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4/5 Port Solenoid Valve 10-SYJ
Clean Series/Low-Particle Generation » Directional Control Valves
Clean Series
＊The EX510 series is to be discontinued. When designing new equipment
and facilities, consider using another series (EX260/EX600) instead.
Safety Instructions Features/Basic Specifications/Clean Series Precautions
3/4/5 Port Solenoid Valves/Precautions Green Procurement (RoHS)
3/4/5 Port Solenoid Valves/Precautions Green Procurement (RoHS)
| Series | Sonic conductance: C | Cylinder size | Power consumption (W) |
|---|---|---|---|
| 10-SYJ3000 | 0.46dm3(s・bar) | φ25 | 0.35 |
| 10-SYJ5000 | 0.83dm3(s・bar) | φ40 | 0.35 |
| 10-SYJ7000 | 2.9dm3(s・bar) | φ50 | 0.35 |
Suction Guard FHG
Hydraulic Equipment » Hydraulic Equipment
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・Prevents collected dust from falling into the tank
・The replacement of flushing oil is not required.
・Easy maintenance and no air mixing
・Integrated lubrication port strainer, suction filter, and air breather
・It is possible to detect clogging with the differential pressure indicator and
differential pressure indication switch (CB-□□H).
| Series | Port size | Rated flow L/min | Operating pressure | Element μm (Nominal filtration) |
|---|---|---|---|---|
| FHG | 1/2B to 3B | 18 to 450 | Negative pressure | Micromesh : 74, 105, 149 |
Small Bore Hydraulic Cylinder CHN
Hydraulic Equipment » Hydraulic Cylinders
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・Lightweight with a stainless steel tube and aluminum cover
・Uses a cushion seal type mechanism, Reduces impact at the stroke end, Improves durability
・Smaller cover section compared to tie-rod cylinders
Safety Instructions Hydraulic Cylinders/Precautions Auto Switches/Precautions
Series Variations Technical Data Green Procurement (RoHS)
Series Variations Technical Data Green Procurement (RoHS)
| Series | Nominal pressure (MPa) | Tube material | Action | Bore Size (mm) |
|---|---|---|---|---|
| CHN | 7 | Stainless steel | Double acting, Single rod | 20, 25, 32, 40 |
Reinforced Corrugated Cardboard Specification/Longer Length Reel: FEP Tubing (Fluoropolymer) TH0604-X64
Pneumatic Instrumentation Equipment » Piping Materials-
・Length per roll: 500/250 m
・Operating temperature: 200℃
・Compatible with the Food Sanitation Law.
| Series | Tube size Tubing O.D. ×Tubing I.D. | Fluid |
|---|---|---|
| TH0604-X64 | φ6×φ4 | Air, Water, Inert gas |
NAMUR Interface 3/5-Port Solenoid Valve IP67 Compliant, Hygienic Design Type VFN2120N-X23/-X36
Pneumatic Instrumentation Equipment » Solenoid Valves
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・A hygienic design has been adopted.
Resin body with less concaves
Direct cleaning of the valve is possible. (IP67)
・3-port/5-port valves are available.
Due to the function plate, 3/5-port valves are selectable.
・Low power consumption
Power consumption: 0.5 W
・Port threads: NPT1/4, G1/4
| Series | Flow rate characteristics (Cv/Effective area) | Manual override | Type of coil insulation | Power consumption (W) |
|---|---|---|---|---|
| VFN2120N-X23/-X36 | 0.8/11mm2 | Push type Locking type (Tool required) Locking type (Manual type) | Class B | 0.5 |
Pneumatic-Pneumatic Positioner IP5000/5100
Pneumatic Instrumentation Equipment » Positioners
| Series | Port size | Supply air pressure (MPa) | Input pressure (MPa) |
|---|---|---|---|
| IP5000/5100 | Rc1/4 | 0.14 to 0.7 | 0.02 to 0.1 |
Industrial Filter/Vessel Series FGG
Industrial Filters/Sintered Metal Elements » Industrial Filters
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・Ideal for high-flow filtration (Max. 350 L/min)
・Easy element replacement for the V-band type
(With cover anti-scattering mechanism)
| Series | Port size | Max. operating pressure | Operating temperature (℃) |
|---|---|---|---|
| FGG | Rc2 | 0.7 MPa | MAX. 80 |
Aluminum High Vacuum Angle Valve XL□
High Vacuum Equipment » High Vacuum Valves
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・High fluorine resistance
・Minimal outgassing
・Minimal contamination from heavy metals
∗ The XLA(V)/C/F(V)/G with flange sizes of 16 to 80 has been
discontinued in September 2017.
Please select the XLA(V)-2/XLC-2/XLF(V)-2/XLG-2 series.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Auto Switches Common Specifications Green Procurement (RoHS)
| Series | Actuation | Valve type | Shaft seal type | Application | Flange size |
|---|---|---|---|---|---|
| XLA | Air operated | Single acting (N.C.) | Bellows seal | Dust-free Cleaned | 100・160 |
| XLAV (With solenoid valve) | Air operated | Single acting (N.C.) | Bellows seal | Dust-free Cleaned | 100・160 |
| XLC | Air operated | Double acting | Bellows seal | Dust-free Cleaned | 100・160 |
| XLCV (With solenoid valve) | Air operated | Double acting | Bellows seal | Dust-free Cleaned | 100・160 |
| XLF | Air operated | Single acting (N.C.) | O-ring seal | High-speed operation High operating cycles | （80）・100・160 |
| XLFV (With solenoid valve) | Air operated | Single acting (N.C.) | O-ring seal | High-speed operation High operating cycles | （80）・100・160 |
| XLG | Air operated | Double acting | O-ring seal | High-speed operation High operating cycles | 100・160 |
| XLGV (With solenoid valve) | Air operated | Double acting | O-ring seal | High-speed operation High operating cycles | 100・160 |
| XLD | Air operated | Single acting (N.C.) | Bellows/O-ring seal | For preventing dust turbulence For preventing a pump from running overloaded | 25 to 160 |
| XLDV (With solenoid valve) | Air operated | Single acting (N.C.) | Bellows/O-ring seal | For preventing dust turbulence For preventing a pump from running overloaded | 25 to 160 |
| XLH | Manual | Manual | Bellows seal | Dust-free Cleaned | 16 to 50 |
| XLS | Electromagnetic | Single acting (N.C.) | (Bellows balance) | For portable equipment not requiring air | 16, 25 |
Diaphragm Valve for Ultra High Purity AP
Process Gas Equipment » Process Gas Equipment
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・For UHP gas delivery in semiconductor and other clean industries
・Used as a gas shutoff valve
・No spring is used for the wetted parts and the drive part is also separated from the diaphragm. Dead space in the flow path is small in order to suppress particle generation.
Safety Instructions Process Gas Equipment/Common Precautions Series Variations Valve and Regulator Recommendations Technical Data/Glossary of Terms Green Procurement (RoHS)
| Series | Description | Type | Body material |
|---|---|---|---|
| AP | For Ultra High Purity | Air Operated Type Diaphragm Valve | 316L SS secondary remelt |
| AP | For Ultra High Purity | Manually Operated Type Diaphragm Valve | 316L SS secondary remelt |
| AP | For Ultra High Purity | Metering Valve | 316L SS secondary remelt |
| AZ | For Ultra High Purity | Air Operated Type Diaphragm Valve | SUS316L |
| AZ | For Ultra High Purity | Manually Operated Type Diaphragm Valve | SUS316L |
| AZ | For Ultra High Purity | Metering Valve | SUS316L |
| AK | For General Applications | Air Operated Type Diaphragm Valve | SUS316 |
| AK | For General Applications | Manually Operated Type Diaphragm Valve | SUS316 |
| AK | For General Applications | Metering Valve | SUS316 |
Thermo-chiller/High-performance Type HRZ
Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible ProductsIndustrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: DeviceNet Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance Type & Inverter Type
This product can only be shipped to China, Taiwan, Korea, Singapore,Malaysia, and Japan. For use in regions other than the aforementioned, order the HRZ-F.
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・Suitable for semiconductor processing equipment with a wide variety of
features, such as high-temperature stability, a wide temperature range,
failure diagnosis, external communication, etc.
・Compliant with various safety standards
・Compliant with UL Standards, SEMI Standards, CE-marking
Safety Instructions Temperature Control Equipment/Precautions Features/Series Variations
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
Technical Data Temperature Control Equipment Warranty Green Procurement (RoHS)
| Series | Set temperature range | Cooling capacity | Temperature stability | Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRZ | -20 to 40℃ 20 to 90℃ -20 to 90℃ | 1 kW, 2 kW, 4 kW, 8 kW | ±0.1℃ | Water-cooled refrigeration | Fluorinated fluids/Ethylene glycol aqueous solution (60%)/Tap water, Deionized water |
