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3-Screen Display Multi-channel Digital Sensor Monitor 
10-PSE200A

Clean Series/Low-Particle Generation » Switches/Sensors

    Clean Series


    ・Up to 4 pressure sensors can be connected!
    　Centralized Control Saves Installation Space.
    　A Single Monitor Various Applications
    ・It is possible to change the settings while checking the measured value.
    ・IO-Link
  • 2D CAD
    Click here for 2D CAD
  • 3-Screen Display Multi-channel Digital Sensor Monitor 
    10-PSE200A
    Manual
    Series View search result
    10-PSE200AView search result
  • 3-Screen Display Multi-channel Digital Sensor Monitor 
    10-PSE200A
    DoC/IM
    Series View search result
    10-PSE200AView search result
Safety Instructions　Features/Basic Specifications/Clean Series Precautions
Pressure Switch Series Variations/Application Example
Glossary of Terms/Technical Information　Green Procurement (RoHS)
SeriesSet pressure rangeApplicable Pressure Sensors
10-PSE200A−0.2 to 2.1kPa
10 to −105kPa
−105 to 105kPa
−10 to 105kPa
−50 to 525kPa
−0.105 to 1.05MPa		10-PSE550
10-PSE531/PSE541/PSE561
10-PSE533/PSE543/PSE563
10-PSE532
10-PSE564
10-PSE530/PSE540/PSE560

Thermo-chiller/Standard Type HRS200

Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
Temperature Adjustment Line » Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
Equipment for the Semiconductor Industries (Temperature Adjustment Line) » Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
    ・3-phase 380 to 415 VAC (50 Hz), 3-phase 460 to 480 VAC (60 Hz)
    ・No heater is required, as the circulating fluid is heated using only the heat exhausted by the refrigerating circuit.
    ・Outdoor installation: IPX4
    ・Compact, Space saving

  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
Safety Instructions　Temperature Control Equipment/Precautions　Features/Series Variations
Technical Data　Temperature Control Equipment Warranty　Green Procurement (RoHS)
SeriesSet temperature
range		Cooling
capacity		Temperature
stability		Cooling methodCirculating fluid
HRS2005 to 35℃20.5 kW±1.0℃Air-cooled refrigerationTap water
Deionized water
Ethylene glycol aqueous solution (15%)

Normal Close High Vacuum Solenoid Valve XSA

Process Valves » Compact 2/3 Port Solenoid Valves/Air Operated Valves
High Vacuum Equipment » High Vacuum Valves
Equipment for the Semiconductor Industries » Exhaust Line
Equipment for the Semiconductor Industries » N2 Gas/Air Supply Line
Features
    ・Minimum operating pressure: 1 × 10-6 Pa (abs)
    ・Leakage: Internal 1.3 × 10-9 Pa·m3/s, External 1.3 × 10-11 Pa·m3/s
    ・2 types of fittings and female threads are available.
    ・Power consumption: Max. 25% reduction
    ・Weight: Max. 18% lighter (0.5 kg → 0.41 kg)
Safety Instructions　System Configuration/Role of Each Line and Component　Series Variations　Glossary　Auto Switches Common Specifications　Green Procurement (RoHS)
SeriesValve typeFluidPipingPort size
XSANormally closedAir
Inert gas		Face seal fitting
Compression fitting		1/4, 3/8
XSANormally closedAir
Inert gas		Rc, NPT female thread1/8, 1/4, 3/8

Quick Exhaust Valve AQ

Flow Control Equipment » Related Equipment
    ・A wide selection of models are available.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Flow Control Equipment/Precautions　Series Variation
Green Procurement (RoHS)
TypeSeriesPort sizeApplicable tubing O.D.
LipAQ1500/AQ1510M5，1/8-
DiaphragmAQ2000 to AQ50001/8 to 3/4-
Built-in One-touch fittingsAQ240F/AQ340F-φ4 to φ6，φ1/4''

Vacuum Gripper for Collaborative Robots ZXP7□12-X1□/ZXP7□11-X1□
for YASKAWA Electric Corporation collaborative robot MOTOMAN-HC10DT 

Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Gripper for Collaborative Robots
Air Gripper for Collaborative Robots » Vacuum Grippers
Features
    ・Can be operated simply by connecting 1 compressed air supply tube and the built-in cable for electric wiring
    ・Integrated vacuum ejector, air supply/release valve, pressure switch, and cups
    ・As the air piping and electric wiring built into the robot are used, no external wiring or piping is required.
    　No interference with workpieces or workers
    ・Features a rounded appearance without corners
    ・A wide variety of cup variations are available to support a wide range of workpieces.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Vacuum Gripper for Collaborative Robots ZXP7□12-X1□/ZXP7□11-X1□
    for YASKAWA Electric Corporation collaborative robot MOTOMAN-HC10DT 
    Manual
    Series View search result
    ZXP7□12-X1□
    ZXP7□11-X1□    		View search result
Safety Instructions　Vacuum Equipment/Precautions　Series Variations/Model Selection
Green Procurement (RoHS)
SeriesCup formCup diameterSuction flow rate
[L/min(ANR)]		Air consumption
[L/min(ANR)]
ZXP7□12-X1□
ZXP7□11-X1□		Flat
Flat with rib
Bellows
Thin flat
Multistage bellows
2.5-stage bellows
5.5-stage bellows		φ8 to φ321757

Compact Vacuum Unit (Vacuum Generators) ZB

Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other) » Vacuum Ejectors (Vacuum Generators)/Vacuum Pump Systems
IO-Link Devices » Vacuum Manifold
    ・Compatible with ejector systems and vacuum pump systems
    ・Quick response: Response time of the valve 5 ms, vacuum response time
    　28 ms
    ・Energy saving: Air consumption reduced by 17%, Vacuum pressure
    　reached increased by 21%
    ・Compact/Lightweight: 46 g
    ・With vacuum pressure switch
    　Can copy to up to 10 switches simultaneously
    ・IO-Link compatible
Safety Instructions　Vacuum Equipment/Precautions　Series Variations/Model Selection
Green Procurement (RoHS)
Ejector seriesNozzle diameter
(mm)		Max. suction flow
[L/min(ANR)]		Air consumption
[L/min(ANR)]		Guidelines for applicable pad
(mm)		Vacuum pump system series
ZB030.323.52 to 8ZB00
ZB040.43.56.52 to 10ZB00
ZB050.54.5102 to 13ZB00
ZB060.67182 to 20ZB00

Step Motor Driver (Pulse Input Type) LECPA

Electric Actuators/Cylinders » Controllers/Drivers
    ・A driver that uses pulse signals to allow positioning at any position
    　The actuator can be controlled from the customers' positioning unit.
    ・Return-to-origin command signal
    ・With force limit function (Pushing force/Gripping force operations are available.)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Step Motor Driver (Pulse Input Type) LECPA
    Manual
    Type Series View search result
    Pulse input
    type    		LECPAView search result
  • Step Motor Driver (Pulse Input Type) LECPA
    DoC/IM
    Type Series View search result
    Pulse input
    type    		LECPAView search result
Safety Instructions　Electric Actuators/Precautions　Features
Series Variations　Simplified Selection Flow Chart　Wiring Method
Green Procurement (RoHS)
TypeSeriesCompatible
motor		Power
supply
voltage		Parallel
I/O
Input		Parallel
I/O
Output		Number
of step
data
Pulse input
type		LECPAStep motor
(Servo/24 VDC)		24 VDC
±10%		5
(Photo-coupler
isolation)		9
(Photo-coupler
isolation)		―

Step Motor Controller JXCE1/91/P1/D1/L□/M1

Electric Actuators/Cylinders » Controllers/Drivers
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: PROFINET Compatible Products
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: EtherNet/IP Compatible Products
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: EtherCAT Compatible Products
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: DeviceNet Compatible Products
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: CC-Link Compatible Products
Features
    ・EtherCAT, EtherNet/IP™, PROFINET, DeviceNet®,
    　IO-Link, and CC-Link compatible
    ・Two types of operation command:
    　Step no. defined operation, Numerical data defined operation
    ・Transition wiring of communication cables
    ・Numerical monitoring available
    ・IO-Link communication can be performed.
    ・Controller with STO sub-function/JXC□F
Safety Instructions　Electric Actuators/Precautions　Features　Series Variations
Simplified Selection Flow Chart　Green Procurement (RoHS)　CE/UL-compliance List
SeriesCompatible
motor		Power
supply
voltage		Fieldbus
JXCE1 (Standard)
JXCEF (With subfunction)		Step motor
(Servo/24 VDC)		24 VDC
±10%		EtherCAT™
JXC91 (Standard)
JXC9F (With subfunction)		Step motor
(Servo/24 VDC)		24 VDC
±10%		EtherNet/IP™
JXCP1 (Standard)
JXCPF (With subfunction)		Step motor
(Servo/24 VDC)		24 VDC
±10%		PROFINET
JXCD1 (Standard)Step motor
(Servo/24 VDC)		24 VDC
±10%		DeviceNet™
JXCL1 (Standard)
JXCLF (With subfunction)		Step motor
(Servo/24 VDC)		24 VDC
±10%		IO-Link
JXCM1 (Standard)Step motor
(Servo/24 VDC)		24 VDC
±10%		CC-Link

Electric Actuator/Guide Rod Type, In-line Motor Type LEYG□D

Electric Actuators/Cylinders » Rod Type/Guide Rod Type
    Series LEYG Step Motor (Servo/24 VDC) Servo Motor (24 VDC)
    ・Compact integration of guide rods
    　Achieves lateral load resistance and high non-rotating accuracy.
    ・Lateral end load: 5 times more (compared with rod type, size 25 and 100 stroke)
    ・Compatible with sliding bearing and ball bushing bearing.
    　Compatible with moment load and stopper (sliding bearing).
    ・Speed control/Positioning: Max. 64 points
    ・Positioning and pushing control can be selected.
    　Possible to hold the actuator when pushing the rod to a workpiece, etc.
    ・Positioning repeatability: ±0.02 mm or less

    Series LEY AC Servo Motor
    ・High output motor (100/200 W)
    ・Improved high speed transfer ability
    ・High acceleration/deceleration compatible （5,000mm/s2）
    ・Pulse input type
    ・With internal absolute encoder
    ・Motorless specification is available.　 Click here for details
    ・Compatible drivers: Click here for LECSS-T，LECY□
Safety Instructions　Electric Actuators/Precautions　Features　Series Variations
Simplified Selection Flow Chart　Green Procurement (RoHS)　CE/UL-compliance List
Spec.ModelStroke
(mm)		Pushing force [N]Speed
(mm/s)		Screw lead
(mm)
Step motor
(Servo/24 VDC)		LEYG16D30 to 200Max. 141Max. 5002.5，5，10
Step motor
(Servo/24 VDC)		LEYG25D30 to 200Max. 452Max. 5003，6，12
Step motor
(Servo/24 VDC)		LEYG32D30 to 200Max. 707Max. 5004，8，16
Step motor
(Servo/24 VDC)		LEYG40D30 to 200Max. 1058Max. 3004，8，16
Servo motor
(24 VDC)		LEYG16DA30 to 200Max. 111Max. 5002.5，5，10
Servo motor
(24 VDC)		LEYG25DA30 to 300Max. 130Max. 5003，6，12
AC servo motorLEYG25DS30 to 300Max. 485Max. 9003，6，12
AC servo motorLEYG32DS30 to 300Max. 736Max. 10004，8，16

Rotary Gripper MRHQ

Rotary Actuators/Air Grippers » Angular Type Air Grippers
    ・The gripper function and the rotation function have been integrated in a compact package.
    ・It is possible to grip and reverse workpieces in conveyor lines with a single unit.
    ・Rotation range and angle are adjustable.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　Rotary Actuators/Precautions　Air Grippers/Precautions
Auto Switches/Precautions　Air Grippers Series Variations/Model Selection　Green Procurement (RoHS)
TypeSeriesCylinder bore size (mm)
StandardMRHQ10，16，20，25
With dust coverMRHQ-X11□10，16，20，25

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