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Slit Valve XGT

High Vacuum Equipment » Slit Valves
Equipment for the Semiconductor Industries » Slit Valve/Transfer
    ・This product is suitable to act as the partition valve between the load lock chamber and the transfer chamber or between the transfer chamber and the process chamber in semiconductor equipment or other equipment.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Slit Valve XGT
    Manual
    Series View search result
    XGTView search result
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Green Procurement (RoHS)
SeriesOperating environmental
pressure (Pa)(abs)		FluidOpening window size
(Height x Width)
(mm)		Operating
pressure
(MPa)(G)
XGTAtmospheric pressure
to 10-6		Inert gas type vacuum32 x 222
46 x 236
50 x 336		0.45 to 0.6

Electro-Pneumatic Regulator ITV

Modular F.R.L./Pressure Control Equipment » Electro-Pneumatic Regulators
IO-Link Devices » Electro-Pneumatic Regulator
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: IO-Link Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: PROFIBUS Compatible Products
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: DeviceNet Compatible Products
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: CC-Link Compatible Products
Pressure Control Equipment » Electro-Pneumatic Regulators
Features
    ・Stepless control of air pressure in proportion to electrical signals
    ・Sensitivity: 0.2 kPa (100 kPa specification)
    ・Linearity: ±1% or less (F.S.)
    ・Hysteresis: 0.5% or less (F.S.)
    ・Communication: CC-Link, DeviceNet®, PROFIBUS DP, RS-232C, IO-Link

    　▶IO-Link Master
Safety Instructions　F.R.L. Units/Precautions　Series Variations/Pressure Control Equipment
Green Procurement (RoHS)　IO-Link Master　Electro-Pneumatic Regulator Application Examples
SeriesPort sizeSet pressure (MPa)
ITV0000Built-in One-touch fitting
φ4，φ5/32		0.001 to 0.1
0.001 to 0.5
0.001 to 0.9
ITV10001/8，1/40.005 to 0.1
0.005 to 0.5
0.005 to 0.9
ITV20001/4，3/80.005 to 0.1
0.005 to 0.5
0.005 to 0.9
ITV30001/4，3/8，1/20.005 to 0.1
0.005 to 0.5
0.005 to 0.9

Electronic Vacuum Regulator ITV

Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Vacuum Regulators
Modular F.R.L./Pressure Control Equipment » Electro-Pneumatic Regulators
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: PROFIBUS Compatible Products
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: DeviceNet Compatible Products
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: CC-Link Compatible Products
Pressure Control Equipment » Electro-Pneumatic Regulators
Features
    ・Stepless control of vacuum pressure in proportion to electrical signals
    ・Communication: CC-Link, DeviceNet®, PROFIBUS DP, RS-232C
Safety Instructions　F.R.L. Units/Precautions　Series Variations/Pressure Control Equipment　Green Procurement (RoHS)
SeriesPort sizeSet pressure (MPa)
ITV009□Built-in One-touch fitting
φ4，φ5/32		－1 to －100
ITV209□1/4－1.3 to －80

Controller for Electro-Pneumatic Regulator IC

Modular F.R.L./Pressure Control Equipment » Electro-Pneumatic Regulators
Pressure Control Equipment » Electro-Pneumatic Regulators
    ・Is mainly used integrated with the ITV0000 series which is not equipped with a display function
    ・Converts digital input signals into analog output signals
    ・10 bit parallel input signal (maximum)
    　Possible pressure setting of 210= 1024 points
    ・4-point preset output
    　Applicable to programming functions with up to 20 steps
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Green Procurement (RoHS)

5.0 MPa Maximum Supply Pressure High Pressure Electro-Pneumatic Regulator ITVX

Modular F.R.L./Pressure Control Equipment » Electro-Pneumatic Regulators
Pressure Control Equipment » Electro-Pneumatic Regulators
Features
    ・Stepless control of air pressure proportional to electrical signals
    ・Maximum supply pressure: 5.0 MPa
    ・Set pressure range: 0.01 to 3.0 MPa
    ・Maximum flow rate: 3000 L/min (ANR)
    ・Fluid: Air, N2, O2, Ar
    ・Wetted parts: Fluorine grease
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • 5.0 MPa Maximum Supply Pressure High Pressure Electro-Pneumatic Regulator ITVX
    Manual
    Series View search result
    ITVXView search result
  • 5.0 MPa Maximum Supply Pressure High Pressure Electro-Pneumatic Regulator ITVX
    DoC/IM
    Series View search result
    ITVXView search result
Safety Instructions　F.R.L. Units/Precautions　Series Variations/Pressure Control Equipment
Green Procurement (RoHS)
SeriesPort sizeSet pressure (MPa)
ITVX3/80.01 to 3.0

3.0 MPa Maximum Supply Pressure High Pressure Electro-Pneumatic Regulator ITVH

Modular F.R.L./Pressure Control Equipment » Electro-Pneumatic Regulators
Pressure Control Equipment » Electro-Pneumatic Regulators
Features
    ・Maximum supply pressure: 3.0 MPa
    ・Set pressure range: 0.2 to 2.0 MPa
    　Stepless control of air pressure up to 2.0 MPa
    ・Stability: ±1% F.S. or less
    ・Power consumption: 3 W or less
    ・Maximum flow rate: 3,000 L/min (ANR)
    ・Wetted parts: Fluorine grease
  • 2D CAD
    Click here for 2D CAD
  • 3.0 MPa Maximum Supply Pressure High Pressure Electro-Pneumatic Regulator ITVH
    Manual
    Series View search result
    ITVHView search result
  • 3.0 MPa Maximum Supply Pressure High Pressure Electro-Pneumatic Regulator ITVH
    DoC/IM
    Series View search result
    ITVHView search result
Safety Instructions　F.R.L. Units/Precautions　Series Variations/Pressure Control Equipment
Green Procurement (RoHS)
SeriesPort sizeSet pressure (MPa)
ITVH1/4，3/80.2 to 2.0

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