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Stainless Steel High Vacuum Angle/In-line Valve XM/XY

High Vacuum Equipment » High Vacuum Valves
Equipment for the Semiconductor Industries » Exhaust Line
Equipment for the Semiconductor Industries » N2 Gas/Air Supply Line
    ・The precision casting, unified composition prevents the accumulation of gas.
    ・The XM series is interchangeable with the XL series aluminum high vacuum angle valve.

    Note) Size 16 is not available for the in-line type.
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesActuationShaft seal
type		Valve
type		MaterialFlange
size
XMA/XYAAir operatedBellows sealSingle acting
(N.C.)		Body : SCS13 (Equivalent to
stainless steel 304)
Bellows : Stainless steel 316L		16 to 80 Note)
XMC/XYCAir operatedBellows sealDouble actingBody : SCS13 (Eequivalent to
stainless steel 304)
Bellows : Stainless steel 316L		16 to 80 Note)
XMD/XYDAir operatedBellows/O-ring
seal		Single acting
(N.C.)		Body : SCS13 (Equivalent to
stainless steel 304)
Bellows : Stainless steel 316L		25 to 80
XMH/XYHManualBellows sealManualBody : SCS13 (Equivalent to
stainless steel 304)
Bellows : Stainless steel 316L		16 to 50 Note)

Thermo-chiller/Standard Type HRS100/150

Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
Temperature Adjustment Line » Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
Equipment for the Semiconductor Industries (Temperature Adjustment Line) » Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
Features
    ・No heater is required, as the circulating fluid is heated using only the heat exhausted by the refrigerating circuit.
    ・Compatible with power supplies in Europe, Asia, Oceania, North, Central, and South America
    ・Low-noise design: 70 dB (A)
    ・Outdoor installation: IPX4
    ・Compact, Space saving
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Can be used in a wide range of applications!
Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling methodCirculating fluid
HRS100
HRS150		5 to 35℃9.5 kW
14.5 kW
(60 Hz)		±1.0℃Air-cooled refrigeration
Water-cooled refrigeration		Tap water
Deionized water
Ethylene glycol aqueous solution (15%)

High Purity Chemical Liquid Valve/Air Operated, Non-Metallic Exterior LVQ

Chemical Liquid Valves/Fittings & Needle Valves/Tubing » Chemical Liquid Valves
Fluoropolymer Equipment/PVC Equipment » High Purity Chemical Liquid Valves
    ・Screwless construction, Non-metallic construction doesn't use metal
    　screws to secure the body of the actuator
    ・Body material: New PFA
    ・Diaphragm material: PTFE
    ・Actuator material: PVDF

    Note) Tubing size
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • High Purity Chemical Liquid Valve/Air Operated, Non-Metallic Exterior LVQ
    Manual
    Series Type View search result
    LVQIntegrated fittingView search result
    LVQSpace saving typeView search result
    LVQTube extensionView search result
Safety Instructions　Series Variations　Work Procedure Instructions/LQ1, 2　Fitting Procedure/LQ3　Green Procurement (RoHS)
SeriesTypeValve typeApplicable tubing O.D.
Metric size		Applicable tubing O.D.
Inch size		Orifice diameter
(mmø)
LVQIntegrated fittingN.C./N.O./
Double acting		3 to 251/8 to 14 to 22
LVQSpace saving typeN.C./N.O./
Double acting		Fitting size:
2 to 6		Fitting size:
2 to 6		4 to 22
LVQTube extensionN.C./N.O./
Double acting		6 to 25 Note)1/4 to 1 Note)4 to 22

Zero Differential Pressure Type/Pilot Operated 2 Port Solenoid Valve (2 Way Valve) VXZ

Process Valves » 2/3 Port Solenoid Valves/Air Operated Valves
Features
    ・For air, water, oil, heated water, high-temperature oil
    ・Body materials: Aluminum, Resin, C37, Stainless steel
    ・A type with One-touch fittings (Resin body) is available.
    ・IP65
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Zero Differential Pressure Type/Pilot Operated 2 Port Solenoid Valve (2 Way Valve) VXZ
    DoC/IM
    Series View search result
    VXZView search result
Safety Instructions　2 Port Solenoid Valves for Fluid Control Precautions
Model Selection/Flow Rate Characteristics
Series Variations/Selection Procedure/Solenoid Valves List/Air Operated Valves List
Green Procurement (RoHS)
SeriesValve typePort sizeOrifice diameter (mmø)
VXZN.C./N.O.φ10, φ12，φ3/8''
1/4 to 1		10 to 25

Digital Flow Switch Manifold for Water PF3WB/C/S/R

Switches/Sensors/Controller » Electronic Flow Switches/Sensors
IO-Link Compatible Products » Digital Flow Switch
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: IO-Link Compatible Products
Equipment for the Semiconductor Industries » Cooling Water Line
Features
    ・Applicable fluid: Water, Ethylene glycol aqueous solution
    ・Space saving
    　Footprint Max. 85% reduction
    　Weight Max. 65% reduction
    ・Needs no piping: Work-hour for installation reduced by up to 45%
    ・IO-Link compatible
    ・3-color/2-screen display
    ・Fluid temperature: 0 to 90℃

    　▶IO-Link Master
Safety Instructions　Pressure Switches/Flow Switches/Precautions　Flow Switch Series Variations
Green Procurement (RoHS)　IO-Link Master
SeriesRated flow range (L/min)
PF3WB
Integrated type (Basic type)		0.5 to 4
2 to 16
5 to 40
PF3WC
Integrated type (Straight type)		0.5 to 4
2 to 16
5 to 40
PF3WS
Remote type (Supply type)		0.5 to 4
2 to 16
5 to 40
PF3WR
Remote type (Return type)		0.5 to 4
2 to 16
5 to 40

Speed Controller Stainless Steel Series AS-FG

Flow Control Equipment » Speed Controllers Special Environments
    ・Stainless specifications for use in corrosive environments
    ・Stainless steel 303 is used for metal parts.
    ・Available with a restrictor (Made to order: -X214, -X21)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Flow Control Equipment/Precautions　Series Variation
Green Procurement (RoHS)
TypeSeriesPort size on
the cylinder side		Applicable tubing O.D.
Metric size		Applicable tubing O.D.
Inch size
With One-touch fittings
Elbow/Universal type		AS□□□1FG
Elbow/Universal type		M5 to 1/2φ3.2 to φ12φ1/8'' to φ1/2''
With One-touch fittings
In-line type		AS□□□1FG
In-line type		M5 to 1/2φ3.2 to φ12φ1/8'' to φ1/2''
With One-touch fittings
Dual speed controller		ASD□□□FG
Dual speed controller		M5 to 1/2φ3.2 to φ12φ1/8'' to φ1/2''

Elbow Type/Universal Type AS

Flow Control Equipment » Speed Controllers for General Purposes
    ・Available with a restrictor (Made to order: -X214, -X21)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Elbow Type/Universal Type AS
    Manual
    Type Series View search result
    Elbow typeAS12□1F to 42□1FView search result
    Universal typeAS13□1F to 43□1FView search result
    Fixed orifice typeAS1201F to 22□1F-X250
    Metal Knob TypeAS□2□1F-X242-J
Safety Instructions　Flow Control Equipment/Precautions　Series Variation　Green Procurement (RoHS)
TypeSeriesPort size
on the
cylinder side		Applicable tubing O.D.
Metric size		Applicable tubing O.D.
Inch size
Elbow typeAS12□1F to 42□1FM3 to 1/2φ2 to φ12φ1/8'' to φ1/2''
Universal typeAS13□1F to 43□1FM3 to 1/2φ2 to φ12φ1/8'' to φ1/2''
Fixed orifice typeAS1201F to 22□1F-X250M3 to 1/4φ4，φ6-
Metal Knob TypeAS□2□1F-X242-JM5 to 1/2φ4 to φ12-

Fluoropolymer Bore Through Connector LQHB

Chemical Liquid Valves/Fittings & Needle Valves/Tubing » Fittings/Needle Valves
Fluoropolymer Equipment/PVC Equipment » Fittings & Needle Valve/Tubing
Fittings and Tubing » Fittings for Special Environments(Clean/Fluoropolymer)
    ・It is possible to freely choose the tube’s positioning. As the tube runs through the fitting itself, a setting is available for any optional position.
    ・Can be used in the pressure feeding of chemical liquids, etc., during the production process of semiconductors
    ・Applicable to chemical liquids such as acid, alkali, and deionized water
    ・Materials: New PFA (Body, nut), PTFE (Collet)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Series Variations　Green Procurement (RoHS)
SeriesApplicable tubing O.D.
Metric size		Applicable tubing O.D.
Inch size		Operating temperature (℃)
LQHBφ3 to φ25φ1/8'' to φ1''0 to 200

Electric Actuator/Guide Rod Type, Motor Top Mounting Type LEYG

Electric Actuators/Cylinders » Rod Type/Guide Rod Type
    LEYG Series Step Motor (Servo/24 VDC), Servo Motor (24 VDC)
    ・Compact integration of guide rods
    　Achieves lateral load resistance and high non-rotating accuracy
    ・Lateral end load: 5 times more (Compared with a rod type, size 25, 100 stroke)
    ・Compatible with sliding bearings and ball bushing bearings
    　Compatible with moment load and stopper (sliding bearings)
    ・Speed control/Positioning: Max. 64 points
    ・Either positioning or pushing control can be selected.
    　It is possible to hold the actuator with the rod pushing on a workpiece, etc.
    ・Positioning repeatability: ±0.02 mm or less

    LEYG Series AC Servo Motor
    ・High output motor (100/200 W)
    ・Improved high speed transfer ability
    ・High acceleration/deceleration compatible (5000 mm/s2)
    ・Pulse input type
    ・With internal absolute encoder
    ・Motorless specification is available.　 Click here for details
    ・Compatible drivers: Click here for LECSS-T，LECY□
Safety Instructions　Electric Actuators/Precautions　Features　Series Variations　Simplified Selection Flow Chart　Green Procurement (RoHS)　CE/UL-compliance List　Actuator Cable　I/O Cable
SpecificationModelStroke
(mm)		Pushing force [N]Speed
(mm/s)		Screw lead (mm)
Step motor
(Servo/24 VDC)		LEYG1630 to 200Max. 141Max. 5002.5，5，10
Step motor
(Servo/24 VDC)		LEYG2530 to 300Max. 452Max. 5003，6，12
Step motor
(Servo/24 VDC)		LEYG3230 to 300Max. 707Max. 5004，8，16
Step motor
(Servo/24 VDC)		LEYG4030 to 300Max. 1058Max. 3004，8，16
Servo motor
(24 VDC)		LEYG16A30 to 200Max. 111Max. 5002.5，5，10
Servo motor
(24 VDC)		LEYG25A30 to 300Max. 130Max. 5003，6，12
AC servo motorLEYG25□S30 to 300Max. 485Max. 9003，6，12
AC servo motorLEYG32□S30 to 300Max. 588Max. 12005，10，20

Electric Actuator/High Rigidity Slider Type, Ball Screw Drive 
LEJS

Electric Actuators/Cylinders » Slider Type
    ・Low profile/Low center of gravity: Height reduced by approx. 36% (Reduced by 32 mm)
    ・Max. work load: 85 kg
    ・Positioning repeatability: ±0.01 mm
    ・Max. acceleration/deceleration: 20000 mm/s2
    ・Clean specification: Complies with ISO Class 4 (Class 10) (11-LEJS)
    ・Motorless specification is available.　 Click here for details
    ・Compatible drivers: Click here for LECSS-T，LECY□
Safety Instructions　Electric Actuators/Precautions　Auto Switches/Precautions
Features　Series Variations　Simplified Selection Flow Chart　Green Procurement (RoHS)
CE/UL-compliance List
Specification ModelStroke
(mm)		Work load (kg)
Horizontal		Speed
(mm/s)		Screw lead
(mm)
AC servo motorLEJS40200 to 1200Max. 55Max. 18008，16，24
AC servo motorLEJS63300 to 1500Max. 85Max. 180010，20，30

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