高真空閥
鋁製高真空L型閥 XL□
| 系列 | 操作方式 | 閥形式 | 軸密封 方式 | 用途 | 法蘭 尺寸 |
|---|---|---|---|---|---|
| XLA | 氣控型 | 伸縮囊密封 | 單動 (N.C.) | Body : Aluminum alloy Bellows : Stainless steel 316L | 16 ～ 160 |
| XLAV (附電磁閥) | 氣控型 | 伸縮囊密封 | 單動 (N.C.) | Body : Aluminum alloy Bellows : Stainless steel 316L | 16 ～ 160 |
| XLC | 氣控型 | 伸縮囊密封 | 複動 | Body : Aluminum alloy Bellows : Stainless steel 316L | 16 ～ 160 |
| XLCV (附電磁閥) | 氣控型 | 伸縮囊密封 | 複動 | Body : Aluminum alloy Bellows : Stainless steel 316L | 16 ～ 80 |
| XLF | 氣控型 | O形環密封 | 單動 (N.C.) | Body : Aluminum alloy | 16 ～ 160 |
| XLFV (附電磁閥) | 氣控型 | O形環密封 | 單動 (N.C.) | Body : Aluminum alloy | 16 ～ 160 |
| XLG | 氣控型 | O形環密封 | 複動 | Body : Aluminum alloy | 16 ～ 80 |
| XLGV (附電磁閥) | 氣控型 | O形環密封 | 複動 | Body : Aluminum alloy | 16 ～ 80 |
| XLD | 氣控型 | 伸縮囊密封 O形環密封 | 單動 (N.C.) | Body : Aluminum alloy Bellows : Stainless steel 316L | 25 ～ 160 |
| XLDV (附電磁閥) | 氣控型 | 伸縮囊密封 O形環密封 | 單動 (N.C.) | Body : Aluminum alloy Bellows : Stainless steel 316L | 25 ～ 160 |
| XLH | Manual | 伸縮囊密封 | Manual | Body : Aluminum alloy Bellows : Stainless steel 316L | 16 ～ 50 |
| XLS | Electromagnetic | Pressure balanced bellow seal | 單動 (N.C.) | Body : Aluminum alloy Bellows : Stainless steel 316L | 16, 25 |
產品特點
Uniform baking temperature
Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve.
Lightweight, Compact
Large conductance, small body, excellent resistance against fluorine corrosion (body)
Low outgassing
Low outgassing makes it possible to use a lower capacity pump and also to shorten exhaust time.
Little heavy metal contamination
The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
(Bellows seal type)
Bellows assembly can be replaced which reduces maintenance costs and waste materials.
・Ambient temperature: Max. 150° C (Sensor)
・2-color indicator
For 100/120° C
