 MPa
0.005 to 0.5 MPa
0.005 to 0.9 MPa

Modular F.R.L./Pressure Control Equipment 25A-

Series Compatible with Secondary Batteries Series 25A- » ModularF.R.L./Pressure Control Equipment
    ∗1 Available as simple specials. Please contact your local sales representative for more details.
    ∗2 Standard products: Standard products are copper (Cu) and zinc (Zn) free.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
Safety Instructions　Features　Related Products　Precautions　Green Procurement (RoHS)
SeriesModelSpecification
Modular F.R.L. UnitsSimple Specials 
 
 
Air Filter Separator25A-AF-DAir filter
Air Filter Separator25A-AFM-DMist separator
Air Filter Separator25A-AFD-DMicro mist separator
Air Filter Separator25A-AF-AAir filter
Air Filter Separator25A-AFM-AMist separator
Air Filter Separator25A-AFD-AMicro mist separator
Regulator25A-AR-DRegulator
Regulator25A-AR□K-DRegulator with backflow function
Regulator25A-AW-DFilter regulator
Regulator25A-AW□K-DFilter regulator with backflow function
Regulator25A-AR-BRegulator
Regulator25A-AR□□K-BRegulator with backflow function
Regulator25A-AW-BFilter regulator
Regulator25A-AW□□K-BFilter regulator with backflow function
Regulator25A-AWM-DMist Separator Regulator
Regulator25A-AWD-DMicro Mist Separator Regulator
Regulator25A-IR□-APrecision regulator
Regulator25A-ITV1000, 2000, 3000Electro-pneumatic regulator

For 300 mm Wafer: Parallel Seal Type Slit Valve XGTP

High Vacuum Equipment » Slit Valves
Features
    ・Long service life: 3 million cycles (within standard temperature range)
    ・Low particle generation: Reduced by 1/5 or more
    　(compared with the existing product)
    ・Easier maintenance
    　Easy replacement of bellows
    　Gate can be replaced from above. (Made to order)
    ・Safety measures
    　A mechanical end lock mechanism has been adopted.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • For 300 mm Wafer: Parallel Seal Type Slit Valve XGTP
    Manual
    Series View search result
    XGTPView search result
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Green Procurement (RoHS)
SeriesOperating environmental
pressure (Pa)(abs)		FluidOpening window size
(Height x Width)
(mm)		Operating
pressure
(MPa)(G)
XGTPAtmospheric pressure
to 10-6		Inert gas50 x 3360.45 to 0.6

Slit Valve XGT

High Vacuum Equipment » Slit Valves
    ・This product is suitable to act as the partition valve between the load lock chamber and the transfer chamber or between the transfer chamber and the process chamber in semiconductor equipment or other equipment.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Slit Valve XGT
    Manual
    Series View search result
    XGTView search result
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Green Procurement (RoHS)
SeriesOperating environmental
pressure (Pa)(abs)		FluidOpening window size
(Height x Width)
(mm)		Operating
pressure
(MPa)(G)
XGTAtmospheric pressure
to 10-6		Inert gas type vacuum32 x 222
46 x 236
50 x 336		0.45 to 0.6

Electro-Pneumatic Regulator ITV

Modular F.R.L./Pressure Control Equipment » Electro-Pneumatic Regulators
IO-Link Devices » Electro-Pneumatic Regulator
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: IO-Link Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: PROFIBUS Compatible Products
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: DeviceNet Compatible Products
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: CC-Link Compatible Products
Pressure Control Equipment » Electro-Pneumatic Regulators
Features
    ・Stepless control of air pressure in proportion to electrical signals
    ・Sensitivity: 0.2 kPa (100 kPa specification)
    ・Linearity: ±1% or less (F.S.)
    ・Hysteresis: 0.5% or less (F.S.)
    ・Communication: CC-Link, DeviceNet™, PROFIBUS DP, RS-232C, IO-Link

    　▶IO-Link Master
Safety Instructions　F.R.L. Units/Precautions　Series Variations/Pressure Control Equipment
Green Procurement (RoHS)　IO-Link Master　Electro-Pneumatic Regulator Application Examples
SeriesPort sizeSet pressure (MPa)
ITV0000Built-in One-touch fitting
φ4，φ5/32		0.001 to 0.1
0.001 to 0.5
0.001 to 0.9
ITV10001/8，1/40.005 to 0.1
0.005 to 0.5
0.005 to 0.9
ITV20001/4，3/80.005 to 0.1
0.005 to 0.5
0.005 to 0.9
ITV30001/4，3/8，1/20.005 to 0.1
0.005 to 0.5
0.005 to 0.9

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