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Slit Valves

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For 300 mm Wafer: Parallel Seal Type Slit Valve XGTP

    ・Long service life: 3 million cycles (within standard temperature range)
    ・Low particle generation: Reduced by 1/5 or more
     (compared with the existing product)
    ・Easier maintenance
     Easy replacement of bellows
     Gate can be replaced from above. (Made to order)
    ・Safety measures
     A mechanical end lock mechanism has been adopted.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • For 300 mm Wafer: Parallel Seal Type Slit Valve XGTP
    Manual
    Series View search result
    XGTPView search result
SeriesOperating environmental
pressure (Pa)(abs)
FluidOpening window size
(Height x Width)
(mm)
Operating
pressure
(MPa)(G)
XGTPAtmospheric pressure
to 10-6
Inert gas50 x 3360.45 to 0.6

Slit Valve XGT

    ・This product is suitable to act as the partition valve between the load lock chamber and the transfer chamber or between the transfer chamber and the process chamber in semiconductor equipment or other equipment.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
  • Slit Valve XGT
    Manual
    Series View search result
    XGTView search result
SeriesOperating environmental
pressure (Pa)(abs)
FluidOpening window size
(Height x Width)
(mm)
Operating
pressure
(MPa)(G)
XGTAtmospheric pressure
to 10-6
Inert gas type vacuum32 x 222
46 x 236
50 x 336
0.45 to 0.6

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